BR0016782A - Processo de deposição de vapor quìmico e revestimentos produzidos a partir deste - Google Patents

Processo de deposição de vapor quìmico e revestimentos produzidos a partir deste

Info

Publication number
BR0016782A
BR0016782A BR0016782-7A BR0016782A BR0016782A BR 0016782 A BR0016782 A BR 0016782A BR 0016782 A BR0016782 A BR 0016782A BR 0016782 A BR0016782 A BR 0016782A
Authority
BR
Brazil
Prior art keywords
chemical vapor
coatings
disclosed
vapor deposition
deposition process
Prior art date
Application number
BR0016782-7A
Other languages
English (en)
Inventor
Andrew Hunt
Girish Deshpande
Jan Tzyy-Jiuan Hwang
Nii Sowa Laye
Miodrag Oljaca
Subramaniam Shanmugham
Shara S Shoup
Trifon Tomov
William J Dalzell Jr
Aimee Poda
Michelle Hendrick
Original Assignee
Microcoating Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microcoating Technologies filed Critical Microcoating Technologies
Publication of BR0016782A publication Critical patent/BR0016782A/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Laminated Bodies (AREA)

Abstract

"PROCESSO DE DEPOSIçãO DE VAPOR QUìMICO E REVESTIMENTOS PRODUZIDOS A PARTIR DESTE". São revelados um processo de deposição de vapor químico modificado (CVD) e vários revestimentos formados por este processo. Um revestimento uniforme é obtido pelo processo de CVD revelado por redirecionamento da fonte de energia e/ou os gases quentes produzidos desta maneira. Os processos revelados são especificamente úteis para formação de película fina, isolante, revestimentos de óxido na superfície dos fios condutores ou supercondutores. Os processos de redirecionamento são também úteis para produção de pós que podem ser coletados para processamento ulterior. São também revelados revestimentos de barreira de óxido de metal para recipientes de alimentos de polímero.
BR0016782-7A 1999-12-29 2000-12-21 Processo de deposição de vapor quìmico e revestimentos produzidos a partir deste BR0016782A (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US47449199A 1999-12-29 1999-12-29
US23457500P 2000-09-22 2000-09-22
PCT/US2000/035416 WO2001047704A1 (en) 1999-12-29 2000-12-21 Chemical vapor deposition method and coatings produced therefrom

Publications (1)

Publication Number Publication Date
BR0016782A true BR0016782A (pt) 2005-01-11

Family

ID=26928085

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0016782-7A BR0016782A (pt) 1999-12-29 2000-12-21 Processo de deposição de vapor quìmico e revestimentos produzidos a partir deste

Country Status (6)

Country Link
EP (1) EP1268186B1 (pt)
AU (1) AU771864B2 (pt)
BR (1) BR0016782A (pt)
CA (1) CA2393531C (pt)
HK (1) HK1053808A1 (pt)
WO (1) WO2001047704A1 (pt)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005025083B4 (de) * 2005-05-30 2007-05-24 Infineon Technologies Ag Thermoplast-Duroplast-Verbund und Verfahren zum Verbinden eines thermoplastischen Materials mit einem duroplastischen Material
JP4757709B2 (ja) * 2006-05-26 2011-08-24 株式会社豊田中央研究所 樹脂ガラス用積層体及びその製造方法
GB2466805B (en) * 2009-01-08 2014-06-11 Cvd Technologies Ltd Method for depositing an antibacterial coating on a substrate
WO2013076525A1 (en) * 2011-11-21 2013-05-30 Arcelormittal Investigación Y Desarrollo Sl Coating method and apparatus
KR102170813B1 (ko) * 2013-07-09 2020-10-28 한국전력공사 연소화학기상증착 반응을 이용한 기능성 코팅 장치
US9664674B2 (en) 2014-10-03 2017-05-30 Rite Taste, LLC Device and method for chemical analysis
US10782285B2 (en) 2014-10-03 2020-09-22 Rite Taste, LLC Device and method for chemical analysis
US11209416B2 (en) 2017-07-28 2021-12-28 Graphene-Dx, Inc. Device and method for chemical analysis
AU2019211495A1 (en) 2018-01-29 2020-09-17 Graphene-Dx, Inc. Methods and devices for detection of pathogens
US12055543B2 (en) 2018-05-24 2024-08-06 Graphene-Dx, Inc. Methods and devices for detection of THC
US12577168B2 (en) 2022-03-07 2026-03-17 Honeywell International Inc. CMAS-resistant thermal barrier coating for aero-engine parts

