BRPI0513669A - método para formação de fissura intermediária em substrato e equipamento para formação de fissura intermediária em substrato - Google Patents
método para formação de fissura intermediária em substrato e equipamento para formação de fissura intermediária em substratoInfo
- Publication number
- BRPI0513669A BRPI0513669A BRPI0513669-5A BRPI0513669A BRPI0513669A BR PI0513669 A BRPI0513669 A BR PI0513669A BR PI0513669 A BRPI0513669 A BR PI0513669A BR PI0513669 A BRPI0513669 A BR PI0513669A
- Authority
- BR
- Brazil
- Prior art keywords
- substrate
- intermediate crack
- crack formation
- crack
- forming
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/09—Severing cooled glass by thermal shock
- C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
- C03B33/093—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam using two or more focussed radiation beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/221—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising by thermic methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic materials other than metals or composite materials
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Thermal Sciences (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Dicing (AREA)
- Liquid Crystal (AREA)
Abstract
MéTODO PARA FORMAçãO DE FISSURA INTERMEDIáRIA EM SUBSTRATO E EQUIPAMENTO PARA FORMAçãO DE FISSURA INTERMEDIáRIA EM SUBSTRATO São providos, um método para formação de uma fissura intermediária e um equipamento para formação de uma fissura intermediária, onde é possível a formação de uma fissura intermediária profunda e reta, e uma excelente superfície rompida de um substrato frágil pode ser obtida como resultado da ruptura. No método para formação de uma fissura intermediária em um substrato frágil, o substrato frágil é irradiado com um feixe de laser ao longo de uma linha de inscrição a laser a ser formada com fissuras intermediárias no substrato frágil de modo a ser aquecido até uma temperatura não superior á sua temperatura de fusão e, dessa forma, a fissura intermediária é criada ao longo da linha de inscrição a laser a ser formada com fissuras intermediárias e expandida a partir de uma incisão que foi formada no substrato frágil; este método para formação de uma fissura intermediária em um substrato frágil é caracterizado pelo fato de que porções de alta temperatura que recebem intensa radiação de um feixe de laser e porções de baixa temperatura que recebem fraca radiação de um feixe de laser são alternadamente formadas ao longo da linha de inscrição a laser a ser formada com fissuras intermediárias.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004247570 | 2004-07-30 | ||
| PCT/JP2005/013980 WO2006011608A1 (ja) | 2004-07-30 | 2005-07-29 | 基板の垂直クラック形成方法および垂直クラック形成装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BRPI0513669A true BRPI0513669A (pt) | 2008-05-13 |
Family
