ATE530918T1 - Mems-beschleunigungsmesser mit flusskonzentrator zwischen parallelen magneten - Google Patents

Mems-beschleunigungsmesser mit flusskonzentrator zwischen parallelen magneten

Info

Publication number
ATE530918T1
ATE530918T1 AT09180226T AT09180226T ATE530918T1 AT E530918 T1 ATE530918 T1 AT E530918T1 AT 09180226 T AT09180226 T AT 09180226T AT 09180226 T AT09180226 T AT 09180226T AT E530918 T1 ATE530918 T1 AT E530918T1
Authority
AT
Austria
Prior art keywords
proof mass
mems accelerometer
flux concentrator
accelerometer
coil
Prior art date
Application number
AT09180226T
Other languages
English (en)
Inventor
Paul W Dwyer
Steve Becka
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Application granted granted Critical
Publication of ATE530918T1 publication Critical patent/ATE530918T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
AT09180226T 2009-01-07 2009-12-21 Mems-beschleunigungsmesser mit flusskonzentrator zwischen parallelen magneten ATE530918T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/349,681 US9016126B2 (en) 2009-01-07 2009-01-07 MEMS accelerometer having a flux concentrator between parallel magnets

Publications (1)

Publication Number Publication Date
ATE530918T1 true ATE530918T1 (de) 2011-11-15

Family

ID=41820324

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09180226T ATE530918T1 (de) 2009-01-07 2009-12-21 Mems-beschleunigungsmesser mit flusskonzentrator zwischen parallelen magneten

Country Status (4)

Country Link
US (1) US9016126B2 (de)
EP (1) EP2207040B1 (de)
JP (2) JP5643505B2 (de)
AT (1) ATE530918T1 (de)

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US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
US9709509B1 (en) * 2009-11-13 2017-07-18 MCube Inc. System configured for integrated communication, MEMS, Processor, and applications using a foundry compatible semiconductor process
DE102011057169A1 (de) * 2011-12-29 2013-07-04 Maxim Integrated Products, Inc. Mikroelektromechanisches System
US9254992B2 (en) * 2012-07-27 2016-02-09 Tao Ju Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism
US20140026658A1 (en) * 2012-07-27 2014-01-30 Biao Zhang Mems device and a method of using the same
US20140290365A1 (en) * 2013-04-02 2014-10-02 Tao Ju Mems device
CN103244599B (zh) * 2013-04-16 2015-01-21 北京航空航天大学 一种采用sma的元件级mems器件主动隔振器
TWI612309B (zh) * 2016-04-27 2018-01-21 國立交通大學 集積型多元感測元件
TWI625527B (zh) * 2016-04-27 2018-06-01 國立交通大學 集積型多元感測器模組
CN107857231B (zh) * 2017-10-24 2019-06-11 华中科技大学 一种微机电加速度计及其制备方法
US10859593B2 (en) 2018-08-31 2020-12-08 Honeywell International Inc. Reducing thermal expansion induced errors in a magnetic circuit assembly
US11521772B2 (en) 2020-02-11 2022-12-06 Honeywell International Inc. Multilayer magnetic circuit assembly
US11169175B2 (en) * 2020-02-11 2021-11-09 Honeywell International Inc. Multilayer excitation ring
JP7622971B2 (ja) * 2020-06-17 2025-01-28 特許機器株式会社 サーボ型振動検出器及び振動制御装置
US11275098B2 (en) 2020-07-14 2022-03-15 Honeywell International Inc. Accelerometer including rectangular coil and rectangular pole piece
US20240410914A1 (en) * 2023-06-09 2024-12-12 Honeywell International Inc. Translational mass accelerometer

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Also Published As

Publication number Publication date
JP2010160149A (ja) 2010-07-22
EP2207040A1 (de) 2010-07-14
JP2015042990A (ja) 2015-03-05
JP5913522B2 (ja) 2016-04-27
JP5643505B2 (ja) 2014-12-17
EP2207040B1 (de) 2011-10-26
US20100170341A1 (en) 2010-07-08
US9016126B2 (en) 2015-04-28

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