ATE533228T1 - Mems-resonator zum filtern und mischen - Google Patents

Mems-resonator zum filtern und mischen

Info

Publication number
ATE533228T1
ATE533228T1 AT09766291T AT09766291T ATE533228T1 AT E533228 T1 ATE533228 T1 AT E533228T1 AT 09766291 T AT09766291 T AT 09766291T AT 09766291 T AT09766291 T AT 09766291T AT E533228 T1 ATE533228 T1 AT E533228T1
Authority
AT
Austria
Prior art keywords
detection electrode
resonator
voltage signal
electrode
actuation
Prior art date
Application number
AT09766291T
Other languages
English (en)
Inventor
Peter Steeneken
Beek Jozef Van
Klaus Reimann
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE533228T1 publication Critical patent/ATE533228T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03D—DEMODULATION OR TRANSFERENCE OF MODULATION FROM ONE CARRIER TO ANOTHER
    • H03D7/00—Transference of modulation from one carrier to another, e.g. frequency-changing
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H9/02275—Comb electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2452—Free-free beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H2009/2442—Square resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT09766291T 2008-06-18 2009-06-18 Mems-resonator zum filtern und mischen ATE533228T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08104460 2008-06-18
PCT/IB2009/052614 WO2009153754A2 (en) 2008-06-18 2009-06-18 Mems resonator for filtering and mixing

Publications (1)

Publication Number Publication Date
ATE533228T1 true ATE533228T1 (de) 2011-11-15

Family

ID=41434508

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09766291T ATE533228T1 (de) 2008-06-18 2009-06-18 Mems-resonator zum filtern und mischen

Country Status (5)

Country Link
US (1) US8493157B2 (de)
EP (1) EP2291910B1 (de)
CN (1) CN102067442B (de)
AT (1) ATE533228T1 (de)
WO (1) WO2009153754A2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2957412B1 (fr) * 2010-03-11 2012-08-17 Commissariat Energie Atomique Procede et dispositif de suppression d'hysteresis de resonateurs par resonances simultanees
DE102010035248A1 (de) * 2010-08-24 2012-03-01 Siemens Aktiengesellschaft Kapazitiver MEMS-HF-Demodulator für Ultra-Low-Power-Einsatz
EP2515436A1 (de) * 2011-04-18 2012-10-24 Nxp B.V. MEMS Resonator und Steuerungsverfahren dafür
FR2985251B1 (fr) 2012-01-04 2016-09-30 Agilent Technologies Inc Systeme pour detecter des reponses d'un dispositif resonateur micro-electromecanique ( mems)
US8909188B2 (en) * 2012-10-31 2014-12-09 Cambridge Silicon Radio, Ltd. Mixer
US9252731B2 (en) * 2013-01-14 2016-02-02 California Institute Of Technology Passive phase noise cancellation element
EP2830213A1 (de) * 2013-07-23 2015-01-28 Alcatel Lucent Vorrichtung, Verfahren und Computerprogramm zur Erzeugung eines oszillierenden Signals
US10352974B2 (en) * 2016-06-22 2019-07-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method and apparatus to implement frequency stabilization of a resonator
TR201614871A2 (tr) * 2016-10-20 2019-01-21 Haluk Kuelah Elektrostati̇k mems rezonatörlerde kali̇te faktörünü yükselten ve kaçak akimini düşüren i̇ki̇nci̇ harmoni̇k okumaya dayali bi̇r karakteri̇zasyon/sürüş yöntemi̇
US10749472B2 (en) * 2017-02-11 2020-08-18 Mumec, Inc. Frequency-converting super-regenerative transceiver
US10771040B2 (en) * 2017-07-12 2020-09-08 Nutech Ventures Systems and methods for reducing the actuation voltage for electrostatic MEMS devices
WO2019020185A1 (en) 2017-07-27 2019-01-31 Vacon Oy ADAPTATION OF ENGINE DRIVING
US11029512B2 (en) * 2018-06-27 2021-06-08 Microsoft Technology Licensing, Llc Adjusting a resonant frequency of a scanning mirror
US11185886B2 (en) 2018-11-30 2021-11-30 Vanguard Iniernational Semiconductor Singapore Pte. Ltd. Microelectromechanical systems, devices, and methods for fabricating a microelectromechanical systems device, and methods for generating a plurality of frequencies
CN114172487B (zh) * 2021-11-05 2022-07-26 华南理工大学 一种mems谐振器及其制备方法
CN114200223A (zh) * 2021-12-07 2022-03-18 浙江大学 一种基于1：3频率比非线性静电耦合的mems谐振式静电计
CN115603698B (zh) * 2022-11-28 2023-05-05 电子科技大学 一种基于弹性软化效应的可调谐薄膜体声波谐振器

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
DE2001433C3 (de) * 1970-01-07 1983-06-01 Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka Bandpaßfilter
US4553060A (en) * 1983-11-21 1985-11-12 Rockwell International Corporation Electromechanical resonator apparatus
US5165289A (en) * 1990-07-10 1992-11-24 Johnson Service Company Resonant mechanical sensor
JP2665106B2 (ja) * 1992-03-17 1997-10-22 日本碍子株式会社 圧電／電歪膜型素子
US5504388A (en) * 1993-03-12 1996-04-02 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having electrode film(s) with specified surface roughness
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
JPH1093352A (ja) * 1996-09-19 1998-04-10 Matsushita Electric Ind Co Ltd マイクロ波ミキサー回路とダウンコンバータ
US6566786B2 (en) 1999-01-14 2003-05-20 The Regents Of The University Of Michigan Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
EP1285491A2 (de) 2000-04-20 2003-02-26 The Regents Of The University Of Michigan Verfahren und vorrichtung zur erzeugung eines signals mit wenigstens einer gewünschten ausgangsfrequenz mit einer bank von mikromechanischen vibrierenden vorrichtungen
US6763340B1 (en) 2000-09-22 2004-07-13 The United States Of America As Represented By The Secretary Of The Air Force Microelectromechanical system artificial neural network device
US6819103B2 (en) * 2001-04-26 2004-11-16 The Johns Hopkins University Lorentz force driven mechanical filter/mixer designs for RF applications
FR2824205B1 (fr) * 2001-04-27 2004-11-05 Thomson Csf Procede de multiplication de frequence dans un equipement de radiocommunication
AU2003263841A1 (en) * 2002-08-01 2004-02-23 Georgia Tech Research Corporation Piezo electric on seminconductor on- insulator resonator
DE10250632A1 (de) * 2002-10-30 2004-05-19 Infineon Technologies Ag Verfahren und Schaltungsanordnung zum Mischen eines Digitalsignals mit einem Analogsignal
US7211926B2 (en) * 2005-03-09 2007-05-01 The Regents Of The University Of California Temperature compensated oscillator including MEMS resonator for frequency control

Also Published As

Publication number Publication date
EP2291910A2 (de) 2011-03-09
US20110102095A1 (en) 2011-05-05
CN102067442B (zh) 2014-07-23
US8493157B2 (en) 2013-07-23
WO2009153754A3 (en) 2010-05-27
WO2009153754A2 (en) 2009-12-23
CN102067442A (zh) 2011-05-18
WO2009153754A9 (en) 2010-09-23
EP2291910B1 (de) 2011-11-09

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