ATE552488T1 - Gmr-biosensor mit erhöhter empfindlichkeit - Google Patents
Gmr-biosensor mit erhöhter empfindlichkeitInfo
- Publication number
- ATE552488T1 ATE552488T1 AT07392003T AT07392003T ATE552488T1 AT E552488 T1 ATE552488 T1 AT E552488T1 AT 07392003 T AT07392003 T AT 07392003T AT 07392003 T AT07392003 T AT 07392003T AT E552488 T1 ATE552488 T1 AT E552488T1
- Authority
- AT
- Austria
- Prior art keywords
- layer
- pinned
- layers
- free
- magnetic
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0052—Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/74—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids
- G01N27/745—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids for detecting magnetic beads used in biochemical assays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
- G01R33/05—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle in thin-film element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/01—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials specially adapted for biological cells, e.g. blood cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49982—Coating
- Y10T29/49986—Subsequent to metal working
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Nanotechnology (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
- Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Steroid Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/497,162 US8133439B2 (en) | 2006-08-01 | 2006-08-01 | GMR biosensor with enhanced sensitivity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE552488T1 true ATE552488T1 (de) | 2012-04-15 |
Family
ID=38566973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT07392003T ATE552488T1 (de) | 2006-08-01 | 2007-07-30 | Gmr-biosensor mit erhöhter empfindlichkeit |
Country Status (4)
| Country | Link |
|---|---|
| US (4) | US8133439B2 (de) |
| EP (3) | EP1884763B1 (de) |
| JP (3) | JP5654193B2 (de) |
| AT (1) | ATE552488T1 (de) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4810275B2 (ja) * | 2006-03-30 | 2011-11-09 | アルプス電気株式会社 | 磁気スイッチ |
| DE102006016334B4 (de) * | 2006-04-06 | 2018-11-15 | Boehringer Ingelheim Vetmedica Gmbh | Verfahren und Vorrichtung zur Detektion magnetisierbarer Partikel |
| WO2008044162A2 (en) * | 2006-10-09 | 2008-04-17 | Koninklijke Philips Electronics N.V. | Magnetic sensor device with pairs of detection units |
| JP2009162499A (ja) * | 2007-12-28 | 2009-07-23 | Alps Electric Co Ltd | 磁気センサ |
| US8053244B2 (en) * | 2008-08-13 | 2011-11-08 | Seagate Technology Llc | Magnetic oscillator based biosensor |
| US8174260B2 (en) * | 2008-08-26 | 2012-05-08 | Infineon Technologies Ag | Integrated circuit with magnetic material magnetically coupled to magneto-resistive sensing element |
| EP2284553B1 (de) * | 2009-07-31 | 2012-06-20 | TDK Corporation | Magnetwiderstands-Wirkungselement und Sensor |
| US8248100B2 (en) * | 2010-04-19 | 2012-08-21 | Grandis, Inc. | Method and system for providing spin transfer based logic devices |
| US8704547B2 (en) * | 2010-04-19 | 2014-04-22 | Samsung Electronics Co., Ltd. | Method and system for providing spin transfer based logic devices |
| US20140099663A1 (en) * | 2010-11-15 | 2014-04-10 | Regents Of The University Of Minnesota | Gmr sensor |
| DE102011080945A1 (de) * | 2011-08-15 | 2013-02-21 | Siemens Aktiengesellschaft | Dynamische Zustandsbestimmung von Analyten mittels magnetischer Durchflussmessung |
| EP2800970B1 (de) | 2012-01-04 | 2016-09-28 | Magnomics, S.A. | Monolithische vorrichtung zur kombination von cmos mit magnetoresistiven sensoren |
| DE102012210598A1 (de) * | 2012-06-22 | 2013-12-24 | Siemens Aktiengesellschaft | Verfahren und Anordnung zur Detektion von Zellen in einer Zellsuspension |
| JP2016530482A (ja) | 2013-05-23 | 2016-09-29 | アイフィノタイプ エルエルシー | ウェルネスを維持するか、または向上するための方法およびシステム |
