BE853997A - Procede de depot de silicium polycristallin - Google Patents

Procede de depot de silicium polycristallin

Info

Publication number: BE853997A
Authority: BE; Belgium
Prior art keywords: polycrystalline silicon; deposit process; silicon deposit; polycrystalline; silicon
Prior art date: 1976-04-27

Application number

BE177052A

Other languages

English (en)

Original Assignee

Wacker Chemitronic

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-04-27

Filing date

1977-04-27

Publication date

1977-10-27

1977-04-27 Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic

1977-10-27 Publication of BE853997A publication Critical patent/BE853997A/fr

Links

229910021420 polycrystalline silicon Inorganic materials 0.000 title 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

Chemical & Material Sciences (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Silicon Compounds (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Chemical Vapour Deposition (AREA)

BE177052A 1976-04-27 1977-04-27 Procede de depot de silicium polycristallin BE853997A (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE19762618273 DE2618273C3 (de)	1976-04-27	1976-04-27	Verfahren zur Abscheidung von polykristallinem Silicium

Publications (1)

Publication Number	Publication Date
BE853997A true BE853997A (fr)	1977-10-27

Family

ID=5976298

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BE177052A BE853997A (fr)	1976-04-27	1977-04-27	Procede de depot de silicium polycristallin

Country Status (9)

Country	Link
JP (1)	JPS52155142A (fr)
BE (1)	BE853997A (fr)
CA (1)	CA1092905A (fr)
DE (1)	DE2618273C3 (fr)
FR (1)	FR2361304A1 (fr)
GB (1)	GB1569651A (fr)
IT (1)	IT1086646B (fr)
NL (1)	NL7702613A (fr)
SE (1)	SE7704805L (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5354580A (en) *	1993-06-08	1994-10-11	Cvd Incorporated	Triangular deposition chamber for a vapor deposition system
US20080206970A1 (en) *	2005-04-10	2008-08-28	Franz Hugo	Production Of Polycrystalline Silicon

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR1391792A (fr) *	1962-12-19	1965-03-12	Thomson Houston Comp Francaise	Perfectionnements aux procédés de formation d'un matériau en feuilles, notamment pour feuilles de graphite pyrolytique
DE1272801B (de) *	1965-07-14	1968-07-11	Hitco Cardena	Verfahren zur Verkohlung von faserigem Zellulosematerial
DE2022025C3 (de) *	1970-05-05	1980-03-20	Siemens Ag, 1000 Berlin Und 8000 Muenchen	Vorrichtung zum Herstellen eines Hohlkörpers aus Halbleitermaterial
GB1292534A (en) *	1970-06-04	1972-10-11	Pfizer	Method for making a continuous film of pyrolytic graphite having bi-directional reinforcing properties
DE2229229A1 (de) *	1972-06-15	1974-01-10	Siemens Ag	Verfahren zum herstellen von aus silizium oder siliziumcarbid bestehenden formkoerpern

1976
- 1976-04-27 DE DE19762618273 patent/DE2618273C3/de not_active Expired
1977
- 1977-03-08 CA CA273,378A patent/CA1092905A/fr not_active Expired
- 1977-03-10 NL NL7702613A patent/NL7702613A/xx not_active Application Discontinuation
- 1977-04-22 IT IT4907877A patent/IT1086646B/it active
- 1977-04-25 GB GB1708777A patent/GB1569651A/en not_active Expired
- 1977-04-26 SE SE7704805A patent/SE7704805L/ not_active Application Discontinuation
- 1977-04-27 BE BE177052A patent/BE853997A/fr not_active IP Right Cessation
- 1977-04-27 FR FR7712732A patent/FR2361304A1/fr active Granted
- 1977-04-27 JP JP4899777A patent/JPS52155142A/ja active Granted

Also Published As

Publication number	Publication date
FR2361304B1 (fr)	1981-01-09
DE2618273A1 (de)	1977-11-03
DE2618273C3 (de)	1984-04-19
CA1092905A (fr)	1981-01-06
FR2361304A1 (fr)	1978-03-10
SE7704805L (sv)	1977-10-28
IT1086646B (it)	1985-05-28
DE2618273B2 (de)	1978-11-09
NL7702613A (nl)	1977-10-31
JPS52155142A (en)	1977-12-23
JPS5635604B2 (fr)	1981-08-18
GB1569651A (en)	1980-06-18

Similar Documents

Publication	Publication Date	Title
BE855273A (fr)	1977-12-01	Procede de preparation de polyurethannes
BE857854A (fr)	1978-02-17	Procede de preparation de polyurethanne-urees
NO146065C (no)	1982-07-21	Vakuumanlegg for fjerning av vann
IT1077516B (it)	1985-05-04	Dispositivo di supporto di substrati girevole atto ad essere impiegato ne vuoto
BE879913A (fr)	1980-05-08	Procede de purification de silicium
FR2433479B1 (fr)	1985-10-18	Procede de production de silicium polycristallin
NO782495L (no)	1979-01-23	Anordning for fjerning av avkutt
BE856201A (fr)	1977-12-28	Procede de revetement
BE864856A (fr)	1978-09-14	Procede de determination immunologique
FR2341533A1 (fr)	1977-09-16	Procede de frittage de ceramiques
IT1079704B (it)	1985-05-13	Processo per purificare silicio
FR2329344A1 (fr)	1977-05-27	Procede de croissance de monocristaux semiconducteurs
BE852414A (fr)	1977-07-01	Procede de purification
BE867204A (fr)	1978-11-20	Procede de purification du silicium
ES257693Y (es)	1982-05-01	Deposito de sedimentacion
BE858704A (fr)	1978-03-15	Procede de fabrication de nitrures de silicium modifies
BE860488A (fr)	1978-03-01	Procede de revetement des metaux
SE7704173L (sv)	1977-10-20	Metallavsettning
BE851106A (fr)	1977-05-31	Procede de preparation de revetements
BE846373A (fr)	1977-01-17	Procede de formation de revetements
TR19472A (tr)	1979-03-26	Cam borulardan kaplar imaline mahsus makine
BE859017A (fr)	1978-03-23	Procede de production de silane
FR2342098A1 (fr)	1977-09-23	Procede pour la croissance selective de silicium microcristallin
NL7703799A (nl)	1977-11-15	Werkwijze ter bereiding van zeer zuiver silicium.
FR2326262A1 (fr)	1977-04-29	Procede de formation d'articles en carbure de silicium

Legal Events

Date

Code

Title

Description

1988-10-31

RE

Patent lapsed

Owner name: WACKER-CHEMITRONIC GESELLSCHAFT FUR ELEKTRONIK-GR

Effective date: 19880430