ATE553499T1 - Verfahren zur herstellung einer nanostruktur auf einem vorgeätzten substrat - Google Patents

Verfahren zur herstellung einer nanostruktur auf einem vorgeätzten substrat

Info

Publication number
ATE553499T1
ATE553499T1 AT07825248T AT07825248T ATE553499T1 AT E553499 T1 ATE553499 T1 AT E553499T1 AT 07825248 T AT07825248 T AT 07825248T AT 07825248 T AT07825248 T AT 07825248T AT E553499 T1 ATE553499 T1 AT E553499T1
Authority
AT
Austria
Prior art keywords
substrate
nanostructure
coating
nanorelief
producing
Prior art date
Application number
AT07825248T
Other languages
English (en)
Inventor
Ursula Ebels
Bernard Dieny
Dominique Lestelle
Eric Gautier
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE553499T1 publication Critical patent/ATE553499T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/0085—Manufacture of substrate-free structures using moulds and master templates, e.g. for hot-embossing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Stringed Musical Instruments (AREA)
  • Adornments (AREA)
  • Laminated Bodies (AREA)
AT07825248T 2006-07-27 2007-06-26 Verfahren zur herstellung einer nanostruktur auf einem vorgeätzten substrat ATE553499T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0606907A FR2904304B1 (fr) 2006-07-27 2006-07-27 Procede de fabrication d'une nanostructure sur un substrat pre-grave.
PCT/IB2007/002912 WO2008012684A1 (en) 2006-07-27 2007-06-26 A method of fabricating a nanostructure on a pre-etched substrate.

Publications (1)

Publication Number Publication Date
ATE553499T1 true ATE553499T1 (de) 2012-04-15

Family

ID=37873219

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07825248T ATE553499T1 (de) 2006-07-27 2007-06-26 Verfahren zur herstellung einer nanostruktur auf einem vorgeätzten substrat

Country Status (5)

Country Link
US (1) US8329049B2 (de)
EP (1) EP2047509B1 (de)
AT (1) ATE553499T1 (de)
FR (1) FR2904304B1 (de)
WO (1) WO2008012684A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8163657B2 (en) * 2005-05-27 2012-04-24 Chou Stephen Y Process for adjusting the size and shape of nanostructures
US8163656B2 (en) * 2005-05-27 2012-04-24 Chou Stephen Y Process for adjusting the size and shape of nanostructures
US8603606B2 (en) 2010-10-29 2013-12-10 Hewlett-Packard Development Company, L.P. Preventing adhesion between nanostructures
US9786850B2 (en) * 2012-09-07 2017-10-10 President And Fellows Of Harvard College Methods and systems for scaffolds comprising nanoelectronic components
US9457128B2 (en) 2012-09-07 2016-10-04 President And Fellows Of Harvard College Scaffolds comprising nanoelectronic components for cells, tissues, and other applications
RU2517795C1 (ru) * 2012-12-27 2014-05-27 федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "МЭИ" (ФГБОУ ВПО "НИУ МЭИ") Способ формирования нанорельефа на теплообменной поверхности изделий
CN103341692A (zh) * 2013-06-26 2013-10-09 京东方科技集团股份有限公司 切割不规则图形基板的方法和显示装置
US20150179877A1 (en) * 2013-12-20 2015-06-25 LuxVue Technology Corporation Nanowire device
US9583533B2 (en) 2014-03-13 2017-02-28 Apple Inc. LED device with embedded nanowire LEDs
US10405278B2 (en) * 2014-10-31 2019-09-03 Qualcomm Incorporated Low power scheduling
US11289319B2 (en) * 2019-08-06 2022-03-29 Thermo Fisher Scientific (Bremen) Gmbh System to analyze particles, and particularly the mass of particles
CN113145183B (zh) * 2020-01-22 2022-12-06 京东方科技集团股份有限公司 一种生物芯片及其制作方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1029359A4 (de) * 1997-11-10 2007-06-06 Don L Kendall Quanten-kämme und -spitze
US7291284B2 (en) * 2000-05-26 2007-11-06 Northwestern University Fabrication of sub-50 nm solid-state nanostructures based on nanolithography
KR100984585B1 (ko) 2000-08-22 2010-09-30 프레지던트 앤드 펠로우즈 오브 하버드 칼리지 반도체 성장 방법 및 디바이스 제조 방법
WO2003083949A1 (en) * 2002-03-28 2003-10-09 Koninklijke Philips Electronics N.V. Nanowire and electronic device
US7874066B2 (en) * 2002-07-31 2011-01-25 Sony Corporation Method of manufacturing a device-incorporated substrate
US7378347B2 (en) * 2002-10-28 2008-05-27 Hewlett-Packard Development Company, L.P. Method of forming catalyst nanoparticles for nanowire growth and other applications
US8173525B2 (en) * 2005-06-17 2012-05-08 Georgia Tech Research Corporation Systems and methods for nanomaterial transfer
EP1840648A1 (de) * 2006-03-31 2007-10-03 Sony Deutschland Gmbh Verfahren zur Aufbringung eines Musters aus Metall und/oder Halbleiter auf ein Substrat
US20100021985A1 (en) * 2007-03-20 2010-01-28 The Regents Of The University Of California Mechanical process for creating particles in fluid

Also Published As

Publication number Publication date
EP2047509A1 (de) 2009-04-15
FR2904304A1 (fr) 2008-02-01
WO2008012684A8 (en) 2009-02-26
US8329049B2 (en) 2012-12-11
WO2008012684A1 (en) 2008-01-31
FR2904304B1 (fr) 2008-10-17
US20100003421A1 (en) 2010-01-07
EP2047509B1 (de) 2012-04-11

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