ATE544960T1 - Gaslagerspindel - Google Patents

Gaslagerspindel

Info

Publication number
ATE544960T1
ATE544960T1 AT10161394T AT10161394T ATE544960T1 AT E544960 T1 ATE544960 T1 AT E544960T1 AT 10161394 T AT10161394 T AT 10161394T AT 10161394 T AT10161394 T AT 10161394T AT E544960 T1 ATE544960 T1 AT E544960T1
Authority
AT
Austria
Prior art keywords
sleeve
retaining ring
bearing portion
circumferential surface
hole
Prior art date
Application number
AT10161394T
Other languages
English (en)
Inventor
Junichi Hirata
Original Assignee
Ntn Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ntn Toyo Bearing Co Ltd filed Critical Ntn Toyo Bearing Co Ltd
Application granted granted Critical
Publication of ATE544960T1 publication Critical patent/ATE544960T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0685—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for radial load only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/42—Pumps with cylinders or pistons

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Support Of The Bearing (AREA)
  • Mounting Of Bearings Or Others (AREA)
  • Sliding-Contact Bearings (AREA)
AT10161394T 2009-05-07 2010-04-29 Gaslagerspindel ATE544960T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009112610A JP5408613B2 (ja) 2009-05-07 2009-05-07 気体軸受スピンドル

Publications (1)

Publication Number Publication Date
ATE544960T1 true ATE544960T1 (de) 2012-02-15

Family

ID=42315728

Family Applications (1)

Application Number Title Priority Date Filing Date
AT10161394T ATE544960T1 (de) 2009-05-07 2010-04-29 Gaslagerspindel

Country Status (4)

Country Link
US (1) US8162544B2 (de)
EP (1) EP2249051B1 (de)
JP (1) JP5408613B2 (de)
AT (1) ATE544960T1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110299806A1 (en) * 2010-06-08 2011-12-08 Leonid Kashchenevsky Spindle, shaft supporting device and method of supporting a rotatable shaft
JP5387765B2 (ja) * 2010-11-29 2014-01-15 日本精工株式会社 エアモータ及び静電塗装装置
EP2774686B1 (de) * 2011-11-04 2019-05-08 NSK Ltd. Spindelvorrichtung und elektrostatische beschichtungsvorrichtung
KR101165749B1 (ko) 2011-12-06 2012-07-18 한국기계연구원 복렬 구조 가스베어링
CN103047341B (zh) * 2012-12-19 2014-06-11 哈尔滨工业大学 气浮球轴承角度解耦与磁悬浮平面驱动定位的隔振器
CN103047346B (zh) * 2012-12-19 2014-06-11 哈尔滨工业大学 滚动关节轴承角度解耦的磁浮零刚度隔振器与隔振系统
CN103062283B (zh) * 2012-12-19 2014-10-29 哈尔滨工业大学 气浮球轴承角度解耦的零刚度隔振器与隔振系统
US9181978B2 (en) 2013-04-10 2015-11-10 Seagate Technology Llc Grooved thrust bearing
US9422978B2 (en) * 2013-06-22 2016-08-23 Kla-Tencor Corporation Gas bearing assembly for an EUV light source
DE102013108956B3 (de) * 2013-08-20 2014-11-27 Schenck Rotec Gmbh Aerostatisches Lager für einen Rotor, insbesondere in einer Auswuchtmaschine
US8973848B2 (en) * 2014-09-08 2015-03-10 Efc Systems, Inc. Composite air bearing assembly
JP2016223553A (ja) * 2015-06-01 2016-12-28 Ntn株式会社 スピンドル
JP6276810B2 (ja) 2016-08-04 2018-02-07 Ntn株式会社 エアタービン駆動スピンドル
JP6804231B2 (ja) * 2016-08-04 2020-12-23 Ntn株式会社 エアタービン駆動スピンドル
USD817753S1 (en) 2017-03-09 2018-05-15 Woodward, Inc. Spring array
WO2019013368A1 (ko) * 2017-07-12 2019-01-17 주식회사 알피에스 에어 베어링의 강성조절장치
CN107559304A (zh) * 2017-09-15 2018-01-09 广东工业大学 一种复合式气浮轴承
US9970481B1 (en) * 2017-09-29 2018-05-15 Efc Systems, Inc. Rotary coating atomizer having vibration damping air bearings
JP7035594B2 (ja) * 2018-02-15 2022-03-15 日本精工株式会社 スピンドル装置
JP2019138438A (ja) * 2018-02-15 2019-08-22 日本精工株式会社 スピンドル装置
CN108895086B (zh) * 2018-09-20 2019-10-01 燕山大学 一种带有金属橡胶环的空气静压轴承
JP2020082245A (ja) * 2018-11-20 2020-06-04 ファナック株式会社 直動機構、バランサ装置および工作機械
US11898921B2 (en) 2022-05-17 2024-02-13 Honeywell Federal Manufacturing & Technologies, Llc Air bearing apparatus for calibrating force measurement devices

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB884915A (en) 1959-09-21 1961-12-20 Lucas Industries Ltd Gas lubricated bearings
JPS5644903Y2 (de) * 1976-07-05 1981-10-21
EP0272720B1 (de) * 1986-11-24 1990-07-25 Koninklijke Philips Electronics N.V. Wellenlagerung mit hydrostatischen Lagern
JP3287122B2 (ja) * 1994-07-29 2002-05-27 日本精工株式会社 静圧気体軸受
JP2002295470A (ja) 2001-03-29 2002-10-09 Ntn Corp 気体軸受スピンドル
JP4146151B2 (ja) * 2002-04-11 2008-09-03 Ｎｔｎ株式会社 静圧気体軸受及びこれを用いたスピンドル装置
US7201379B2 (en) * 2002-11-04 2007-04-10 Dresser-Rand Company Seal assembly, cartridge, and method
JP2007170534A (ja) * 2005-12-21 2007-07-05 Ntn Corp 気体軸受スピンドル
JP2008082356A (ja) * 2006-09-26 2008-04-10 Oiles Ind Co Ltd 静圧気体軸受

Also Published As

Publication number Publication date
US8162544B2 (en) 2012-04-24
JP5408613B2 (ja) 2014-02-05
EP2249051A1 (de) 2010-11-10
US20100284638A1 (en) 2010-11-11
EP2249051B1 (de) 2012-02-08
JP2010261505A (ja) 2010-11-18

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