CA1048806A - Ellipsometre a compensation de rotation - Google Patents

Ellipsometre a compensation de rotation

Info

Publication number: CA1048806A
Authority: CA; Canada
Prior art keywords: delta; rotating; sample; reflected; light beam
Prior art date: 1975-04-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA76250134A

Other languages

English (en)

Inventor

Peter S. Hauge

Frederick H. Dill

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

International Business Machines Corp

Original Assignee

International Business Machines Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-04-28

Filing date

1976-04-13

Publication date

1979-02-20

1975-04-28 Priority claimed from US05/572,476 external-priority patent/US4053232A/en

1976-04-13 Application filed by International Business Machines Corp filed Critical International Business Machines Corp

1979-02-20 Application granted granted Critical

1979-02-20 Publication of CA1048806A publication Critical patent/CA1048806A/fr

Status Expired legal-status Critical Current

Links

230000010287 polarization Effects 0.000 claims abstract description 14
238000000034 method Methods 0.000 claims description 15
230000003287 optical effect Effects 0.000 claims description 12
230000006872 improvement Effects 0.000 claims description 6
238000005259 measurement Methods 0.000 abstract description 15
238000004458 analytical method Methods 0.000 description 9
239000000306 component Substances 0.000 description 8
238000000572 ellipsometry Methods 0.000 description 7
238000010586 diagram Methods 0.000 description 6
230000000694 effects Effects 0.000 description 3
238000013459 approach Methods 0.000 description 2
230000008901 benefit Effects 0.000 description 2
238000009987 spinning Methods 0.000 description 2
229920000535 Tan II Polymers 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
230000008859 change Effects 0.000 description 1
230000000295 complement effect Effects 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000007405 data analysis Methods 0.000 description 1
230000014509 gene expression Effects 0.000 description 1
238000007689 inspection Methods 0.000 description 1
238000009434 installation Methods 0.000 description 1
238000013208 measuring procedure Methods 0.000 description 1
229920000136 polysorbate Polymers 0.000 description 1
230000008569 process Effects 0.000 description 1
238000012546 transfer Methods 0.000 description 1
238000002834 transmittance Methods 0.000 description 1
230000000007 visual effect Effects 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
- G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Biochemistry (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Health & Medical Sciences (AREA)
General Health & Medical Sciences (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)
Length Measuring Devices By Optical Means (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)
Transmission And Conversion Of Sensor Element Output (AREA)

CA76250134A 1975-04-28 1976-04-13 Ellipsometre a compensation de rotation Expired CA1048806A (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US05/572,476 US4053232A (en)	1973-06-25	1975-04-28	Rotating-compensator ellipsometer

Publications (1)

Publication Number	Publication Date
CA1048806A true CA1048806A (fr)	1979-02-20

Family

ID=24287979

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA76250134A Expired CA1048806A (fr)	1975-04-28	1976-04-13	Ellipsometre a compensation de rotation

Country Status (8)

Country	Link
JP (1)	JPS6042901B2 (fr)
BE (1)	BE839043A (fr)
CA (1)	CA1048806A (fr)
DE (1)	DE2616141A1 (fr)
FR (1)	FR2309860A1 (fr)
GB (1)	GB1493087A (fr)
IT (1)	IT1064176B (fr)
NL (1)	NL7603931A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4526471A (en) *	1982-06-17	1985-07-02	Bykov Anatoly P	Method for sensing spatial coordinate of article point and apparatus therefor
JPS5930004A (ja) *	1982-08-09	1984-02-17	インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン	膜厚測定装置
JPS59182324A (ja) *	1983-03-31	1984-10-17	Horiba Ltd	旋光計
NO850157L (no) *	1984-01-16	1985-10-23	Barringer Research Ltd	Fremgangsmaate og apparat til paavisning av hydrokarboner paa en vannflate.
JPH0820358B2 (ja) *	1986-03-03	1996-03-04	オリンパス光学工業株式会社	光学的記録媒体用基盤の屈折率の測定装置
DE3708148A1 (de) *	1987-03-11	1987-10-15	Michael Linder	Verfahren und vorrichtung zur ellipsometrischen messung
JPS6428509A (en) *	1987-07-23	1989-01-31	Nippon Kokan Kk	Apparatus for measuring thickness of film
DE19805853B4 (de) *	1997-03-25	2004-03-11	Schmekel, Björn	Verfahren und Vorrichtung zur Messung des Brechungsindex und/oder der Lichtstrahlwinkel an einer Mediumgrenze
CN104169709B (zh) *	2011-07-07	2018-05-01	科磊股份有限公司	多分析器角度的光谱椭圆偏光仪

