ATE523693T1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
ATE523693T1
ATE523693T1 AT06023139T AT06023139T ATE523693T1 AT E523693 T1 ATE523693 T1 AT E523693T1 AT 06023139 T AT06023139 T AT 06023139T AT 06023139 T AT06023139 T AT 06023139T AT E523693 T1 ATE523693 T1 AT E523693T1
Authority
AT
Austria
Prior art keywords
components
vacuum pump
attached active
housing
pump
Prior art date
Application number
AT06023139T
Other languages
English (en)
Inventor
Bernhard Tatzber
Robert Watz
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE523693T1 publication Critical patent/ATE523693T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
AT06023139T 2005-12-14 2006-11-07 Vakuumpumpe ATE523693T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005059636A DE102005059636A1 (de) 2005-12-14 2005-12-14 Vakuumpumpe

Publications (1)

Publication Number Publication Date
ATE523693T1 true ATE523693T1 (de) 2011-09-15

Family

ID=37814035

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06023139T ATE523693T1 (de) 2005-12-14 2006-11-07 Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP1798417B1 (de)
AT (1) ATE523693T1 (de)
DE (1) DE102005059636A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800009500A1 (it) * 2018-10-16 2020-04-16 Eurosets Srl Pompa centrifuga a trascinamento magnetico
GB2607605B (en) * 2021-06-08 2023-07-05 Leybold Gmbh Apparatus and vacuum system
EP4269804B1 (de) * 2023-08-14 2025-10-29 Pfeiffer Vacuum Technology AG Vakuumpumpe

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4122487C2 (de) * 1991-07-06 1997-09-18 Grundfos Int Förderaggregat aus einer Strömungsarbeitsmaschine und aus einem Antriebsmotor
DE9214308U1 (de) * 1992-10-23 1993-01-07 Siegenia-Frank Kg, 5900 Siegen Spiralgehäuse für Radialgebläse
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
DE19909371A1 (de) * 1999-03-03 2000-09-07 Wilo Gmbh Kreiselpumpe mit Serviceschnittstelle
DE29906811U1 (de) * 1999-04-20 2000-08-31 Brinkmann Pumpen K.H. Brinkmann GmbH & Co. KG, 58791 Werdohl Mehrstufige Kreiselpumpe
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP4484470B2 (ja) * 2002-10-23 2010-06-16 エドワーズ株式会社 分子ポンプ、及びフランジ
DE10342907A1 (de) * 2003-09-17 2005-04-21 Pfeiffer Vacuum Gmbh Vakuumpumpe mit schnelldrehendem Rotor

Also Published As

Publication number Publication date
EP1798417B1 (de) 2011-09-07
DE102005059636A1 (de) 2007-06-21
EP1798417A2 (de) 2007-06-20
EP1798417A3 (de) 2010-05-19

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