ATE532035T1 - Steuerkomponente für einen planaren resonator - Google Patents
Steuerkomponente für einen planaren resonatorInfo
- Publication number
- ATE532035T1 ATE532035T1 AT09170018T AT09170018T ATE532035T1 AT E532035 T1 ATE532035 T1 AT E532035T1 AT 09170018 T AT09170018 T AT 09170018T AT 09170018 T AT09170018 T AT 09170018T AT E532035 T1 ATE532035 T1 AT E532035T1
- Authority
- AT
- Austria
- Prior art keywords
- electrode group
- radial electrode
- control component
- oscillation
- planar resonator
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Networks Using Active Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/284,421 US8011246B2 (en) | 2008-09-22 | 2008-09-22 | Apparatus and method for self-calibration of coriolis vibratory gyroscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE532035T1 true ATE532035T1 (de) | 2011-11-15 |
Family
ID=41395772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT09170018T ATE532035T1 (de) | 2008-09-22 | 2009-09-11 | Steuerkomponente für einen planaren resonator |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8011246B2 (de) |
| EP (1) | EP2166308B1 (de) |
| JP (1) | JP5363914B2 (de) |
| AT (1) | ATE532035T1 (de) |
| IL (1) | IL199510A (de) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7874209B2 (en) * | 2008-01-08 | 2011-01-25 | Northrop Grumman Guidance And Electronics Company, Inc. | Capacitive bulk acoustic wave disk gyroscopes with self-calibration |
| DE102008040529B4 (de) * | 2008-07-18 | 2021-05-06 | Robert Bosch Gmbh | Fehlerkorrekturverfahren und Fehlerkorrekturvorrichtung für einen Beschleunigungssensor |
| US9970764B2 (en) * | 2009-08-31 | 2018-05-15 | Georgia Tech Research Corporation | Bulk acoustic wave gyroscope with spoked structure |
| GB201015585D0 (en) * | 2010-09-17 | 2010-10-27 | Atlantic Inertial Systems Ltd | Sensor |
| US9705450B2 (en) | 2011-06-24 | 2017-07-11 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and methods for time domain measurement of oscillation perturbations |
| ITTO20110979A1 (it) * | 2011-10-27 | 2013-04-28 | St Microelectronics Srl | Circuito di pilotaggio per un giroscopio microelettromeccanico e relativo giroscopio microelettromeccanico |
| US8763441B2 (en) | 2011-11-22 | 2014-07-01 | Georgia Tech Research Corporation | Method and apparatus for self-calibration of gyroscopes |
| US9212908B2 (en) | 2012-04-26 | 2015-12-15 | Analog Devices, Inc. | MEMS gyroscopes with reduced errors |
| US9157739B1 (en) * | 2012-08-07 | 2015-10-13 | Innalabs Limited | Force-rebalance coriolis vibratory gyroscope |
| US10180323B2 (en) * | 2014-06-09 | 2019-01-15 | The Regents Of The University Of California | Axi-symmetric small-footprint gyroscope with interchangeable whole-angle and rate operation |
| AU2015287598B2 (en) * | 2014-07-10 | 2018-12-06 | Mohamed R. Mahfouz | Bone reconstruction and orthopedic implants |
| US9671247B2 (en) * | 2014-07-16 | 2017-06-06 | Innalabs Limited | Method for calibrating vibratory gyroscope |
| US9482553B2 (en) * | 2014-09-30 | 2016-11-01 | The Charles Stark Draper Laboratory, Inc. | Calibration systems and methods for gyroscopes |
| US10746548B2 (en) * | 2014-11-04 | 2020-08-18 | Analog Devices, Inc. | Ring gyroscope structural features |
| US9534897B2 (en) * | 2015-01-12 | 2017-01-03 | The Boeing Company | High bandwidth Coriolis vibratory gyroscope (CVG) with in-situ bias self-calibration |
| US9709399B2 (en) * | 2015-01-12 | 2017-07-18 | The Boeing Company | Approach for control redistribution of coriolis vibratory gyroscope (CVG) for performance improvement |
| US9810535B2 (en) * | 2015-02-10 | 2017-11-07 | Northrop Grumman Systems Corporation | Vibrating-mass gyroscope systems and method |
| US9869552B2 (en) * | 2015-03-20 | 2018-01-16 | Analog Devices, Inc. | Gyroscope that compensates for fluctuations in sensitivity |
| US10502568B2 (en) | 2015-04-29 | 2019-12-10 | General Electric Company | Inertial sensing systems and methods of manufacturing the same |
| US10794700B1 (en) * | 2015-10-30 | 2020-10-06 | Garmin International, Inc. | Stress isolation of resonating gyroscopes |
