ATE555179T1 - Teilchenförmiges schleifmaterial und verfahren zur planierung eines werkstücks mithilfe des teilchenförmigen schleifmaterials - Google Patents

Teilchenförmiges schleifmaterial und verfahren zur planierung eines werkstücks mithilfe des teilchenförmigen schleifmaterials

Info

Publication number: ATE555179T1
Authority: AT; Austria
Prior art keywords: abrasive material; particle abrasive; planning; workpiece; particle
Prior art date: 2005-10-14

Application number

AT06825992T

Other languages

English (en)

Inventor

Andrew Haerle

Jun Wang

Original Assignee

Saint Gobain Ceramics

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-10-14

Filing date

2006-10-13

Publication date

2012-05-15

2006-10-13 Application filed by Saint Gobain Ceramics filed Critical Saint Gobain Ceramics

2012-05-15 Application granted granted Critical

2012-05-15 Publication of ATE555179T1 publication Critical patent/ATE555179T1/de

Links

239000002245 particle Substances 0.000 title abstract 5
239000003082 abrasive agent Substances 0.000 title 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 4
230000007704 transition Effects 0.000 abstract 2
239000011236 particulate material Substances 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/02—Amorphous compounds
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/20—Particle morphology extending in two dimensions, e.g. plate-like
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/54—Particles characterised by their aspect ratio, i.e. the ratio of sizes in the longest to the shortest dimension
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/10—Solid density
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/12—Surface area

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Nanotechnology (AREA)
Life Sciences & Earth Sciences (AREA)
Inorganic Chemistry (AREA)
Geology (AREA)
Physics & Mathematics (AREA)
Composite Materials (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Crystallography & Structural Chemistry (AREA)
Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Polishing Bodies And Polishing Tools (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Mechanical Treatment Of Semiconductor (AREA)

AT06825992T 2005-10-14 2006-10-13 Teilchenförmiges schleifmaterial und verfahren zur planierung eines werkstücks mithilfe des teilchenförmigen schleifmaterials ATE555179T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US11/251,633 US8685123B2 (en)	2005-10-14	2005-10-14	Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
PCT/US2006/040295 WO2007047547A2 (en)	2005-10-14	2006-10-13	Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material

Publications (1)

Publication Number	Publication Date
ATE555179T1 true ATE555179T1 (de)	2012-05-15

Family

ID=37722443

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT06825992T ATE555179T1 (de)	2005-10-14	2006-10-13	Teilchenförmiges schleifmaterial und verfahren zur planierung eines werkstücks mithilfe des teilchenförmigen schleifmaterials

Country Status (18)

