ATE88285T1 - Entschichtungsmittel und ihre anwendung zum entschichten von resistschichten von traegern. - Google Patents

Entschichtungsmittel und ihre anwendung zum entschichten von resistschichten von traegern.

Info

Publication number
ATE88285T1
ATE88285T1 AT87116317T AT87116317T ATE88285T1 AT E88285 T1 ATE88285 T1 AT E88285T1 AT 87116317 T AT87116317 T AT 87116317T AT 87116317 T AT87116317 T AT 87116317T AT E88285 T1 ATE88285 T1 AT E88285T1
Authority
AT
Austria
Prior art keywords
decoating
carrier
application
agents
resistant coatings
Prior art date
Application number
AT87116317T
Other languages
English (en)
Inventor
Hugh E Ramsden
Dawn L Ward
Original Assignee
Baker J T Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baker J T Inc filed Critical Baker J T Inc
Application granted granted Critical
Publication of ATE88285T1 publication Critical patent/ATE88285T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Polyethers (AREA)
  • Pyrrole Compounds (AREA)
  • Paints Or Removers (AREA)
AT87116317T 1986-11-10 1987-11-05 Entschichtungsmittel und ihre anwendung zum entschichten von resistschichten von traegern. ATE88285T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US92940886A 1986-11-10 1986-11-10
EP87116317A EP0267540B1 (de) 1986-11-10 1987-11-05 Entschichtungsmittel und ihre Anwendung zum Entschichten von Resistschichten von Trägern

Publications (1)

Publication Number Publication Date
ATE88285T1 true ATE88285T1 (de) 1993-04-15

Family

ID=25457818

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87116317T ATE88285T1 (de) 1986-11-10 1987-11-05 Entschichtungsmittel und ihre anwendung zum entschichten von resistschichten von traegern.

Country Status (10)

Country Link
EP (1) EP0267540B1 (de)
JP (1) JPS63186243A (de)
KR (1) KR950000238B1 (de)
AT (1) ATE88285T1 (de)
AU (1) AU594509B2 (de)
CA (1) CA1329037C (de)
DE (1) DE3785418T2 (de)
ES (1) ES2055697T3 (de)
IE (1) IE59971B1 (de)
IL (1) IL84388A (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806506A (en) * 1987-09-14 1989-02-21 E. I. Du Pont De Nemours And Company Process for detackifying photopolymer flexographic printing plates
JP2759462B2 (ja) * 1988-11-11 1998-05-28 ナガセ電子化学株式会社 水性剥離剤組成物
CA2209677A1 (en) * 1995-11-10 1997-05-15 Toshihiko Taniguchi A treating liquid for making a waterless planographic printing plate
US5909744A (en) * 1996-01-30 1999-06-08 Silicon Valley Chemlabs, Inc. Dibasic ester stripping composition
US6511547B1 (en) 1996-01-30 2003-01-28 Siliconvalley Chemlabs, Inc. Dibasic ester stripping composition
US5741368A (en) * 1996-01-30 1998-04-21 Silicon Valley Chemlabs Dibasic ester stripping composition
KR100335011B1 (ko) * 1999-08-19 2002-05-02 주식회사 동진쎄미켐 레지스트 제거용 조성물
JP4501248B2 (ja) * 2000-07-24 2010-07-14 東ソー株式会社 レジスト剥離剤
JP4501256B2 (ja) * 2000-08-22 2010-07-14 東ソー株式会社 レジスト剥離剤
TWI275903B (en) * 2001-03-13 2007-03-11 Nagase Chemtex Corp A composition for stripping photo resist
DE602005020499D1 (de) * 2004-12-10 2010-05-20 Mallinckrodt Baker Inc Wasserfreie nicht korrosive mikroelektronische reinigungsverbindungen mit polymerischen corrosionsinhibitoren
JP5236217B2 (ja) * 2006-06-22 2013-07-17 東進セミケム株式会社 レジスト除去用組成物
WO2010091045A2 (en) * 2009-02-05 2010-08-12 Advanced Technology Materials, Inc. Non-fluoride containing composition for the removal of polymers and other organic material from a surface
US8309502B2 (en) 2009-03-27 2012-11-13 Eastman Chemical Company Compositions and methods for removing organic substances
US8614053B2 (en) 2009-03-27 2013-12-24 Eastman Chemical Company Processess and compositions for removing substances from substrates
US8444768B2 (en) 2009-03-27 2013-05-21 Eastman Chemical Company Compositions and methods for removing organic substances
KR101089211B1 (ko) * 2010-12-02 2011-12-02 엘티씨 (주) 1차 알칸올 아민을 포함하는 ｌｃｄ 제조용 포토레지스트 박리액 조성물
US9029268B2 (en) 2012-11-21 2015-05-12 Dynaloy, Llc Process for etching metals

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4395479A (en) * 1981-09-23 1983-07-26 J. T. Baker Chemical Company Stripping compositions and methods of stripping resists
US4403029A (en) * 1982-09-02 1983-09-06 J. T. Baker Chemical Company Stripping compositions and methods of stripping resists
US4401747A (en) * 1982-09-02 1983-08-30 J. T. Baker Chemical Company Stripping compositions and methods of stripping resists
US4401748A (en) * 1982-09-07 1983-08-30 J. T. Baker Chemical Company Stripping compositions and methods of stripping resists
JPS6026945A (ja) * 1983-07-25 1985-02-09 ジエイ・テイ・ベ−カ−・ケミカル・カンパニ− ストリツピング組成物及びレジストをストリツピングする方法
JPS6026340A (ja) * 1983-07-25 1985-02-09 ジエイ　ティー　ベイカー　インコーポレーテッド ストリツピング組成物及びレジストをストリツピングする方法
JPS60131535A (ja) * 1983-12-20 1985-07-13 エッチエムシー・パテンツ・ホールディング・カンパニー・インコーポレーテッド ポジのホトレジスト用のストリツピング組成物

Also Published As

Publication number Publication date
EP0267540B1 (de) 1993-04-14
IE872341L (en) 1988-05-10
CA1329037C (en) 1994-05-03
JPH0468624B2 (de) 1992-11-02
AU594509B2 (en) 1990-03-08
IL84388A0 (en) 1988-04-29
EP0267540A3 (en) 1989-03-15
EP0267540A2 (de) 1988-05-18
KR950000238B1 (ko) 1995-01-12
DE3785418T2 (de) 1993-08-19
AU7909887A (en) 1988-05-12
ES2055697T3 (es) 1994-09-01
DE3785418D1 (de) 1993-05-19
IE59971B1 (en) 1994-05-04
KR880006572A (ko) 1988-07-23
JPS63186243A (ja) 1988-08-01
IL84388A (en) 1991-06-10

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
EEFA Change of the company name
EELA Cancelled due to lapse of time