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4235616A (en) * 1979-05-14 1980-11-25 Corning Glass Works Optical waveguide manufacturing process and article
JPS5969142A (ja) * 1982-10-13 1984-04-19 Toshiba Corp 膜形成方法及び膜形成装置
JPS59121917A (ja) * 1982-12-28 1984-07-14 Nec Corp 気相成長装置
US4734451A (en) * 1983-09-01 1988-03-29 Battelle Memorial Institute Supercritical fluid molecular spray thin films and fine powders
US4689247A (en) * 1986-05-15 1987-08-25 Ametek, Inc. Process and apparatus for forming thin films
JPH0776097B2 (ja) * 1987-01-20 1995-08-16 日本電信電話株式会社 ガラス膜製造装置
EP0486475B1 (en) * 1988-03-03 1997-12-03 Asahi Glass Company Ltd. Amorphous oxide film and article having such film thereon
CA2010887C (en) * 1990-02-26 1996-07-02 Peter George Tsantrizos Reactive spray forming process
DE69224808T2 (de) * 1991-12-26 1998-07-09 Toyo Boseki Gassperrfilm
ES2193156T3 (es) * 1993-03-24 2003-11-01 Georgia Tech Res Inst Procedimiento y aparato para la preparacion de capas y recubrimientos por medio de deposicion quimica en fase de vapor asistida por combustion.

Also Published As

Publication number Publication date
CA2393531A1 (en) 2001-07-05
AU771864B2 (en) 2004-04-01
EP1268186A4 (en) 2007-10-24
WO2001047704A1 (en) 2001-07-05
CA2393531C (en) 2011-02-15
AU2740201A (en) 2001-07-09
HK1053808A1 (zh) 2003-11-07
EP1268186B1 (en) 2015-09-02
EP1268186A1 (en) 2003-01-02

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B25F Entry of change of name and/or headquarter and transfer of application, patent and certif. of addition of invention: change of name on requirement

Owner name: MICROCOATING TECHNOLOGIES (US)

Free format text: A FIM DE ATENDER O SOLICITADO NA PETICAO DE ALTERACAO DE NOME E SEDE NO 020040000931/RJ DE 07/10/2004, QUEIRA REAPRESENTAR O DOCUMENTO DE ALTERACAO DE NOME COM A RESPECTIVA NOTARIZACAO E LEGALIZACAO CONSULAR, BEM COMO PROCURACAO EMITIDA PELA INTERESSADA CONSTANDO NOME E ENDERECO ATUALIZADOS.

B25E Requested change of name of applicant rejected

Owner name: MICROCOATING TECHNOLOGIES (US)

Free format text: INDEFERIDO O PEDIDO DE ALTERACAO DE NOME E SEDE SOLICITADOS ATRAVES DA PETICAO NO 020040000931/RJ DE 07/10/2004, POR NAO CUMPRIMENTO DE EXIGENCIA PUBLICADA NA RPI 1877 DE 26/12/2006.

B25D Requested change of name of applicant approved

Owner name: NGIMAT CO. (US)

Free format text: ALTERADO DE: MICROCOATING TECHNOLOGIES, INC.

B07A Technical examination (opinion): publication of technical examination (opinion)
B09B Decision: refusal
B09B Decision: refusal

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