Country	Link
US (1)	US8685123B2 (de)
EP (1)	EP1934300B1 (de)
JP (1)	JP5384938B2 (de)
KR (1)	KR101120417B1 (de)
CN (1)	CN101370896B (de)
AT (1)	ATE555179T1 (de)
AU (1)	AU2006304356B2 (de)
BR (1)	BRPI0617413A2 (de)
CA (1)	CA2625273C (de)
IL (1)	IL190737A0 (de)
MY (1)	MY145461A (de)
NO (1)	NO20082195L (de)
NZ (1)	NZ567318A (de)
RU (1)	RU2401856C2 (de)
TW (1)	TWI308928B (de)
UA (1)	UA87938C2 (de)
WO (1)	WO2007047547A2 (de)
ZA (1)	ZA200803185B (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US8685123B2 (en)	2005-10-14	2014-04-01	Saint-Gobain Ceramics & Plastics, Inc.	Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
US20070287004A1 (en) *	2006-05-25	2007-12-13	Gottzmann Andreas M	Laminate and Method of Manufacture
FR2906800B1 (fr) *	2006-10-09	2008-11-28	Rhodia Recherches & Tech	Suspension liquide et poudre de particules d'oxyde de cerium, procedes de preparation de celles-ci et utilisation dans le polissage
US7837888B2 (en) *	2006-11-13	2010-11-23	Cabot Microelectronics Corporation	Composition and method for damascene CMP
KR20100125339A (ko) *	2008-03-03	2010-11-30	유니버시티 오브 플로리다 리서치 파운데이션, 인크.	나노입자 졸-겔 복합 혼성 투명 코팅 물질
WO2009151120A1 (ja) *	2008-06-13	2009-12-17	株式会社フジミインコーポレーテッド	アルミニウム酸化物粒子及びそれを含有する研磨用組成物
US8382016B2 (en) *	2009-02-25	2013-02-26	Thiele Kaolin Company	Nano particle mineral pigment
CN102348535B (zh) *	2009-03-11	2015-01-14	圣戈班磨料磨具有限公司	包含具有改进形状的熔凝的氧化锆氧化铝颗粒的磨料物品
KR20140000496A (ko) *	2012-06-22	2014-01-03	에스케이하이닉스 주식회사	연마 조성물, 이의 제조 방법 및 이를 이용한 화학적 기계적 연마 방법
KR101889698B1 (ko)	2013-09-30	2018-08-21	생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드	형상화 연마입자 및 이의 형성 방법
CN104726061A (zh) *	2013-12-19	2015-06-24	3M创新有限公司	磨料、研磨件及其制备方法
CN103952084B (zh) *	2014-04-29	2016-03-23	德米特（苏州）电子环保材料有限公司	一种氧化铝基质的金属抛光液的制备方法
JP6233296B2 (ja) *	2014-12-26	2017-11-22	株式会社Sumco	砥粒の評価方法、および、シリコンウェーハの製造方法
JP6803176B2 (ja) *	2016-08-26	2020-12-23	一般財団法人ファインセラミックスセンター	多孔質アルミナ粒子材料の製造方法
WO2021049154A1 (ja) *	2019-09-11	2021-03-18	株式会社フジミインコーポレーテッド	研磨用組成物およびこれを用いた研磨方法
KR102261151B1 (ko)	2020-02-27	2021-06-07	비드오리진(주)	표면 돌기가 형성된 구형 무기 입자 및 그 제조 방법
EP4314179A4 (de) *	2021-03-29	2025-06-18	Entegris, Inc.	Suspension zur chemisch-mechanischen planarisierung (cmp) und verfahren damit
JP7638349B1 (ja) *	2023-10-26	2025-03-03	株式会社トッパンインフォメディア	研磨スラリー

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4318896A (en) *	1980-04-14	1982-03-09	Uop Inc.	Manufacture of alumina particles
US4835124A (en) *	1985-09-30	1989-05-30	Aluminum Company Of America	Alumina ceramic product from colloidal alumina
US5302368A (en) *	1987-01-29	1994-04-12	Sumitomo Chemical Company, Limited	Process for preparation of alumina
US4797139A (en) *	1987-08-11	1989-01-10	Norton Company	Boehmite produced by a seeded hydyothermal process and ceramic bodies produced therefrom
JPH04193712A (ja)	1990-11-26	1992-07-13	Sumitomo Chem Co Ltd	遷移アルミナおよびその製造方法
DE4118564A1 (de)	1991-06-06	1992-12-17	Vaw Ver Aluminium Werke Ag	Teilkristalline uebergangsaluminiumoxide, verfahren zu deren herstellung und verwendung zur gewinnung von formkoerpern, die im wesentlichen aus gamma-al(pfeil abwaerts)2(pfeil abwaerts)o(pfeil abwaerts)3(pfeil abwaerts) bestehen
FR2678922B1 (fr) *	1991-07-08	1994-03-25	Sumitomo Chemical Cy Ltd	Poudre d'alumine theta, son procede de preparation et support d'enregistrement magnetique la contenant.
US5527423A (en) *	1994-10-06	1996-06-18	Cabot Corporation	Chemical mechanical polishing slurry for metal layers
US5725162A (en) *	1995-04-05	1998-03-10	Saint Gobain/Norton Industrial Ceramics Corporation	Firing sol-gel alumina particles
KR960041316A (ko) *	1995-05-22	1996-12-19	고사이 아키오	연마용 입상체, 이의 제조방법 및 이의 용도
US5693239A (en) *	1995-10-10	1997-12-02	Rodel, Inc.	Polishing slurries comprising two abrasive components and methods for their use
JPH10125638A (ja)	1996-08-29	1998-05-15	Sumitomo Chem Co Ltd	研磨用組成物及びそれを使用した半導体基板上の金属膜の平坦化方法
KR19980019046A (ko) *	1996-08-29	1998-06-05	고사이 아키오	연마용 조성물 및 이의 용도(Abrasive composition and use of the same)
US6194317B1 (en) *	1998-04-30	2001-02-27	3M Innovative Properties Company	Method of planarizing the upper surface of a semiconductor wafer
JPH11268911A (ja)	1998-01-08	1999-10-05	Nissan Chem Ind Ltd	アルミナ粉末及びその製造方法並びに研磨用組成物
MY117813A (en) *	1998-01-08	2004-08-30	Nissan Chemical Ind Ltd	Alumina powder, process for producing the same and polishing composition.
JP3545950B2 (ja)	1998-10-29	2004-07-21	ロデール・ニッタ株式会社	研磨用組成物
JP4134458B2 (ja)	1999-06-23	2008-08-20	Ｊｓｒ株式会社	半導体部品用洗浄剤、半導体部品の洗浄方法
EP1256548A4 (de)	1999-12-27	2004-05-19	Showa Denko Kk	Aluminiumoxidteilchen, verfahren zu deren herstellung, zusammensetzung diese enthaltend, sowie aluminiumoxidaufschlämmung zum polieren
US7067105B2 (en) *	1999-12-27	2006-06-27	Showa Denko K.K.	Alumina particles, production process thereof, composition comprising the particles and alumina slurry for polishing
TWI272249B (en) *	2001-02-27	2007-02-01	Nissan Chemical Ind Ltd	Crystalline ceric oxide sol and process for producing the same
US6756340B2 (en) *	2002-04-08	2004-06-29	Uop Llc	Dehydrogenation catalyst composition
TWI307712B (en) *	2002-08-28	2009-03-21	Kao Corp	Polishing composition
US7344988B2 (en) *	2003-10-27	2008-03-18	Dupont Air Products Nanomaterials Llc	Alumina abrasive for chemical mechanical polishing
DE10360087A1 (de)	2003-12-20	2005-07-21	Degussa Ag	Flammenhydrolytisch hergestelltes, hochoberflächiges Aluminiumoxidpulver
TW200531924A (en) *	2004-03-12	2005-10-01	Sumitomo Chemical Co	Method for producing α-alumina particle
US20060104895A1 (en)	2004-11-18	2006-05-18	Saint-Gobain Ceramics & Plastics, Inc.	Transitional alumina particulate materials having controlled morphology and processing for forming same
TWI271555B (en)	2005-06-13	2007-01-21	Basf Ag	Slurry composition for polishing color filter
US8685123B2 (en)	2005-10-14	2014-04-01	Saint-Gobain Ceramics & Plastics, Inc.	Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material