| CN107921442A (zh) * | 2015-06-24 | 2018-04-17 | 奥本大学 | 使用磁致伸缩传感器的电磁流体过滤器 |
| CN108780067A (zh) * | 2016-03-28 | 2018-11-09 | Tdk株式会社 | 生物传感器和生物芯片 |
| US10799863B2 (en) | 2016-03-28 | 2020-10-13 | Tdk Corporation | Chemical sensor |
| JP6860007B2 (ja) * | 2016-03-28 | 2021-04-14 | Tdk株式会社 | 化学センサ |
| JP6668176B2 (ja) * | 2016-06-16 | 2020-03-18 | 株式会社東芝 | センサ |
| US10060880B2 (en) | 2016-09-15 | 2018-08-28 | Qualcomm Incorporated | Magnetoresistive (MR) sensors employing dual MR devices for differential MR sensing |
| DE102017130033B4 (de) * | 2017-12-14 | 2024-02-22 | Universität Bielefeld | Detektionsvorrichtung und Verfahren zur Detektion von magnetischen Partikeln in Schmierstoffen |
| JP6717442B2 (ja) * | 2018-01-25 | 2020-07-01 | 株式会社村田製作所 | 磁気センサおよび電流センサ |
| US11609208B2 (en) | 2019-04-12 | 2023-03-21 | Western Digital Technologies, Inc. | Devices and methods for molecule detection based on thermal stabilities of magnetic nanoparticles |
| WO2020210370A1 (en) | 2019-04-12 | 2020-10-15 | Roche Sequencing Solutions, Inc. | Nucleic acid sequencing by synthesis using magnetic sensor arrays |
| US11738336B2 (en) | 2019-04-12 | 2023-08-29 | Western Digital Technologies, Inc. | Spin torque oscillator (STO) sensors used in nucleic acid sequencing arrays and detection schemes for nucleic acid sequencing |
| US11327073B2 (en) | 2019-04-12 | 2022-05-10 | Western Digital Technologies, Inc. | Thermal sensor array for molecule detection and related detection schemes |
| US11579217B2 (en) | 2019-04-12 | 2023-02-14 | Western Digital Technologies, Inc. | Devices and methods for frequency- and phase-based detection of magnetically-labeled molecules using spin torque oscillator (STO) sensors |
| US11112468B2 (en) | 2019-04-12 | 2021-09-07 | Western Digital Technologies, Inc. | Magnetoresistive sensor array for molecule detection and related detection schemes |
| US11208682B2 (en) | 2019-09-13 | 2021-12-28 | Western Digital Technologies, Inc. | Enhanced optical detection for nucleic acid sequencing using thermally-dependent fluorophore tags |
| US11747329B2 (en) | 2019-11-22 | 2023-09-05 | Western Digital Technologies, Inc. | Magnetic gradient concentrator/reluctance detector for molecule detection |
| WO2021250924A1 (ja) | 2020-06-11 | 2021-12-16 | 株式会社村田製作所 | 磁気センサチップおよび磁気センサ装置 |
| CN113189193B (zh) * | 2021-04-20 | 2024-03-29 | 西安交通大学 | 一种隧穿磁阻生物传感器及其制备方法及应用 |
| US12044754B2 (en) | 2021-09-21 | 2024-07-23 | Tdk Corporation | Magnetic sensor |
| US12399236B2 (en) * | 2023-04-03 | 2025-08-26 | Infineon Technologies Ag | Inducing mechanical stress in magnetoresistive sensing element to align magnetization axis of reference layer system in preferred direction for improved sensor performance |
| CN120142438B (zh) * | 2025-03-18 | 2026-01-06 | 太原理工大学 | 一种基于磁场调控的生物传感器及其制备方法 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2006A (en) * | 1841-03-16 | Clamp for crimping leather | ||
| JPH02195284A (ja) * | 1989-01-25 | 1990-08-01 | Hitachi Metals Ltd | 磁気センサ |
| US6510031B1 (en) | 1995-03-31 | 2003-01-21 | International Business Machines Corporation | Magnetoresistive sensor with magnetostatic coupling to obtain opposite alignment of magnetic regions |
| US5981297A (en) | 1997-02-05 | 1999-11-09 | The United States Of America As Represented By The Secretary Of The Navy | Biosensor using magnetically-detected label |
| US6437563B1 (en) | 1997-11-21 | 2002-08-20 | Quantum Design, Inc. | Method and apparatus for making measurements of accumulations of magnetically susceptible particles combined with analytes |
| US6875621B2 (en) | 1999-10-13 | 2005-04-05 | Nve Corporation | Magnetizable bead detector |
| US6468809B1 (en) | 2000-02-04 | 2002-10-22 | The United States Of America As Represented By The Secretary Of The Navy | High efficiency magnetic sensor for magnetic particles |