ID=35786352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BRPI0513669-5A BRPI0513669A (pt) | 2004-07-30 | 2005-07-29 | método para formação de fissura intermediária em substrato e equipamento para formação de fissura intermediária em substrato |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US7723212B2 (pt) |
| EP (1) | EP1772245B1 (pt) |
| JP (1) | JP4916312B2 (pt) |
| KR (1) | KR101193874B1 (pt) |
| CN (1) | CN101001729B (pt) |
| BR (1) | BRPI0513669A (pt) |
| MX (1) | MX2007001159A (pt) |
| RU (1) | RU2007107398A (pt) |
| SG (1) | SG156607A1 (pt) |
| TW (1) | TW200607772A (pt) |
| WO (1) | WO2006011608A1 (pt) |
| ZA (1) | ZA200700824B (pt) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4977391B2 (ja) * | 2006-03-27 | 2012-07-18 | 日本電気株式会社 | レーザ切断方法、表示装置の製造方法、および表示装置 |
| JP5014767B2 (ja) * | 2006-12-18 | 2012-08-29 | ローム株式会社 | チップ抵抗器の製造方法 |
| KR101565099B1 (ko) | 2007-02-23 | 2015-11-03 | 피코데온 리미티드 오와이 | 타겟의 광자 융발을 위한 방법 및 장치 |
| EP1990168B1 (de) * | 2007-05-10 | 2012-06-27 | Grenzebach Maschinenbau GmbH | Verfahren zum laserthermischen Trennen von keramischem oder anderem spröden Plattenmaterial |
| TWI466749B (zh) * | 2007-11-02 | 2015-01-01 | Mitsuboshi Diamond Ind Co Ltd | Method for Segmentation of Fragile Material Substrate |
| KR100978551B1 (ko) | 2008-04-18 | 2010-08-27 | 티에스씨멤시스(주) | 태양 전지 제조용 레이저 스크라이빙 장치 |
| US8258427B2 (en) * | 2008-05-30 | 2012-09-04 | Corning Incorporated | Laser cutting of glass along a predetermined line |
| US8895892B2 (en) * | 2008-10-23 | 2014-11-25 | Corning Incorporated | Non-contact glass shearing device and method for scribing or cutting a moving glass sheet |
| US9346130B2 (en) | 2008-12-17 | 2016-05-24 | Electro Scientific Industries, Inc. | Method for laser processing glass with a chamfered edge |
| KR101000067B1 (ko) * | 2008-12-30 | 2010-12-10 | 엘지전자 주식회사 | 고효율 태양전지용 레이저 소성장치 및 고효율 태양전지 제조방법 |
| JP5478957B2 (ja) * | 2009-06-30 | 2014-04-23 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の割断方法 |
| CN102470549A (zh) * | 2009-07-03 | 2012-05-23 | 旭硝子株式会社 | 脆性材料基板的切割方法、切割装置以及通过该切割方法获得的车辆用窗玻璃 |
| US8932510B2 (en) | 2009-08-28 | 2015-01-13 | Corning Incorporated | Methods for laser cutting glass substrates |
| JP4961468B2 (ja) * | 2009-10-29 | 2012-06-27 | 三星ダイヤモンド工業株式会社 | レーザー加工方法、被加工物の分割方法およびレーザー加工装置 |
| US8946590B2 (en) * | 2009-11-30 | 2015-02-03 | Corning Incorporated | Methods for laser scribing and separating glass substrates |
| TWI513670B (zh) * | 2010-08-31 | 2015-12-21 | Corning Inc | 分離強化玻璃基板之方法 |
| WO2012075097A1 (en) * | 2010-11-30 | 2012-06-07 | Corning Incorporated | Methods for separating a sheet of brittle material |
| KR101442067B1 (ko) * | 2011-12-22 | 2014-09-19 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | 취성 재료 기판의 할단 방법 |
| US9828278B2 (en) | 2012-02-28 | 2017-11-28 | Electro Scientific Industries, Inc. | Method and apparatus for separation of strengthened glass and articles produced thereby |
| JP2015511571A (ja) | 2012-02-28 | 2015-04-20 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | 強化ガラスの分離のための方法及び装置並びにこれにより生成された製品 |
