ATE555179T1 - Teilchenförmiges schleifmaterial und verfahren zur planierung eines werkstücks mithilfe des teilchenförmigen schleifmaterials - Google Patents

Teilchenförmiges schleifmaterial und verfahren zur planierung eines werkstücks mithilfe des teilchenförmigen schleifmaterials

Info

Publication number: ATE555179T1
Authority: AT; Austria
Prior art keywords: abrasive material; particle abrasive; planning; workpiece; particle
Prior art date: 2005-10-14

Application number

AT06825992T

Other languages

English (en)

Inventor

Andrew Haerle

Jun Wang

Original Assignee

Saint Gobain Ceramics

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-10-14

Filing date

2006-10-13

Publication date

2012-05-15

2006-10-13 Application filed by Saint Gobain Ceramics filed Critical Saint Gobain Ceramics

2012-05-15 Application granted granted Critical

2012-05-15 Publication of ATE555179T1 publication Critical patent/ATE555179T1/de

Links

239000002245 particle Substances 0.000 title abstract 5
239000003082 abrasive agent Substances 0.000 title 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 4
230000007704 transition Effects 0.000 abstract 2
239000011236 particulate material Substances 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/02—Amorphous compounds
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/20—Particle morphology extending in two dimensions, e.g. plate-like
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/54—Particles characterised by their aspect ratio, i.e. the ratio of sizes in the longest to the shortest dimension
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/10—Solid density
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/12—Surface area

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Nanotechnology (AREA)
Life Sciences & Earth Sciences (AREA)
Inorganic Chemistry (AREA)
Geology (AREA)
Physics & Mathematics (AREA)
Composite Materials (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Crystallography & Structural Chemistry (AREA)
Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Polishing Bodies And Polishing Tools (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Mechanical Treatment Of Semiconductor (AREA)

AT06825992T 2005-10-14 2006-10-13 Teilchenförmiges schleifmaterial und verfahren zur planierung eines werkstücks mithilfe des teilchenförmigen schleifmaterials ATE555179T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US11/251,633 US8685123B2 (en)	2005-10-14	2005-10-14	Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
PCT/US2006/040295 WO2007047547A2 (en)	2005-10-14	2006-10-13	Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material

Publications (1)

Publication Number	Publication Date
ATE555179T1 true ATE555179T1 (de)	2012-05-15

Family

ID=37722443

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT06825992T ATE555179T1 (de)	2005-10-14	2006-10-13	Teilchenförmiges schleifmaterial und verfahren zur planierung eines werkstücks mithilfe des teilchenförmigen schleifmaterials

Country Status (18)

Country	Link
US (1)	US8685123B2 (de)
EP (1)	EP1934300B1 (de)
JP (1)	JP5384938B2 (de)
KR (1)	KR101120417B1 (de)
CN (1)	CN101370896B (de)
AT (1)	ATE555179T1 (de)
AU (1)	AU2006304356B2 (de)
BR (1)	BRPI0617413A2 (de)
CA (1)	CA2625273C (de)
IL (1)	IL190737A0 (de)
MY (1)	MY145461A (de)
NO (1)	NO20082195L (de)
NZ (1)	NZ567318A (de)
RU (1)	RU2401856C2 (de)
TW (1)	TWI308928B (de)
UA (1)	UA87938C2 (de)
WO (1)	WO2007047547A2 (de)
ZA (1)	ZA200803185B (de)