| US6504363B1 (en) * | 2000-03-07 | 2003-01-07 | Teodor Dogaru | Sensor for eddy current testing and method of use thereof |
| US6727691B2 (en) * | 2000-06-26 | 2004-04-27 | Jentek Sensors, Inc. | High resolution inductive sensor arrays for material and defect characterization of welds |
| US6992482B2 (en) * | 2000-11-08 | 2006-01-31 | Jentek Sensors, Inc. | Magnetic field sensor having a switchable drive current spatial distribution |
| US6518747B2 (en) | 2001-02-16 | 2003-02-11 | Quantum Design, Inc. | Method and apparatus for quantitative determination of accumulations of magnetic particles |
| US7048890B2 (en) | 2001-12-21 | 2006-05-23 | Koninklijke Philips Electronics N.V. | Sensor and method for measuring the areal density of magnetic nanoparticles on a micro-array |
| AU2002348754A1 (en) | 2001-12-21 | 2003-07-09 | Koninklijke Philips Electronics N.V. | Magnetoresistive sensing device, system and method for determining a density of magnetic particles in fluid |
| JP3835447B2 (ja) * | 2002-10-23 | 2006-10-18 | ヤマハ株式会社 | 磁気センサ、同磁気センサの製造方法及び同製造方法に適したマグネットアレイ |
| US7394626B2 (en) | 2002-11-01 | 2008-07-01 | Nec Corporation | Magnetoresistance device with a diffusion barrier between a conductor and a magnetoresistance element and method of fabricating the same |
| JP4399211B2 (ja) * | 2002-12-21 | 2010-01-13 | 株式会社ハイニックスセミコンダクター | バイオセンサー |
| KR100697123B1 (ko) * | 2003-07-18 | 2007-03-20 | 야마하 가부시키가이샤 | 자기 센서 및 그 제조 방법 |
| US7282755B2 (en) | 2003-11-14 | 2007-10-16 | Grandis, Inc. | Stress assisted current driven switching for magnetic memory applications |
| PT1781820T (pt) | 2004-08-20 | 2018-07-10 | Magnomics Sa | Um dispositivo bioeletrónico |
| EP1815252B1 (de) | 2004-11-05 | 2012-10-10 | Imec | Verfahren zum transport magnetischer teilchen und vorrichtungen dafür |
| JP4105147B2 (ja) * | 2004-12-06 | 2008-06-25 | Tdk株式会社 | 電流センサ |
| WO2006098367A1 (ja) * | 2005-03-17 | 2006-09-21 | Yamaha Corporation | 磁気センサ及びその製造方法 |
-
2006
- 2006-08-01 US US11/497,162 patent/US8133439B2/en active Active
-
2007
- 2007-07-30 EP EP20070392003 patent/EP1884763B1/de not_active Not-in-force
- 2007-07-30 AT AT07392003T patent/ATE552488T1/de active
- 2007-07-30 EP EP11006801.2A patent/EP2390651B8/de not_active Not-in-force
- 2007-07-30 EP EP20110006800 patent/EP2390650B1/de not_active Not-in-force
- 2007-08-01 JP JP2007201212A patent/JP5654193B2/ja not_active Expired - Fee Related
-
2012
- 2012-03-12 US US13/417,399 patent/US9429544B2/en not_active Expired - Fee Related
- 2012-03-12 US US13/417,398 patent/US8728825B2/en not_active Expired - Fee Related
-
2013
- 2013-03-18 JP JP2013054767A patent/JP5680687B2/ja not_active Expired - Fee Related
-
2014
- 2014-09-05 JP JP2014181518A patent/JP5826903B2/ja not_active Expired - Fee Related
-
2016
- 2016-08-26 US US15/248,054 patent/US10203379B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2390650B1 (de) | 2013-07-17 |
| EP1884763A3 (de) | 2009-01-21 |
| US10203379B2 (en) | 2019-02-12 |
| US8133439B2 (en) | 2012-03-13 |
| JP2013167632A (ja) | 2013-08-29 |
| US20160363635A1 (en) | 2016-12-15 |
| JP5654193B2 (ja) | 2015-01-14 |
| JP2014240847A (ja) | 2014-12-25 |
| US8728825B2 (en) | 2014-05-20 |
| EP2390651A1 (de) | 2011-11-30 |
| JP5826903B2 (ja) | 2015-12-02 |
| US20080032423A1 (en) | 2008-02-07 |
| US9429544B2 (en) | 2016-08-30 |
| US20120169332A1 (en) | 2012-07-05 |
| EP1884763A2 (de) | 2008-02-06 |
| EP1884763B1 (de) | 2012-04-04 |
| JP5680687B2 (ja) | 2015-03-04 |
| EP2390651B1 (de) | 2016-02-10 |
| EP2390651B8 (de) | 2016-03-16 |
| JP2008039782A (ja) | 2008-02-21 |
| US20120169331A1 (en) | 2012-07-05 |
| EP2390650A1 (de) | 2011-11-30 |
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