| US10357850B2 (en) | 2012-09-24 | 2019-07-23 | Electro Scientific Industries, Inc. | Method and apparatus for machining a workpiece |
| WO2013130608A1 (en) | 2012-02-29 | 2013-09-06 | Electro Scientific Industries, Inc. | Methods and apparatus for machining strengthened glass and articles produced thereby |
| KR101479707B1 (ko) | 2012-04-18 | 2015-01-07 | 이화여자대학교 산학협력단 | 크랙 제어에 의한 박막 패터닝 방법 및 그 박막 패터닝 구조물 |
| US9455229B2 (en) * | 2012-04-27 | 2016-09-27 | Namiki Seimitsu Houseki Kabushiki Kaisha | Composite substrate manufacturing method, semiconductor element manufacturing method, composite substrate, and semiconductor element |
| US9938180B2 (en) | 2012-06-05 | 2018-04-10 | Corning Incorporated | Methods of cutting glass using a laser |
| US9610653B2 (en) | 2012-09-21 | 2017-04-04 | Electro Scientific Industries, Inc. | Method and apparatus for separation of workpieces and articles produced thereby |
| US9412702B2 (en) | 2013-03-14 | 2016-08-09 | Intel Corporation | Laser die backside film removal for integrated circuit (IC) packaging |
| US8975177B2 (en) * | 2013-03-14 | 2015-03-10 | Intel Corporation | Laser resist removal for integrated circuit (IC) packaging |
| KR101523229B1 (ko) * | 2013-11-28 | 2015-05-28 | 한국생산기술연구원 | 저온 특성이 향상된 금속 재료 및 그 제조방법 |
| KR101606629B1 (ko) * | 2014-03-31 | 2016-03-25 | 재단법인 포항금속소재산업진흥원 | 무기물 분말의 구형화 방법 및 장치 |
| US9165832B1 (en) * | 2014-06-30 | 2015-10-20 | Applied Materials, Inc. | Method of die singulation using laser ablation and induction of internal defects with a laser |
| CN104713898B (zh) * | 2015-03-06 | 2017-06-30 | 中国科学院力学研究所 | 一种表面离散强化材料热疲劳性能的激光测试方法及装置 |
| JP6544149B2 (ja) * | 2015-08-31 | 2019-07-17 | 三星ダイヤモンド工業株式会社 | 脆性材料基板における傾斜クラックの形成方法および脆性材料基板の分断方法 |
| US10442720B2 (en) * | 2015-10-01 | 2019-10-15 | AGC Inc. | Method of forming hole in glass substrate by using pulsed laser, and method of producing glass substrate provided with hole |
| KR102176869B1 (ko) * | 2018-07-30 | 2020-11-11 | 주식회사 탑 엔지니어링 | 기판 가공 장치 및 기판 가공 방법 |
| CN109163978B (zh) * | 2018-09-03 | 2021-01-29 | 中国石油天然气集团有限公司 | 低温输气钢管承压能力及韧脆转变行为全尺寸试验方法 |
| TWI681241B (zh) * | 2018-12-04 | 2020-01-01 | 友達光電股份有限公司 | 顯示裝置製作方法及使用該方法製作的顯示裝置 |
| CN115461179A (zh) * | 2020-04-28 | 2022-12-09 | Iti株式会社 | 陶瓷切割方法及陶瓷切割设备 |
| CN112725719B (zh) * | 2020-10-21 | 2022-05-20 | 西安交通大学 | 一种陶瓷防护涂层及其制备方法 |
| CN114091313B (zh) * | 2022-01-20 | 2022-04-29 | 山东高速集团有限公司 | 一种用于预测路面低温开裂裂缝长度的方法 |
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| JPS59193413A (ja) * | 1983-04-18 | 1984-11-02 | Canon Inc | 光ビ−ム走査装置 |
| US5132505A (en) * | 1990-03-21 | 1992-07-21 | U.S. Philips Corporation | Method of cleaving a brittle plate and device for carrying out the method |
| RU2024441C1 (ru) * | 1992-04-02 | 1994-12-15 | Владимир Степанович Кондратенко | Способ резки неметаллических материалов |
| JP3210934B2 (ja) * | 1994-06-08 | 2001-09-25 | 長崎県 | 脆性材料の割断方法 |
| JP3636835B2 (ja) * | 1996-08-07 | 2005-04-06 | ローム株式会社 | 基板分割方法およびその基板分割を用いた発光素子製造方法 |
| US6327875B1 (en) * | 1999-03-09 | 2001-12-11 | Corning Incorporated | Control of median crack depth in laser scoring |
