ATE91531T1 - Mit einem zweistufigen refrigerator betriebene kryopumpe. - Google Patents

Mit einem zweistufigen refrigerator betriebene kryopumpe.

Info

Publication number: ATE91531T1
Authority: AT; Austria
Prior art keywords: baffle; cryopump; plates; powered; stage refrigerator
Prior art date: 1989-02-28

Application number

AT89103453T

Other languages

English (en)

Inventor

Ulrich Dr Haefner

Original Assignee

Leybold Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-02-28

Filing date

1989-02-28

Publication date

1993-07-15

1989-02-28 Application filed by Leybold Ag filed Critical Leybold Ag

1993-07-15 Application granted granted Critical

1993-07-15 Publication of ATE91531T1 publication Critical patent/ATE91531T1/de

Links

230000005494 condensation Effects 0.000 abstract 1
238000009833 condensation Methods 0.000 abstract 1
238000005086 pumping Methods 0.000 abstract 1
238000001179 sorption measurement Methods 0.000 abstract 1

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

AT89103453T 1989-02-28 1989-02-28 Mit einem zweistufigen refrigerator betriebene kryopumpe. ATE91531T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
EP89103453A EP0384922B1 (de)	1989-02-28	1989-02-28	Mit einem zweistufigen Refrigerator betriebene Kryopumpe

Publications (1)

Publication Number	Publication Date
ATE91531T1 true ATE91531T1 (de)	1993-07-15

Family

ID=8201020

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT89103453T ATE91531T1 (de)	1989-02-28	1989-02-28	Mit einem zweistufigen refrigerator betriebene kryopumpe.

Country Status (5)

Country	Link
US (1)	US5000007A (de)
EP (1)	EP0384922B1 (de)
JP (1)	JP2731276B2 (de)
AT (1)	ATE91531T1 (de)
DE (1)	DE58904918D1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5301511A (en) *	1992-06-12	1994-04-12	Helix Technology Corporation	Cryopump and cryopanel having frost concentrating device
WO1994000212A1 (en) *	1992-06-24	1994-01-06	Extek Cryogenics Inc.	Cryopump
CA2367818C (en) *	2001-01-18	2010-05-11	Electric Power Research Institute, Inc.	Method and apparatus for renewable mercury sorption
CA2381610C (en) *	2001-04-16	2010-07-06	Electric Power Research Institute, Inc.	Method and apparatus for removing vapor phase contaminants from a flue gas stream
US6905534B2 (en) *	2001-04-16	2005-06-14	Electric Power Research Institute, Inc.	Method and apparatus for removing vapor phase contaminants from a flue gas stream
US20050274128A1 (en) *	2004-06-10	2005-12-15	Genesis	Cryopump with enhanced hydrogen pumping
US7313922B2 (en) *	2004-09-24	2008-01-01	Brooks Automation, Inc.	High conductance cryopump for type III gas pumping
US7981199B2 (en) *	2005-12-19	2011-07-19	Behr Gmbh & Co. Kg	Sorber heat exchanger wall and sorber heat exchanger
JP2010196632A (ja) *	2009-02-26	2010-09-09	Sumitomo Heavy Ind Ltd	クライオポンプ
CH703216A1 (de) *	2010-05-27	2011-11-30	Hsr Ag	Vorrichtung zur Verhinderung des Memory-Effekts bei Kryopumpen.
US20130008189A1 (en) *	2011-05-12	2013-01-10	Sumitomo Heavy Industries, Ltd.	Cryopump and Method of Manufacturing the Same
JP5398780B2 (ja) *	2011-05-12	2014-01-29	住友重機械工業株式会社	クライオポンプ
CN103742389B (zh) *	2013-10-18	2015-12-23	石狮市台瑞精密机械有限公司	一种真空低温泵中的组合冷板
US10145371B2 (en) *	2013-10-22	2018-12-04	Taiwan Semiconductor Manufacturing Co., Ltd.	Ultra high vacuum cryogenic pumping apparatus with nanostructure material
CA2979870C (en) *	2015-05-15	2019-12-03	Exxonmobil Upstream Research Company	Apparatus and system for swing adsorption processes related thereto
JP6871751B2 (ja) *	2017-02-07	2021-05-12	住友重機械工業株式会社	クライオポンプ
JP2018127943A (ja) *	2017-02-08	2018-08-16	住友重機械工業株式会社	クライオポンプ
CN207111346U (zh) *	2017-07-03	2018-03-16	京东方科技集团股份有限公司	低温泵
US20240337265A1 (en) *	2023-04-06	2024-10-10	Taiwan Semiconductor Manufacturing Company, Ltd.	Cryogenic pump for semiconductor processing
US20260028975A1 (en) *	2024-07-29	2026-01-29	Applied Materials, Inc.	Protective coatings for cryogenic pump components in process chambers

