BE839043A - Ellipsometre compensateur rotatif - Google Patents

Ellipsometre compensateur rotatif

Info

Publication number
BE839043A
BE839043A BE164736A BE164736A BE839043A BE 839043 A BE839043 A BE 839043A BE 164736 A BE164736 A BE 164736A BE 164736 A BE164736 A BE 164736A BE 839043 A BE839043 A BE 839043A
Authority
BE
Belgium
Prior art keywords
rotary compensator
compensator ellipsometer
ellipsometer
rotary
compensator
Prior art date
Application number
BE164736A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/572,476 external-priority patent/US4053232A/en
Application filed filed Critical
Publication of BE839043A publication Critical patent/BE839043A/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
BE164736A 1975-04-28 1976-02-27 Ellipsometre compensateur rotatif BE839043A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/572,476 US4053232A (en) 1973-06-25 1975-04-28 Rotating-compensator ellipsometer

Publications (1)

Publication Number Publication Date
BE839043A true BE839043A (fr) 1976-06-16

Family

ID=24287979

Family Applications (1)

Application Number Title Priority Date Filing Date
BE164736A BE839043A (fr) 1975-04-28 1976-02-27 Ellipsometre compensateur rotatif

Country Status (8)

Country Link
JP (1) JPS6042901B2 (fr)
BE (1) BE839043A (fr)
CA (1) CA1048806A (fr)
DE (1) DE2616141A1 (fr)
FR (1) FR2309860A1 (fr)
GB (1) GB1493087A (fr)
IT (1) IT1064176B (fr)
NL (1) NL7603931A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526471A (en) * 1982-06-17 1985-07-02 Bykov Anatoly P Method for sensing spatial coordinate of article point and apparatus therefor
JPS5930004A (ja) * 1982-08-09 1984-02-17 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 膜厚測定装置
JPS59182324A (ja) * 1983-03-31 1984-10-17 Horiba Ltd 旋光計
NO850157L (no) * 1984-01-16 1985-10-23 Barringer Research Ltd Fremgangsmaate og apparat til paavisning av hydrokarboner paa en vannflate.
JPH0820358B2 (ja) * 1986-03-03 1996-03-04 オリンパス光学工業株式会社 光学的記録媒体用基盤の屈折率の測定装置
DE3708148A1 (de) * 1987-03-11 1987-10-15 Michael Linder Verfahren und vorrichtung zur ellipsometrischen messung
JPS6428509A (en) * 1987-07-23 1989-01-31 Nippon Kokan Kk Apparatus for measuring thickness of film
DE29802464U1 (de) * 1997-03-25 1998-06-04 Schmekel, Björn, 95463 Bindlach Vorrichtung zur Messung des Brechungsindex
US9046474B2 (en) * 2011-07-07 2015-06-02 Kla-Tencor Corporation Multi-analyzer angle spectroscopic ellipsometry

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1422426A (en) * 1973-06-22 1976-01-28 Penny Turbines Ltd Noel Compressor rotor

Also Published As

Publication number Publication date
DE2616141A1 (de) 1976-11-11
JPS6042901B2 (ja) 1985-09-25
FR2309860B1 (fr) 1979-04-20
FR2309860A1 (fr) 1976-11-26
IT1064176B (it) 1985-02-18
JPS51131655A (en) 1976-11-16
CA1048806A (fr) 1979-02-20
NL7603931A (nl) 1976-11-01
GB1493087A (en) 1977-11-23

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: INTERNATIONAL BUSINESS MACHINES CORP.

Effective date: 19840227