2005
- 2005-10-14 US US11/251,633 patent/US8685123B2/en active Active
2006
- 2006-10-13 CN CN2006800463685A patent/CN101370896B/zh active Active
- 2006-10-13 CA CA2625273A patent/CA2625273C/en not_active Expired - Fee Related
- 2006-10-13 RU RU2008114107/04A patent/RU2401856C2/ru not_active IP Right Cessation
- 2006-10-13 AT AT06825992T patent/ATE555179T1/de active
- 2006-10-13 JP JP2008535762A patent/JP5384938B2/ja active Active
- 2006-10-13 UA UAA200804717A patent/UA87938C2/ru unknown
- 2006-10-13 TW TW095137814A patent/TWI308928B/zh active
- 2006-10-13 EP EP06825992A patent/EP1934300B1/de not_active Not-in-force
- 2006-10-13 NZ NZ567318A patent/NZ567318A/en unknown
- 2006-10-13 KR KR1020087011372A patent/KR101120417B1/ko active Active
- 2006-10-13 WO PCT/US2006/040295 patent/WO2007047547A2/en not_active Ceased
- 2006-10-13 AU AU2006304356A patent/AU2006304356B2/en not_active Ceased
- 2006-10-13 BR BRPI0617413-2A patent/BRPI0617413A2/pt not_active IP Right Cessation
2008
- 2008-04-09 IL IL190737A patent/IL190737A0/en unknown
- 2008-04-10 ZA ZA200803185A patent/ZA200803185B/xx unknown
- 2008-04-11 MY MYPI20081089A patent/MY145461A/en unknown
- 2008-05-13 NO NO20082195A patent/NO20082195L/no not_active Application Discontinuation

