ATE527690T1 - Werkzeuglade- und pufferungssystem auf liftbasis - Google Patents

Werkzeuglade- und pufferungssystem auf liftbasis

Info

Publication number
ATE527690T1
ATE527690T1 AT05789226T AT05789226T ATE527690T1 AT E527690 T1 ATE527690 T1 AT E527690T1 AT 05789226 T AT05789226 T AT 05789226T AT 05789226 T AT05789226 T AT 05789226T AT E527690 T1 ATE527690 T1 AT E527690T1
Authority
AT
Austria
Prior art keywords
carrier
holding station
casing
substrate transport
lift
Prior art date
Application number
AT05789226T
Other languages
English (en)
Inventor
Gilchrist Ulysses
Michael Bufano
Fosnight William
Christopher Hofmeister
Gerald Friedman
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Application granted granted Critical
Publication of ATE527690T1 publication Critical patent/ATE527690T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/34—Devices for discharging articles or materials from conveyor 
    • B65G47/46—Devices for discharging articles or materials from conveyor  and distributing, e.g. automatically, to desired points
    • B65G47/50—Devices for discharging articles or materials from conveyor  and distributing, e.g. automatically, to desired points according to destination signals stored in separate systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/18—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1918—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3406—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door or cover
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3408—Docking arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Lift-Guide Devices, And Elevator Ropes And Cables (AREA)
  • Maintenance And Inspection Apparatuses For Elevators (AREA)
  • Automation & Control Theory (AREA)
AT05789226T 2004-08-23 2005-08-23 Werkzeuglade- und pufferungssystem auf liftbasis ATE527690T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US60409904P 2004-08-23 2004-08-23
US11/210,918 US7806643B2 (en) 2004-08-23 2005-08-23 Elevator-based tool loading and buffering system
PCT/US2005/029840 WO2006023873A2 (en) 2004-08-23 2005-08-23 Elevator-based tool loading and buffering system

Publications (1)

Publication Number Publication Date
ATE527690T1 true ATE527690T1 (de) 2011-10-15

Family

ID=35968267

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05789226T ATE527690T1 (de) 2004-08-23 2005-08-23 Werkzeuglade- und pufferungssystem auf liftbasis

Country Status (7)

Country Link
US (3) US7806643B2 (de)
EP (1) EP1803151B1 (de)
JP (1) JP2008511178A (de)
KR (1) KR20070054683A (de)
CN (1) CN101048861B (de)
AT (1) ATE527690T1 (de)
WO (1) WO2006023873A2 (de)

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Also Published As

Publication number Publication date
EP1803151B1 (de) 2011-10-05
US9368382B2 (en) 2016-06-14
WO2006023873A2 (en) 2006-03-02
KR20070054683A (ko) 2007-05-29
US20110142575A1 (en) 2011-06-16
EP1803151A2 (de) 2007-07-04
JP2008511178A (ja) 2008-04-10
EP1803151A4 (de) 2010-05-26
US20060099054A1 (en) 2006-05-11
WO2006023873A9 (en) 2006-06-22
WO2006023873A3 (en) 2007-02-01
CN101048861A (zh) 2007-10-03
US8678734B2 (en) 2014-03-25
US20140341679A1 (en) 2014-11-20
US7806643B2 (en) 2010-10-05
CN101048861B (zh) 2010-05-26

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