ATE540473T1 - Elektromechanischer wandler und verfahren zum bereitstellen eines elektromechanischen wandlers - Google Patents

Elektromechanischer wandler und verfahren zum bereitstellen eines elektromechanischen wandlers

Info

Publication number
ATE540473T1
ATE540473T1 AT09786728T AT09786728T ATE540473T1 AT E540473 T1 ATE540473 T1 AT E540473T1 AT 09786728 T AT09786728 T AT 09786728T AT 09786728 T AT09786728 T AT 09786728T AT E540473 T1 ATE540473 T1 AT E540473T1
Authority
AT
Austria
Prior art keywords
electromechanical converter
providing
cantilever beam
electromechanical transducer
motion
Prior art date
Application number
AT09786728T
Other languages
English (en)
Inventor
Martijn Goossens
Beek Jozef Van
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE540473T1 publication Critical patent/ATE540473T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H9/02275—Comb electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2457—Clamped-free beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
AT09786728T 2008-08-08 2009-07-28 Elektromechanischer wandler und verfahren zum bereitstellen eines elektromechanischen wandlers ATE540473T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08104998 2008-08-08
PCT/IB2009/053271 WO2010015963A1 (en) 2008-08-08 2009-07-28 An electromechanical transducer and a method of providing an electromechanical transducer

Publications (1)

Publication Number Publication Date
ATE540473T1 true ATE540473T1 (de) 2012-01-15

Family

ID=41258282

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09786728T ATE540473T1 (de) 2008-08-08 2009-07-28 Elektromechanischer wandler und verfahren zum bereitstellen eines elektromechanischen wandlers

Country Status (5)

Country Link
US (1) US8686714B2 (de)
EP (1) EP2313973B1 (de)
CN (1) CN102113213B (de)
AT (1) ATE540473T1 (de)
WO (1) WO2010015963A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010044058A1 (en) 2008-10-14 2010-04-22 Nxp B.V. Frame-shaped mems piezoresistive resonator
FR2964652B1 (fr) * 2010-09-13 2015-05-15 Commissariat Energie Atomique Dispositif resonant, a detection piezoresistive et a resonateur relie de facon elastique au support du dispositif, et procede de fabrication de celui-ci
FR2964651B1 (fr) 2010-09-13 2015-05-15 Commissariat Energie Atomique Dispositif a poutre suspendue et moyens de detection piezoresistive du deplacement de celle-ci, et procede de fabrication du dispositif
FI123933B (fi) * 2011-05-13 2013-12-31 Teknologian Tutkimuskeskus Vtt Mikromekaaninen laite ja menetelmä sen suunnittelemiseksi
US8748205B1 (en) * 2012-11-30 2014-06-10 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS structure with adaptable inter-substrate bond
US20160062517A1 (en) * 2014-09-02 2016-03-03 Apple Inc. Multi-Layer Transparent Force Sensor
CN104507028A (zh) * 2014-12-29 2015-04-08 汉得利（常州）电子股份有限公司 杠杆式压电扬声器
US9863822B2 (en) 2015-01-07 2018-01-09 Apple Inc. Deformation compensating compliant material
US10006828B2 (en) 2015-06-24 2018-06-26 Apple Inc. Systems and methods for measuring resistive sensors
US10318089B2 (en) 2015-06-24 2019-06-11 Apple Inc. Common mode control for a resistive force sensor
CN109283403B (zh) * 2018-11-13 2020-12-01 东南大学 基于多层悬臂梁的薄膜材料横向压电系数测试方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5386720A (en) * 1992-01-09 1995-02-07 Olympus Optical Co., Ltd. Integrated AFM sensor
US7168301B2 (en) * 2002-07-02 2007-01-30 Veeco Instruments Inc. Method and apparatus of driving torsional resonance mode of a probe-based instrument
CN101095282B (zh) * 2002-12-10 2011-09-28 Nxp股份有限公司 机电传感器和电子装置
FI20030945A7 (fi) 2003-06-25 2004-12-26 Perlos Oyj Sähkömekaaninen muuttaja ja valmistusmenetelmä
CN1849746B (zh) 2003-09-10 2011-01-12 Nxp股份有限公司 机电换能器和电设备
JP2009510878A (ja) 2005-09-30 2009-03-12 エヌエックスピー ビー ヴィ ピエゾ抵抗共振器に基づく発振器

Also Published As

Publication number Publication date
CN102113213A (zh) 2011-06-29
US20110187347A1 (en) 2011-08-04
EP2313973B1 (de) 2012-01-04
US8686714B2 (en) 2014-04-01
CN102113213B (zh) 2014-01-22
WO2010015963A1 (en) 2010-02-11
EP2313973A1 (de) 2011-04-27

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