AU6493096A - Laser-induced metallic plasma for con-contact inspection - Google Patents

Laser-induced metallic plasma for con-contact inspection

Info

Publication number
AU6493096A
AU6493096A AU64930/96A AU6493096A AU6493096A AU 6493096 A AU6493096 A AU 6493096A AU 64930/96 A AU64930/96 A AU 64930/96A AU 6493096 A AU6493096 A AU 6493096A AU 6493096 A AU6493096 A AU 6493096A
Authority
AU
Australia
Prior art keywords
con
laser
contact inspection
metallic plasma
induced metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU64930/96A
Other languages
English (en)
Inventor
David Banitt
Moshe Ben Shlomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EXSIGHT ELECTRO OPTICAL SYSTEMS Ltd
Original Assignee
Exsight Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Exsight Ltd filed Critical Exsight Ltd
Publication of AU6493096A publication Critical patent/AU6493096A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AU64930/96A 1995-07-12 1996-07-11 Laser-induced metallic plasma for con-contact inspection Abandoned AU6493096A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/501,685 US5587664A (en) 1995-07-12 1995-07-12 Laser-induced metallic plasma for non-contact inspection
PCT/US1996/011698 WO1997003365A2 (en) 1995-07-12 1996-07-11 Laser-induced metallic plasma for con-contact inspection

Publications (1)

Publication Number Publication Date
AU6493096A true AU6493096A (en) 1997-02-10

Family

ID=23994608

Family Applications (1)

Application Number Title Priority Date Filing Date
AU64930/96A Abandoned AU6493096A (en) 1995-07-12 1996-07-11 Laser-induced metallic plasma for con-contact inspection

Country Status (5)

Country Link
US (1) US5587664A (2)
EP (1) EP0882237A2 (2)
KR (1) KR19990028830A (2)
AU (1) AU6493096A (2)
WO (1) WO1997003365A2 (2)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07140209A (ja) * 1993-09-20 1995-06-02 Fujitsu Ltd 回路配線基板の検査装置およびその検査方法
IL122654A0 (en) * 1997-12-18 1998-08-16 Exsight Electro Optical System Method and apparatus for guiding electric current
US6020747A (en) * 1998-01-26 2000-02-01 Bahns; John T. Electrical contact probe
WO1999056137A1 (en) * 1998-04-27 1999-11-04 Exsight Electro-Optical Systems Ltd. Method and apparatus for testing interconnect networks
AU1503499A (en) * 1998-04-27 1999-11-16 Exsight Electro Optical Systems Ltd. Method and apparatus for testing interconnect networks using guided electric currents
US6268719B1 (en) * 1998-09-23 2001-07-31 Delaware Capital Formation, Inc. Printed circuit board test apparatus
US6788078B2 (en) * 2001-11-16 2004-09-07 Delaware Capital Formation, Inc. Apparatus for scan testing printed circuit boards
JP2007524802A (ja) * 2003-11-12 2007-08-30 インターナショナル・ビジネス・マシーンズ・コーポレーション 電気的検証のためのイオン化試験
WO2013012616A2 (en) 2011-07-15 2013-01-24 Orbotech Ltd. Electrical inspection of electronic devices using electron-beam induced plasma probes
ES2989689T3 (es) * 2015-03-12 2024-11-27 Limacorporate Spa Método de control de calidad para regular la operación de un aparato electromecánico, por ejemplo, un aparato de EBM, con el fin de obtener productos procesados certificados

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4246793A (en) * 1979-02-08 1981-01-27 Battelle Development Corporation Nondestructive testing
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
US4415851A (en) * 1981-05-26 1983-11-15 International Business Machines Corporation System for contactless testing of multi-layer ceramics
US4507605A (en) * 1982-05-17 1985-03-26 Testamatic, Incorporated Method and apparatus for electrical and optical inspection and testing of unpopulated printed circuit boards and other like items
DE3231598A1 (de) * 1982-08-25 1984-03-01 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur elektrischen pruefung von mikroverdrahtungen
US4985681A (en) * 1985-01-18 1991-01-15 Siemens Aktiengesellschaft Particle beam measuring method for non-contact testing of interconnect networks
EP0216135B1 (de) * 1985-09-04 1990-05-09 Siemens Aktiengesellschaft Vorrichtung für die elektrische Funktionsprüfung von Verdrahtungsfeldern, insbesondere von Leiterplatten
DE3671106D1 (de) * 1985-09-04 1990-06-13 Siemens Ag Vorrichtung fuer die elektrische funktionspruefung von verdrahtungsfeldern, insbesondere von leiterplatten.
US4845425A (en) * 1985-09-23 1989-07-04 International Business Machines Corporation Full chip integrated circuit tester
US4703260A (en) * 1985-09-23 1987-10-27 International Business Machines Corporation Full chip integrated circuit tester
US4771230A (en) * 1986-10-02 1988-09-13 Testamatic Corporation Electro-luminescent method and testing system for unpopulated printed circuit boards, ceramic substrates, and the like having both electrical and electro-optical read-out
EP0264482B1 (en) * 1986-10-23 1991-12-18 International Business Machines Corporation Method for contactless testing of integrated circuit packaging boards under atmospheric conditions
EP0264481B1 (en) * 1986-10-23 1992-05-13 International Business Machines Corporation Testing method for integrated circuit packaging boards using a laser in vacuum
US4843330A (en) * 1986-10-30 1989-06-27 International Business Machines Corporation Electron beam contactless testing system with grid bias switching
EP0285798A3 (de) * 1987-03-31 1990-03-07 Siemens Aktiengesellschaft Vorrichtung für die elektrische Funktionsprüfung von Verdrahtungsfeldern, insbesondere von Leiterplatten
EP0322607B1 (de) * 1987-12-21 1994-04-06 Siemens Aktiengesellschaft Ansteuereinrichtung für die Vorrichtung zur elektrischen Funktionsprüfung von Verdrahtungsfeldern
US5032788A (en) * 1989-06-26 1991-07-16 Digital Equipment Corp. Test cell for non-contact opens/shorts testing of electrical circuits
US4970461A (en) * 1989-06-26 1990-11-13 Lepage Andrew J Method and apparatus for non-contact opens/shorts testing of electrical circuits
US5017863A (en) * 1989-10-20 1991-05-21 Digital Equipment Corporation Electro-emissive laser stimulated test
US5179279A (en) * 1991-01-25 1993-01-12 Rensselaer Polytechnic Institute Non-contact electrical pathway
US5202623A (en) * 1992-02-26 1993-04-13 Digital Equipment Corporation Laser-activated plasma chamber for non-contact testing
JPH07140209A (ja) * 1993-09-20 1995-06-02 Fujitsu Ltd 回路配線基板の検査装置およびその検査方法

Also Published As

Publication number Publication date
KR19990028830A (ko) 1999-04-15
WO1997003365A3 (en) 1997-04-10
WO1997003365A2 (en) 1997-01-30
EP0882237A2 (en) 1998-12-09
US5587664A (en) 1996-12-24
EP0882237A4 (2) 1998-12-09

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