| US6501047B1 (en) * | 1999-11-19 | 2002-12-31 | Seagate Technology Llc | Laser-scribing brittle substrates |
| JP3626442B2 (ja) * | 2000-09-13 | 2005-03-09 | 浜松ホトニクス株式会社 | レーザ加工方法 |
| KR100701013B1 (ko) * | 2001-05-21 | 2007-03-29 | 삼성전자주식회사 | 레이저 빔을 이용한 비금속 기판의 절단방법 및 장치 |
| US6974673B2 (en) * | 2001-09-24 | 2005-12-13 | Veridian Systems Division | Coupled capillary fiber based waveguide biosensor |
| JP3670267B2 (ja) * | 2002-03-12 | 2005-07-13 | 浜松ホトニクス株式会社 | レーザ加工方法 |
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| JP2004066745A (ja) * | 2002-08-08 | 2004-03-04 | Seiko Epson Corp | レーザー割断方法及びレーザー割断装置 |
| JP2004114065A (ja) * | 2002-09-24 | 2004-04-15 | Sharp Corp | レーザ照射装置 |
| JP3792639B2 (ja) * | 2002-11-08 | 2006-07-05 | 株式会社日本エミック | 切断装置 |
| JP2004223796A (ja) * | 2003-01-21 | 2004-08-12 | Kyoto Seisakusho Co Ltd | 脆性材料の割断加工方法 |
| US20080061043A1 (en) * | 2004-10-01 | 2008-03-13 | Masahiro Fujii | Scribing Method for Brittle Material and Scribing Apparatus |
-
2005
- 2005-07-29 MX MX2007001159A patent/MX2007001159A/es not_active Application Discontinuation
- 2005-07-29 JP JP2006527878A patent/JP4916312B2/ja not_active Expired - Fee Related
- 2005-07-29 CN CN2005800259068A patent/CN101001729B/zh not_active Expired - Fee Related
- 2005-07-29 WO PCT/JP2005/013980 patent/WO2006011608A1/ja not_active Ceased
- 2005-07-29 SG SG200905096-4A patent/SG156607A1/en unknown
- 2005-07-29 US US11/572,931 patent/US7723212B2/en not_active Expired - Fee Related
- 2005-07-29 EP EP05767410.3A patent/EP1772245B1/en not_active Expired - Lifetime
- 2005-07-29 TW TW094125839A patent/TW200607772A/zh not_active IP Right Cessation
- 2005-07-29 KR KR1020077004796A patent/KR101193874B1/ko not_active Expired - Fee Related
- 2005-07-29 RU RU2007107398/03A patent/RU2007107398A/ru not_active Application Discontinuation
- 2005-07-29 BR BRPI0513669-5A patent/BRPI0513669A/pt not_active IP Right Cessation
-
2007
- 2007-01-29 ZA ZA200700824A patent/ZA200700824B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| KR20070043866A (ko) | 2007-04-25 |
| MX2007001159A (es) | 2007-09-25 |
| EP1772245B1 (en) | 2014-05-07 |
| WO2006011608A1 (ja) | 2006-02-02 |
| CN101001729A (zh) | 2007-07-18 |
| JP4916312B2 (ja) | 2012-04-11 |
| ZA200700824B (en) | 2009-05-27 |
| EP1772245A4 (en) | 2011-02-02 |
| RU2007107398A (ru) | 2008-09-10 |
| TW200607772A (en) | 2006-03-01 |
| EP1772245A1 (en) | 2007-04-11 |
| CN101001729B (zh) | 2011-03-23 |
| US7723212B2 (en) | 2010-05-25 |
| US20080194079A1 (en) | 2008-08-14 |
| SG156607A1 (en) | 2009-11-26 |
| TWI378904B (pt) | 2012-12-11 |
| KR101193874B1 (ko) | 2012-10-26 |
| JPWO2006011608A1 (ja) | 2008-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B08F | Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette] |
Free format text: REFERENTE AS 4A, 5A E 6A ANUIDADES. |
|
| B08K | Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette] |
Free format text: REFERENTE AO DESPACHO 8.6 PUBLICADO NA RPI 2158 DE 15/05/2012. |