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1422426A (en) *	1973-06-22	1976-01-28	Penny Turbines Ltd Noel	Compressor rotor

1976
- 1976-01-21 GB GB225176A patent/GB1493087A/en not_active Expired
- 1976-02-17 FR FR7605148A patent/FR2309860A1/fr active Granted
- 1976-02-27 BE BE164736A patent/BE839043A/fr not_active IP Right Cessation
- 1976-03-23 IT IT2145776A patent/IT1064176B/it active
- 1976-04-07 JP JP51038338A patent/JPS6042901B2/ja not_active Expired
- 1976-04-13 CA CA76250134A patent/CA1048806A/fr not_active Expired
- 1976-04-13 DE DE19762616141 patent/DE2616141A1/de not_active Withdrawn
- 1976-04-14 NL NL7603931A patent/NL7603931A/xx unknown

Also Published As

Publication number	Publication date
FR2309860B1 (fr)	1979-04-20
JPS51131655A (en)	1976-11-16
NL7603931A (nl)	1976-11-01
IT1064176B (it)	1985-02-18
FR2309860A1 (fr)	1976-11-26
JPS6042901B2 (ja)	1985-09-25
GB1493087A (en)	1977-11-23
DE2616141A1 (de)	1976-11-11
BE839043A (fr)	1976-06-16

Publication	Publication Date	Title
US4053232A (en)	1977-10-11	Rotating-compensator ellipsometer
Cahan et al.	1969	A high speed precision automatic ellipsometer
US4647207A (en)	1987-03-03	Ellipsometric method and apparatus
Hauge et al.	1975	A rotating-compensator Fourier ellipsometer
JP3791975B2 (ja)	2006-06-28	ホモダイン干渉受信計及びその受信法
US4653924A (en)	1987-03-31	Rotating analyzer type ellipsometer
US5956145A (en)	1999-09-21	System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems
Acher et al.	1989	Improvements of phase‐modulated ellipsometry
US3985447A (en)	1976-10-12	Measurement of thin films by polarized light
US3880524A (en)	1975-04-29	Automatic ellipsometer
US5956147A (en)	1999-09-21	Two modulator generalized ellipsometer for complete mueller matrix measurement
JPS60242308A (ja)	1985-12-02	薄いサンプルの厚さの測定方法及びその装置並びに薄いサンプルの特性の測定方法及びその装置
US6473181B1 (en)	2002-10-29	Measurement of waveplate retardation using a photoelastic modulator
CA1048806A (fr)	1979-02-20	Ellipsometre a compensation de rotation
EP0737856B1 (fr)	2010-04-28	Procédé pour examiner des échantillons à partir d'un changement de polarisation
JPH0815130A (ja)	1996-01-19	フーリエ変換分光位相変調偏光解析法
JP2003516533A (ja)	2003-05-13	偏光解析装置及び偏光解析方法
Azzam	1977	NIRSE: Normal-incidence rotating-sample ellipsometer
JPH0131131B2 (fr)	1989-06-23
JP7041015B2 (ja)	2022-03-23	電場ベクトル計測の校正方法
US7342661B2 (en)	2008-03-11	Method for noise improvement in ellipsometers
JPH1038694A (ja)	1998-02-13	エリプソメーター
Oakberg	1997	Measurement of low-level strain retardation in optical materials
JP3537732B2 (ja)	2004-06-14	電圧制御液晶リターダーを用いるエリプソメーター
JPH112567A (ja)	1999-01-06	エリプソメータ