Also Published As

Publication number	Publication date
AU2006304356B2 (en)	2010-07-01
WO2007047547A2 (en)	2007-04-26
RU2008114107A (ru)	2009-11-20
IL190737A0 (en)	2008-11-03
BRPI0617413A2 (pt)	2011-07-26
TW200724657A (en)	2007-07-01
JP5384938B2 (ja)	2014-01-08
EP1934300B1 (de)	2012-04-25
US8685123B2 (en)	2014-04-01
UA87938C2 (ru)	2009-08-25
US20070084134A1 (en)	2007-04-19
KR20080066799A (ko)	2008-07-16
TWI308928B (en)	2009-04-21
WO2007047547A3 (en)	2007-06-14
CN101370896B (zh)	2012-10-17
ZA200803185B (en)	2009-01-28
JP2009511719A (ja)	2009-03-19
EP1934300A2 (de)	2008-06-25
MY145461A (en)	2012-02-15
AU2006304356A1 (en)	2007-04-26
RU2401856C2 (ru)	2010-10-20
KR101120417B1 (ko)	2012-03-16
NZ567318A (en)	2011-06-30
CA2625273A1 (en)	2007-04-26
CN101370896A (zh)	2009-02-18
NO20082195L (no)	2008-07-03
CA2625273C (en)	2011-08-23

Publication	Publication Date	Title
ATE555179T1 (de)	2012-05-15	Teilchenförmiges schleifmaterial und verfahren zur planierung eines werkstücks mithilfe des teilchenförmigen schleifmaterials
IL181935A0 (en)	2007-07-04	Composition containing fine particles and process for producing the same
BR0318087A (pt)	2005-12-20	Método para produzir partìculas cerâmicas
DE60209967D1 (de)	2006-05-11	Verfahren und Vorrichtung zur Bestimmung der Teilchengrössenverteilung atmosphärischer Aerosolpartikel
NO20074363L (no)	2007-10-17	Abrasiv gjenstand og fremgangsmate for fremstilling av denne
ATE437207T1 (de)	2009-08-15	Verfahren zur reduzierung der teilchengrösse von metallverbindungen
ATE552913T1 (de)	2012-04-15	Verfahren und vorrichtung zur schaffung einer umgebung, in der ein nebel aus geladenen wasserteilchen dispergiert wird
BR0206822A (pt)	2004-02-25	Composição, artigo abrasivo revestido, e, métodos para produzir um artigo abrasivo revestido, e para abradar uma peça de trabalho
DE602004025463D1 (de)	2010-03-25	Verwendung von ciclesonide zur erhaltung des feinen teilchengrössenanteils von formoterol
TW200615229A (en)	2006-05-16	Method for producing fine-grained particles
LT4204359T (lt)	2026-03-10	Smulkiųjų dalelių modifikuotos dalelių formos anglies medžiagos ir jų gamybos būdas
DE602006000955D1 (de)	2008-06-05	Verfahren zur mechanischen Charakterisierung eines metallischen Materials
ATE502697T1 (de)	2011-04-15	Verfahren und vorrichtung zur trennung von feststoffteilchen auf der basis von unterschiedlicher dichte
ATE443198T1 (de)	2009-10-15	Mit einer vorrichtung zum transportieren von teilchen aus einem magnetischen material ausgestattetes schneidwerkzeug
ATE515481T1 (de)	2011-07-15	Verfahren zur entfernung organischer materie aus wasser
ATE228579T1 (de)	2002-12-15	Verfahren zur herstellung von hartmetallmischungen
ATE553288T1 (de)	2012-04-15	Anordnung und verfahren zum entfernen von teilchen in einem gasstrom
DE60316476D1 (de)	2007-10-31	Vorrichtung zur verhinderung des mitlaufens von feinpartikeln
WO2007087172A3 (en)	2008-03-06	Magnetically-attractable non-clumping animal litter
ATE420213T1 (de)	2009-01-15	Verfahren und anlage zur schlackengranulierung
DE10394249D2 (de)	2006-06-08	Brunnen und Verfahren zur Regenerierung eines Brunnens
DE69900457D1 (de)	2001-12-20	Verfahren zur Fischer-Tropsch-Synthese in Gegenwart eines Katalysators mit vorbestimmter Grösse der Metall- partikel
DE502005010049D1 (de)	2010-09-16	Vorrichtung und verfahren zur verdichtung von partikeln
ATE226243T1 (de)	2002-11-15	Verfahren zur verminderung des feinteilchenanteils eines pulverigen produktes sowie gewebereinigungsmittel daraus hergestellt
DE60115286D1 (de)	2005-12-29	Verfahren und geräte zur analogen verarbeitung eines von einem teilchendetektor emittierten signals