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH628959A5 (en) *	1978-04-18	1982-03-31	Balzers Hochvakuum	Cryopump with a fitted refrigerating machine
US4212170A (en) *	1979-04-16	1980-07-15	Oerlikon Buhrle USA Incorporated	Cryopump
US4295338A (en) *	1979-10-18	1981-10-20	Varian Associates, Inc.	Cryogenic pumping apparatus with replaceable pumping surface elements
US4546613A (en) *	1983-04-04	1985-10-15	Helix Technology Corporation	Cryopump with rapid cooldown and increased pressure
US4530213A (en) *	1983-06-28	1985-07-23	Air Products And Chemicals, Inc.	Economical and thermally efficient cryopump panel and panel array
US4555907A (en) *	1984-05-18	1985-12-03	Helix Technology Corporation	Cryopump with improved second stage array
IT1201263B (it) *	1985-03-26	1989-01-27	Galileo Spa Off	Pompa criogenica a refrigeratore con geometria degli scherma atta a raggiungere elevata efficienza e durata prolungata
US4718241A (en) *	1985-10-31	1988-01-12	Helix Technology Corporation	Cryopump with quicker adsorption
JPH07100963B2 (ja) *	1985-12-26	1995-11-01	清水建設株式会社	コンクリ−ト補強部材
JPS6430745A (en) *	1987-07-10	1989-02-01	Iton Ag	Multiplayer board consisting of aerated concrete and manufacture thereof
JPH01150532A (ja) *	1987-12-08	1989-06-13	Kenji Tsunoda	多軸方向に補強された補強芯地を有する加工製品
JPH01229852A (ja) *	1988-03-02	1989-09-13	Toray Ind Inc	複合材料用補強基材
US4873833A (en) *	1988-11-23	1989-10-17	American Telephone Telegraph Company, At&T Bell Laboratories	Apparatus comprising a high-vacuum chamber

1989
- 1989-02-28 EP EP89103453A patent/EP0384922B1/de not_active Expired - Lifetime
- 1989-02-28 DE DE8989103453T patent/DE58904918D1/de not_active Expired - Fee Related
- 1989-02-28 AT AT89103453T patent/ATE91531T1/de not_active IP Right Cessation
1990
- 1990-02-26 JP JP2042734A patent/JP2731276B2/ja not_active Expired - Lifetime
- 1990-02-27 US US07/485,639 patent/US5000007A/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0384922A1 (de)	1990-09-05
JP2731276B2 (ja)	1998-03-25
US5000007A (en)	1991-03-19
DE58904918D1 (de)	1993-08-19
JPH03981A (ja)	1991-01-07
EP0384922B1 (de)	1993-07-14

Legal Events

Date	Code	Title	Description
1995-05-15	REN	Ceased due to non-payment of the annual fee

Publication	Publication Date	Title
ATE91531T1 (de)	1993-07-15	Mit einem zweistufigen refrigerator betriebene kryopumpe.
DE69104093D1 (de)	1994-10-27	Klimaanlagekompressor.
DE3862773D1 (de)	1991-06-20	Taumelscheibenverdichter.
DE69208335D1 (de)	1996-03-28	Filtersektor
DE59003512D1 (de)	1993-12-23	Hochdruckentladungslampe.
NL191524C (nl)	1995-08-21	Projectiescherm met omsluitende kast.
DE69009358D1 (de)	1994-07-07	Hochdruckentladungslampe.
DE59007201D1 (de)	1994-10-27	Hochdruckentladungslampe.
ATE71219T1 (de)	1992-01-15	Behaelter fuer metallische oder metallisierte blaettchen zur verwendung als elektromagnetischer taeuschreflektor.
DE68918290D1 (de)	1994-10-20	Taumelscheibenkompressor.
DE69203193D1 (de)	1995-08-03	Gasverdichter mit volumenänderndem schädlichem Raum.
DE69205380D1 (de)	1995-11-16	Taumelscheibenkühlungsverdichter.
DE69102671D1 (de)	1994-08-04	Taumelscheibenverdichter.
DE68914290D1 (de)	1994-05-05	Verdichterkühlanlage mit ölabtrennanordnung.
DE69201339D1 (de)	1995-03-16	Metalldampfentladungslampe.
KR920007711U (ko)	1992-05-19	사판식 압축기
ATE152820T1 (de)	1997-05-15	Leuchtenabdeckung, insbesondere für leuchtstofflampen
DE69104866D1 (de)	1994-12-08	Metalldampfentladungslampe.
DE59204034D1 (de)	1995-11-23	Baugruppe aus mehreren, in parallelen Ebenen angeordneten Montageplatten.
DE69015731D1 (de)	1995-02-16	Gasentladungstafel.
DE60031543D1 (de)	2006-12-07	Mikrowellenabsorberwand
ATA173582A (de)	1984-12-15	Kolbenverdichter
DE69207683D1 (de)	1996-02-29	Taumelscheibenverdichter
DE69014080D1 (de)	1994-12-15	Hochdruckentladungslampe.
TH31034S (th)	1998-11-30	ปืนอัดสารผนึก