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US8685123B2 (en)	2005-10-14	2014-04-01	Saint-Gobain Ceramics & Plastics, Inc.	Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
US20070287004A1 (en) *	2006-05-25	2007-12-13	Gottzmann Andreas M	Laminate and Method of Manufacture
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US8382016B2 (en) *	2009-02-25	2013-02-26	Thiele Kaolin Company	Nano particle mineral pigment
AU2010224098B2 (en) *	2009-03-11	2013-10-10	Saint-Gobain Abrasifs	Abrasive articles including fused zirconia alumina grain having an improved shape
KR20140000496A (ko) *	2012-06-22	2014-01-03	에스케이하이닉스 주식회사	연마 조성물, 이의 제조 방법 및 이를 이용한 화학적 기계적 연마 방법
US9783718B2 (en)	2013-09-30	2017-10-10	Saint-Gobain Ceramics & Plastics, Inc.	Shaped abrasive particles and methods of forming same
CN104726061A (zh) *	2013-12-19	2015-06-24	3M创新有限公司	磨料、研磨件及其制备方法
CN103952084B (zh) *	2014-04-29	2016-03-23	德米特（苏州）电子环保材料有限公司	一种氧化铝基质的金属抛光液的制备方法
JP6233296B2 (ja) *	2014-12-26	2017-11-22	株式会社Sumco	砥粒の評価方法、および、シリコンウェーハの製造方法
JP6803176B2 (ja) *	2016-08-26	2020-12-23	一般財団法人ファインセラミックスセンター	多孔質アルミナ粒子材料の製造方法
WO2021049154A1 (ja) *	2019-09-11	2021-03-18	株式会社フジミインコーポレーテッド	研磨用組成物およびこれを用いた研磨方法
KR102261151B1 (ko)	2020-02-27	2021-06-07	비드오리진(주)	표면 돌기가 형성된 구형 무기 입자 및 그 제조 방법
KR20230160334A (ko) *	2021-03-29	2023-11-23	엔테그리스, 아이엔씨.	화학적 기계적 평탄화(cmp)를 위한 현탁액 및 이를 사용하는 방법
JP7638349B1 (ja) *	2023-10-26	2025-03-03	株式会社トッパンインフォメディア	研磨スラリー
JP2025125197A (ja) *	2024-02-15	2025-08-27	株式会社バイコウスキージャパン	ＳｉＣ基板研磨用スラリー組成物及びＳｉＣ基板の研磨方法

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US8685123B2 (en)	2005-10-14	2014-04-01	Saint-Gobain Ceramics & Plastics, Inc.	Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material

2005
- 2005-10-14 US US11/251,633 patent/US8685123B2/en active Active
2006
- 2006-10-13 UA UAA200804717A patent/UA87938C2/ru unknown
- 2006-10-13 EP EP06825992A patent/EP1934300B1/de not_active Not-in-force
- 2006-10-13 CA CA2625273A patent/CA2625273C/en not_active Expired - Fee Related
- 2006-10-13 TW TW095137814A patent/TWI308928B/zh active
- 2006-10-13 AT AT06825992T patent/ATE555179T1/de active
- 2006-10-13 BR BRPI0617413-2A patent/BRPI0617413A2/pt not_active IP Right Cessation
- 2006-10-13 AU AU2006304356A patent/AU2006304356B2/en not_active Ceased
- 2006-10-13 JP JP2008535762A patent/JP5384938B2/ja active Active
- 2006-10-13 NZ NZ567318A patent/NZ567318A/en unknown
- 2006-10-13 RU RU2008114107/04A patent/RU2401856C2/ru not_active IP Right Cessation
- 2006-10-13 CN CN2006800463685A patent/CN101370896B/zh active Active
- 2006-10-13 KR KR1020087011372A patent/KR101120417B1/ko active Active
- 2006-10-13 WO PCT/US2006/040295 patent/WO2007047547A2/en not_active Ceased
2008
- 2008-04-09 IL IL190737A patent/IL190737A0/en unknown
- 2008-04-10 ZA ZA200803185A patent/ZA200803185B/xx unknown
- 2008-04-11 MY MYPI20081089A patent/MY145461A/en unknown
- 2008-05-13 NO NO20082195A patent/NO20082195L/no not_active Application Discontinuation

