ATE75324T1 - Lithiumniobat wellenleiter strukturen. - Google Patents
Lithiumniobat wellenleiter strukturen.Info
- Publication number
- ATE75324T1 ATE75324T1 AT86309434T AT86309434T ATE75324T1 AT E75324 T1 ATE75324 T1 AT E75324T1 AT 86309434 T AT86309434 T AT 86309434T AT 86309434 T AT86309434 T AT 86309434T AT E75324 T1 ATE75324 T1 AT E75324T1
- Authority
- AT
- Austria
- Prior art keywords
- layer
- lithium niobate
- waveguide structures
- niobate waveguide
- conducting
- Prior art date
Links
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 title abstract 3
- 238000000151 deposition Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 1
- 239000003989 dielectric material Substances 0.000 abstract 1
- 238000001312 dry etching Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Inorganic Insulating Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB858531262A GB8531262D0 (en) | 1985-12-19 | 1985-12-19 | Lithium niobate waveguide structures |
| EP86309434A EP0230118B1 (de) | 1985-12-19 | 1986-12-03 | Lithiumniobat wellenleiter Strukturen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE75324T1 true ATE75324T1 (de) | 1992-05-15 |
Family
ID=10589990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT86309434T ATE75324T1 (de) | 1985-12-19 | 1986-12-03 | Lithiumniobat wellenleiter strukturen. |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4851079A (de) |
| EP (1) | EP0230118B1 (de) |
| JP (1) | JPS62168101A (de) |
| AT (1) | ATE75324T1 (de) |
| CA (1) | CA1271372A (de) |
| DE (1) | DE3685015D1 (de) |
| GB (1) | GB8531262D0 (de) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0315350A1 (de) * | 1987-11-02 | 1989-05-10 | AT&T Corp. | Technik zum intrinsischen Gettern bei niedriger Temperatur |
| CA2133300C (en) * | 1993-11-01 | 1999-04-27 | Hirotoshi Nagata | Optical waveguide device |
| DE19502684A1 (de) * | 1995-01-28 | 1996-08-01 | Sel Alcatel Ag | Verfahren zur Herstellung von Mehrsegment-Rippenwellenleitern |
| US5749132A (en) * | 1995-08-30 | 1998-05-12 | Ramar Corporation | Method of fabrication an optical waveguide |
| US5834055A (en) * | 1995-08-30 | 1998-11-10 | Ramar Corporation | Guided wave device and method of fabrication thereof |
| US6282332B1 (en) | 1998-06-04 | 2001-08-28 | Pirelli Cavi E Sistemi S.P.A. | Waveguide structures in particular for use in acousto-optical mode converters and method for making same |
| JP2000137125A (ja) | 1998-06-04 | 2000-05-16 | Pirelli Cavi & Syst Spa | 拡散型光導波路構造を基板に製作する方法 |
| US12572079B2 (en) | 2021-11-16 | 2026-03-10 | Ii-Vi Delaware, Inc. | Optical devices and methods for manufacturing the optical devices |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4403827A (en) * | 1980-09-12 | 1983-09-13 | Mcdonnell Douglas Corporation | Process for producing a diffraction grating |
| GB2152688B (en) * | 1984-01-10 | 1987-09-09 | Gen Electric Co Plc | Velocity matching apparatus |
| US4598039A (en) * | 1984-07-02 | 1986-07-01 | At&T Bell Laboratories | Formation of features in optical material |
-
1985
- 1985-12-19 GB GB858531262A patent/GB8531262D0/en active Pending
-
1986
- 1986-12-03 DE DE8686309434T patent/DE3685015D1/de not_active Expired - Fee Related
- 1986-12-03 AT AT86309434T patent/ATE75324T1/de not_active IP Right Cessation
- 1986-12-03 EP EP86309434A patent/EP0230118B1/de not_active Expired - Lifetime
- 1986-12-16 CA CA000525512A patent/CA1271372A/en not_active Expired - Lifetime
- 1986-12-17 US US06/942,889 patent/US4851079A/en not_active Expired - Fee Related
- 1986-12-19 JP JP61303567A patent/JPS62168101A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE3685015D1 (de) | 1992-05-27 |
| CA1271372A (en) | 1990-07-10 |
| US4851079A (en) | 1989-07-25 |
| EP0230118A1 (de) | 1987-07-29 |
| JPS62168101A (ja) | 1987-07-24 |
| EP0230118B1 (de) | 1992-04-22 |
| GB8531262D0 (en) | 1986-01-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |