BRPI0503833A - método de corrosão seletiva utilizando camada de interrupção de corrosão - Google Patents

método de corrosão seletiva utilizando camada de interrupção de corrosão

Info

Publication number
BRPI0503833A
BRPI0503833A BRPI0503833-2A BRPI0503833A BRPI0503833A BR PI0503833 A BRPI0503833 A BR PI0503833A BR PI0503833 A BRPI0503833 A BR PI0503833A BR PI0503833 A BRPI0503833 A BR PI0503833A
Authority
BR
Brazil
Prior art keywords
corrosion
layer
interruption
selective
interruption layer
Prior art date
Application number
BRPI0503833-2A
Other languages
English (en)
Inventor
Clarence Chui
Manish Kothari
Brian J Gally
Ming-Hau Tung
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Publication of BRPI0503833A publication Critical patent/BRPI0503833A/pt

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00777—Preserve existing structures from alteration, e.g. temporary protection during manufacturing
    • B81C1/00785—Avoid chemical alteration, e.g. contamination, oxidation or unwanted etching
    • B81C1/00793—Avoid contamination, e.g. absorption of impurities or oxidation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00777—Preserve existing structures from alteration, e.g. temporary protection during manufacturing
    • B81C1/00785—Avoid chemical alteration, e.g. contamination, oxidation or unwanted etching
    • B81C1/00801—Avoid alteration of functional structures by etching, e.g. using a passivation layer or an etch stop layer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

"MéTODO DE CORROSãO SELETIVA UTILIZANDO CAMADA DE INTERRUPçãO DE CORROSãO". A fabricação de um dispositivo MEMS como um modulador interferométrico é aperfeiçoada pelo emprego de uma camada de interrupção de corrosão entre uma camada de sacrifício e uma camada de espelho. A interrupção de corrosão pode reduzir a corrosão em excesso indesejável da camada de sacrifício e camada de espelho. A camada de interrupção de corrosão também pode servir como uma camada de barreira, camada que serve de substrato e/ou camada modelo.
BRPI0503833-2A 2004-09-27 2005-09-23 método de corrosão seletiva utilizando camada de interrupção de corrosão BRPI0503833A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61341004P 2004-09-27 2004-09-27
US11/090,773 US20060066932A1 (en) 2004-09-27 2005-03-25 Method of selective etching using etch stop layer

Publications (1)

Publication Number Publication Date
BRPI0503833A true BRPI0503833A (pt) 2006-05-09

Family

ID=35462575

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0503833-2A BRPI0503833A (pt) 2004-09-27 2005-09-23 método de corrosão seletiva utilizando camada de interrupção de corrosão

Country Status (11)

Country Link
US (1) US20060066932A1 (pt)
EP (1) EP1640768A1 (pt)
JP (1) JP2006091852A (pt)
KR (1) KR20060092871A (pt)
AU (1) AU2005203258A1 (pt)
BR (1) BRPI0503833A (pt)
CA (1) CA2514349A1 (pt)
MX (1) MXPA05009864A (pt)
RU (1) RU2005129861A (pt)
SG (1) SG121046A1 (pt)
TW (1) TW200626481A (pt)

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AU2005203258A1 (en) 2006-04-13
SG121046A1 (en) 2006-04-26
KR20060092871A (ko) 2006-08-23
RU2005129861A (ru) 2007-04-10
TW200626481A (en) 2006-08-01
EP1640768A1 (en) 2006-03-29
JP2006091852A (ja) 2006-04-06
US20060066932A1 (en) 2006-03-30
CA2514349A1 (en) 2006-03-27
MXPA05009864A (es) 2006-03-29

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