BE756729A - Procede de production de dispositifs a - Google Patents

Procede de production de dispositifs a

Info

Publication number
BE756729A
BE756729A BE756729DA BE756729A BE 756729 A BE756729 A BE 756729A BE 756729D A BE756729D A BE 756729DA BE 756729 A BE756729 A BE 756729A
Authority
BE
Belgium
Prior art keywords
production process
device production
production
Prior art date
Application number
Other languages
English (en)
Original Assignee
Soc Gen Semiconduttori Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE756729A publication Critical patent/BE756729A/fr

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
BE756729D 1969-10-04 Procede de production de dispositifs a BE756729A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT5358869 1969-10-04

Publications (1)

Publication Number Publication Date
BE756729A true BE756729A (fr) 1971-03-01

Family

ID=11283893

Family Applications (1)

Application Number Title Priority Date Filing Date
BE756729D BE756729A (fr) 1969-10-04 Procede de production de dispositifs a

Country Status (5)

Country Link
BE (1) BE756729A (fr)
DE (1) DE2046872A1 (fr)
FR (1) FR2064138A1 (fr)
IL (1) IL35376A0 (fr)
NL (1) NL7014087A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2824026A1 (de) * 1978-06-01 1979-12-20 Licentia Gmbh Verfahren zum herstellen eines sperrschicht-feldeffekttransistors

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3940288A (en) 1973-05-16 1976-02-24 Fujitsu Limited Method of making a semiconductor device
US4544443A (en) * 1983-05-13 1985-10-01 Shap Kabushiki Kaisha Method for manufacturing an optical memory element

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1614829C3 (de) * 1967-06-22 1974-04-04 Telefunken Patentverwertungs Gmbh, 7900 Ulm Verfahren zum Herstellen eines Halbleiterbauelementes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2824026A1 (de) * 1978-06-01 1979-12-20 Licentia Gmbh Verfahren zum herstellen eines sperrschicht-feldeffekttransistors

Also Published As

Publication number Publication date
FR2064138B1 (fr) 1974-06-21
DE2046872A1 (de) 1971-05-19
NL7014087A (fr) 1971-04-06
IL35376A0 (en) 1970-11-30
FR2064138A1 (en) 1971-07-16

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