ATE532099T1 - Verfahren und vorrichtung zur übertragung eines musters von einem stempel auf ein substrat - Google Patents

Verfahren und vorrichtung zur übertragung eines musters von einem stempel auf ein substrat

Info

Publication number
ATE532099T1
ATE532099T1 AT03727761T AT03727761T ATE532099T1 AT E532099 T1 ATE532099 T1 AT E532099T1 AT 03727761 T AT03727761 T AT 03727761T AT 03727761 T AT03727761 T AT 03727761T AT E532099 T1 ATE532099 T1 AT E532099T1
Authority
AT
Austria
Prior art keywords
pattern
receiving surface
stamp
transferring
substrate
Prior art date
Application number
AT03727761T
Other languages
English (en)
Inventor
Marinus DONA
Martin Blees
Michel Decre
Eerd Patrick Van
Richard Schroerders
Teunis Heijmans
Chris Janssen
Peter Slikkerveer
Bas Rens
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE532099T1 publication Critical patent/ATE532099T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C17/00—Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces
    • B05C17/06—Stencils
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/02—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles
    • B05C1/027—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/32—Processes for applying liquids or other fluent materials using means for protecting parts of a surface not to be coated, e.g. using stencils, resists
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Printing Methods (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Decoration By Transfer Pictures (AREA)
  • Manufacturing Optical Record Carriers (AREA)
AT03727761T 2002-05-27 2003-05-26 Verfahren und vorrichtung zur übertragung eines musters von einem stempel auf ein substrat ATE532099T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP02077079 2002-05-27
EP02077087 2002-05-27
PCT/IB2003/002003 WO2003099463A2 (en) 2002-05-27 2003-05-26 Method and device for transferring a pattern from a stamp to a substrate

Publications (1)

Publication Number Publication Date
ATE532099T1 true ATE532099T1 (de) 2011-11-15

Family

ID=29585707

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03727761T ATE532099T1 (de) 2002-05-27 2003-05-26 Verfahren und vorrichtung zur übertragung eines musters von einem stempel auf ein substrat

Country Status (8)

Country Link
US (1) US7296519B2 (de)
EP (1) EP1511632B1 (de)
JP (1) JP4639081B2 (de)
KR (1) KR100981692B1 (de)
CN (1) CN100358728C (de)
AT (1) ATE532099T1 (de)
AU (1) AU2003232962A1 (de)
WO (1) WO2003099463A2 (de)

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DE10330456B9 (de) * 2003-07-05 2007-11-08 Erich Thallner Vorrichtung zum Erstellen einer Oberflächenstruktur auf einem Wafer
US7632087B2 (en) * 2003-12-19 2009-12-15 Wd Media, Inc. Composite stamper for imprint lithography
US6981445B2 (en) * 2003-12-24 2006-01-03 Axela Biosensors Inc. Method and apparatus for micro-contact printing
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US20070164476A1 (en) * 2004-09-01 2007-07-19 Wei Wu Contact lithography apparatus and method employing substrate deformation
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JP6545401B2 (ja) 2016-04-06 2019-07-17 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． インプリントリソグラフィースタンプの作製方法及び使用方法
HUE046952T2 (hu) 2016-07-14 2020-04-28 Morphotonics Holding Bv Berendezés különálló hordozórétegek rugalmas bélyegzõvel történõ nyomásához
RU2741506C2 (ru) * 2016-07-27 2021-01-26 Конинклейке Филипс Н.В. Способ получения штампа на основе полиорганосилоксанов, штамп на основе полиорганосилоксанов, применение его для процесса печати и способ впечатывания с его использованием
CN107215111B (zh) * 2017-06-14 2023-03-28 浙江大学 一种磁控转印印章及磁控转移印刷方法
EP3881134B1 (de) 2018-11-14 2022-07-20 Koninklijke Philips N.V. Pneumatisches system, prägegerät und deren anwendung
CN121123094A (zh) * 2019-05-22 2025-12-12 维耶尔公司 用于将器件或图案转移到基板的系统和方法
CN111430272B (zh) * 2020-03-09 2023-02-03 广东工业大学 单类和多类微小物体悬浮定向移动及自主装巨量转移方法
KR20240035568A (ko) 2021-07-21 2024-03-15 코닌클리케 필립스 엔.브이. 임프린팅 장치
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Also Published As

Publication number Publication date
AU2003232962A8 (en) 2003-12-12
CN100358728C (zh) 2008-01-02
KR20050016441A (ko) 2005-02-21
WO2003099463A3 (en) 2004-09-16
AU2003232962A1 (en) 2003-12-12
US7296519B2 (en) 2007-11-20
EP1511632A2 (de) 2005-03-09
EP1511632B1 (de) 2011-11-02
JP2005527406A (ja) 2005-09-15
WO2003099463A2 (en) 2003-12-04
KR100981692B1 (ko) 2010-09-13
CN1665684A (zh) 2005-09-07
US20050173049A1 (en) 2005-08-11
JP4639081B2 (ja) 2011-02-23

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