| US10352960B1 (en) * | 2015-10-30 | 2019-07-16 | Garmin International, Inc. | Free mass MEMS accelerometer |
| US10655964B2 (en) * | 2017-08-08 | 2020-05-19 | Hrl Laboratories, Llc | High quality factor MEMS silicon flower-of-life vibratory gyroscope |
| WO2019032179A1 (en) * | 2017-08-11 | 2019-02-14 | Hrl Laboratories, Llc | SILICON MULTI-MODE CORIOLIS VIBRATORY GYROSCOPES HAVING A HIGH-RODING SYMMETRIC MECHANICAL STRUCTURE AND 32 ELECTRODES |
| US11656077B2 (en) * | 2019-01-31 | 2023-05-23 | Analog Devices, Inc. | Pseudo-extensional mode MEMS ring gyroscope |
| US11703331B2 (en) | 2020-03-18 | 2023-07-18 | The Regents Of The University Of Michigan | Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices |
| JP7404124B2 (ja) * | 2020-03-24 | 2023-12-25 | 住友精密工業株式会社 | 方位角姿勢角計測装置 |
| US11841243B1 (en) | 2022-02-09 | 2023-12-12 | Hrl Laboratories, Llc | Frequency multiplexed operation of vibratory gyroscopes for continuous self-calibration |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06242135A (ja) * | 1993-02-12 | 1994-09-02 | Aisin Seiki Co Ltd | 角速度センサの駆動回路 |
| JPH0914969A (ja) * | 1995-06-30 | 1997-01-17 | Aisin Seiki Co Ltd | 振動子駆動装置 |
| JPH09250930A (ja) * | 1996-03-15 | 1997-09-22 | Aisin Seiki Co Ltd | 角速度検出装置 |
| JP4498491B2 (ja) * | 1998-05-25 | 2010-07-07 | シチズンホールディングス株式会社 | 角速度検出素子 |
| GB2377494B (en) * | 2001-07-09 | 2004-07-28 | Autoliv Dev | "Improvements in or relating to an off-set elimination system for a vibrating gyroscope" |
| EP1529195B1 (de) * | 2002-08-12 | 2017-10-04 | The Boeing Company | Planares gyroskop mit interner radialer detektion und internem radialem antrieb |
| US7040163B2 (en) * | 2002-08-12 | 2006-05-09 | The Boeing Company | Isolated planar gyroscope with internal radial sensing and actuation |
| JP2005127841A (ja) * | 2003-10-23 | 2005-05-19 | Japan Aviation Electronics Industry Ltd | リング型振動式角速度センサ |
| US7886598B2 (en) * | 2005-08-08 | 2011-02-15 | Northrop Grumman Guidance And Electronics Company, Inc. | Vibratory gyro bias error cancellation using mode reversal |
| US7392702B2 (en) * | 2005-08-08 | 2008-07-01 | Litton Systems Inc. | Method for modifying the location of nodal points of a vibrating beam |
| US7426860B2 (en) * | 2005-08-08 | 2008-09-23 | Litton Systems Inc. | Ring resonator gyro with folded cylinder suspension |
| US7565839B2 (en) * | 2005-08-08 | 2009-07-28 | Northrop Grumman Guidance And Electronics Company, Inc. | Bias and quadrature reduction in class II coriolis vibratory gyros |
| US7103477B1 (en) * | 2005-08-08 | 2006-09-05 | Northrop Grumman Corporation | Self-calibration for an inertial instrument based on real time bias estimator |
| WO2008054404A2 (en) * | 2005-11-15 | 2008-05-08 | California Institute Of Technology | Resonant vibratory device having high quality factor and methods of fabricating same |
| US7739896B2 (en) * | 2007-03-15 | 2010-06-22 | Northrop Grumman Guidance And Electronics Company, Inc. | Self-calibration of scale factor for dual resonator class II coriolis vibratory gyros |
| FR2920224B1 (fr) * | 2007-08-23 | 2009-10-02 | Sagem Defense Securite | Procede de determination d'une vitesse de rotation d'un capteur vibrant axisymetrique, et dispositif inertiel mettant en oeuvre le procede |
| US7874209B2 (en) * | 2008-01-08 | 2011-01-25 | Northrop Grumman Guidance And Electronics Company, Inc. | Capacitive bulk acoustic wave disk gyroscopes with self-calibration |
-
2008
- 2008-09-22 US US12/284,421 patent/US8011246B2/en active Active
-
2009
- 2009-06-23 IL IL199510A patent/IL199510A/en active IP Right Grant
- 2009-08-20 JP JP2009190709A patent/JP5363914B2/ja active Active
- 2009-09-11 EP EP09170018A patent/EP2166308B1/de active Active
- 2009-09-11 AT AT09170018T patent/ATE532035T1/de active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2166308B1 (de) | 2011-11-02 |
| IL199510A0 (en) | 2010-04-29 |
| US20100071465A1 (en) | 2010-03-25 |
| JP5363914B2 (ja) | 2013-12-11 |
| EP2166308A1 (de) | 2010-03-24 |
| JP2010071985A (ja) | 2010-04-02 |
| IL199510A (en) | 2013-03-24 |
| US8011246B2 (en) | 2011-09-06 |
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