ATE527208T1 - Mikrosystem mit verformbarer brücke - Google Patents

Mikrosystem mit verformbarer brücke

Info

Publication number
ATE527208T1
ATE527208T1 AT05857762T AT05857762T ATE527208T1 AT E527208 T1 ATE527208 T1 AT E527208T1 AT 05857762 T AT05857762 T AT 05857762T AT 05857762 T AT05857762 T AT 05857762T AT E527208 T1 ATE527208 T1 AT E527208T1
Authority
AT
Austria
Prior art keywords
bridge
microsystem
substrate
deformable bridge
deformable
Prior art date
Application number
AT05857762T
Other languages
English (en)
Inventor
Pierre-Louis Charvet
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE527208T1 publication Critical patent/ATE527208T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/016—Switches characterised by the shape having a bridge fixed on two ends and connected to one or more dimples

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Bridges Or Land Bridges (AREA)
AT05857762T 2004-10-26 2005-10-11 Mikrosystem mit verformbarer brücke ATE527208T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0411408A FR2876995B1 (fr) 2004-10-26 2004-10-26 Microsysteme comportant un pont deformable
PCT/FR2005/002512 WO2006045914A1 (fr) 2004-10-26 2005-10-11 Microsysteme comportant un pont deformable

Publications (1)

Publication Number Publication Date
ATE527208T1 true ATE527208T1 (de) 2011-10-15

Family

ID=34951200

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05857762T ATE527208T1 (de) 2004-10-26 2005-10-11 Mikrosystem mit verformbarer brücke

Country Status (6)

Country Link
US (1) US7709757B2 (de)
EP (1) EP1805100B1 (de)
JP (1) JP2008517777A (de)
AT (1) ATE527208T1 (de)
FR (1) FR2876995B1 (de)
WO (1) WO2006045914A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101373736B1 (ko) * 2006-12-27 2014-03-14 삼성디스플레이 주식회사 표시 장치 및 그 구동 방법
WO2013033722A1 (en) * 2011-09-02 2013-03-07 Cavendish Kinetics, Inc Merged legs and semi-flexible anchoring for mems device
JP2022534713A (ja) * 2019-05-28 2022-08-03 ベーウントエル・インダストリアル・オートメイション・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 運搬装置
US12330933B2 (en) * 2022-12-20 2025-06-17 xMEMS Labs, Inc. Cantilever structure with intermediate substrate connection having a film with on anchor with protrusion

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3512963B2 (ja) * 1995-12-15 2004-03-31 テキサス インスツルメンツ インコーポレイテツド マイクロメカニカルデバイス
JP3368304B2 (ja) * 1997-10-17 2003-01-20 オムロン株式会社 静電マイクロリレー
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
JPH11250792A (ja) * 1998-03-03 1999-09-17 Nippon Telegr & Teleph Corp <Ntt> 静電型スイッチ素子
US6046659A (en) * 1998-05-15 2000-04-04 Hughes Electronics Corporation Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications
JP3210966B2 (ja) * 1999-06-29 2001-09-25 東京工業大学長 静電マイクロアクチュエータ
JP3538109B2 (ja) * 2000-03-16 2004-06-14 日本電気株式会社 マイクロマシンスイッチ
WO2003014789A2 (en) * 2001-07-05 2003-02-20 International Business Machines Coporation Microsystem switches
US6531668B1 (en) * 2001-08-30 2003-03-11 Intel Corporation High-speed MEMS switch with high-resonance-frequency beam
FR2831705B1 (fr) * 2001-10-25 2004-08-27 Commissariat Energie Atomique Micro-condensateur variable a fort rapport et faible tension d'actionnement
EP1321957A1 (de) * 2001-12-19 2003-06-25 Abb Research Ltd. Mikrorelaiseinrichtung mit geschlitzter Membrane
JP2003242873A (ja) * 2002-02-19 2003-08-29 Fujitsu Component Ltd マイクロリレー
US6657525B1 (en) * 2002-05-31 2003-12-02 Northrop Grumman Corporation Microelectromechanical RF switch
US6686820B1 (en) * 2002-07-11 2004-02-03 Intel Corporation Microelectromechanical (MEMS) switching apparatus
FR2848331B1 (fr) * 2002-12-10 2005-03-11 Commissariat Energie Atomique Commutateur micro-mecanique et procede de realisation
US7280015B1 (en) * 2004-12-06 2007-10-09 Hrl Laboratories, Llc Metal contact RF MEMS single pole double throw latching switch
JP4792994B2 (ja) * 2005-03-14 2011-10-12 オムロン株式会社 静電マイクロ接点開閉器およびその製造方法、ならびに静電マイクロ接点開閉器を用いた装置

Also Published As

Publication number Publication date
EP1805100A1 (de) 2007-07-11
WO2006045914A1 (fr) 2006-05-04
US20070279831A1 (en) 2007-12-06
FR2876995A1 (fr) 2006-04-28
FR2876995B1 (fr) 2007-05-04
EP1805100B1 (de) 2011-10-05
JP2008517777A (ja) 2008-05-29
US7709757B2 (en) 2010-05-04

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Legal Events

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