Also Published As

Publication number	Publication date
JP5384938B2 (ja)	2014-01-08
WO2007047547A3 (en)	2007-06-14
BRPI0617413A2 (pt)	2011-07-26
US8685123B2 (en)	2014-04-01
RU2401856C2 (ru)	2010-10-20
KR20080066799A (ko)	2008-07-16
EP1934300B1 (de)	2012-04-25
CN101370896B (zh)	2012-10-17
CN101370896A (zh)	2009-02-18
WO2007047547A2 (en)	2007-04-26
EP1934300A2 (de)	2008-06-25
AU2006304356B2 (en)	2010-07-01
JP2009511719A (ja)	2009-03-19
CA2625273C (en)	2011-08-23
MY145461A (en)	2012-02-15
KR101120417B1 (ko)	2012-03-16
IL190737A0 (en)	2008-11-03
NO20082195L (no)	2008-07-03
UA87938C2 (ru)	2009-08-25
ZA200803185B (en)	2009-01-28
TWI308928B (en)	2009-04-21
CA2625273A1 (en)	2007-04-26
US20070084134A1 (en)	2007-04-19
TW200724657A (en)	2007-07-01
NZ567318A (en)	2011-06-30
AU2006304356A1 (en)	2007-04-26
RU2008114107A (ru)	2009-11-20

Publication	Publication Date	Title
IL190737A0 (en)	2008-11-03	Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
BR0318087A (pt)	2005-12-20	Método para produzir partìculas cerâmicas
DE60209967D1 (de)	2006-05-11	Verfahren und Vorrichtung zur Bestimmung der Teilchengrössenverteilung atmosphärischer Aerosolpartikel
NO20074363L (no)	2007-10-17	Abrasiv gjenstand og fremgangsmate for fremstilling av denne
TW200624382A (en)	2006-07-16	Transitional alumina particulate materials having controlled morphology and processing for forming same
ATE437207T1 (de)	2009-08-15	Verfahren zur reduzierung der teilchengrösse von metallverbindungen
DE602005021005D1 (de)	2010-06-17	Verfahren zur Verarbeitung von Tonsignalen und Vorrichtung zur Durchführung des Verfahrens
DE602004025463D1 (de)	2010-03-25	Verwendung von ciclesonide zur erhaltung des feinen teilchengrössenanteils von formoterol
TW200615229A (en)	2006-05-16	Method for producing fine-grained particles
LT4204359T (lt)	2026-03-10	Smulkiųjų dalelių modifikuotos dalelių formos anglies medžiagos ir jų gamybos būdas
DE602006000955D1 (de)	2008-06-05	Verfahren zur mechanischen Charakterisierung eines metallischen Materials
ATE502697T1 (de)	2011-04-15	Verfahren und vorrichtung zur trennung von feststoffteilchen auf der basis von unterschiedlicher dichte
ATE443198T1 (de)	2009-10-15	Mit einer vorrichtung zum transportieren von teilchen aus einem magnetischen material ausgestattetes schneidwerkzeug
ATE515481T1 (de)	2011-07-15	Verfahren zur entfernung organischer materie aus wasser
ATE228579T1 (de)	2002-12-15	Verfahren zur herstellung von hartmetallmischungen
ATE553288T1 (de)	2012-04-15	Anordnung und verfahren zum entfernen von teilchen in einem gasstrom
DE60316476D1 (de)	2007-10-31	Vorrichtung zur verhinderung des mitlaufens von feinpartikeln
WO2007087172A3 (en)	2008-03-06	Magnetically-attractable non-clumping animal litter
EP1853520A4 (de)	2011-03-30	Verfahren zur adsorption von metall und adsorptionsmaterial dafür und verfahren zur wiederverwendung des adsorptionsmaterials
ATE420213T1 (de)	2009-01-15	Verfahren und anlage zur schlackengranulierung
DE502004006284D1 (de)	2008-04-10	Verfahren und Vorrichtung zum Kontrollieren des Randes eines scheibenförmigen Gegenstandes
DE69900457D1 (de)	2001-12-20	Verfahren zur Fischer-Tropsch-Synthese in Gegenwart eines Katalysators mit vorbestimmter Grösse der Metall- partikel
DE60217075D1 (de)	2007-02-08	Verfahren und vorrichtung zur trennung von teilchen
DE502005010049D1 (de)	2010-09-16	Vorrichtung und verfahren zur verdichtung von partikeln
ATE226243T1 (de)	2002-11-15	Verfahren zur verminderung des feinteilchenanteils eines pulverigen produktes sowie gewebereinigungsmittel daraus hergestellt