BRPI0821137A2 - Disposição de célula de medição de pressão de diafragma - Google Patents

Disposição de célula de medição de pressão de diafragma

Info

Publication number
BRPI0821137A2
BRPI0821137A2 BRPI0821137-0A BRPI0821137A BRPI0821137A2 BR PI0821137 A2 BRPI0821137 A2 BR PI0821137A2 BR PI0821137 A BRPI0821137 A BR PI0821137A BR PI0821137 A2 BRPI0821137 A2 BR PI0821137A2
Authority
BR
Brazil
Prior art keywords
pressure measuring
measuring cell
cell arrangement
diaphragm pressure
diaphragm
Prior art date
Application number
BRPI0821137-0A
Other languages
English (en)
Inventor
Walter Christian Berner
Jarkko Antila
Gaétan Duplain
Per Björkman
Tove Manselin
Oskar Untermarzoner
Original Assignee
Inficon Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Gmbh filed Critical Inficon Gmbh
Publication of BRPI0821137A2 publication Critical patent/BRPI0821137A2/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
BRPI0821137-0A 2007-12-20 2008-12-03 Disposição de célula de medição de pressão de diafragma BRPI0821137A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US1524107P 2007-12-20 2007-12-20
PCT/CH2008/000511 WO2009079803A1 (de) 2007-12-20 2008-12-03 Anordnung für eine membrandruckmesszelle

Publications (1)

Publication Number Publication Date
BRPI0821137A2 true BRPI0821137A2 (pt) 2015-06-16

Family

ID=40404160

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0821137-0A BRPI0821137A2 (pt) 2007-12-20 2008-12-03 Disposição de célula de medição de pressão de diafragma

Country Status (8)

Country Link
US (1) US7614308B2 (pt)
JP (1) JP5546460B2 (pt)
BR (1) BRPI0821137A2 (pt)
CA (1) CA2709495C (pt)
CH (1) CH700454B1 (pt)
DE (1) DE112008003344A5 (pt)
RU (1) RU2491524C2 (pt)
WO (1) WO2009079803A1 (pt)

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DE102010063065A1 (de) * 2010-12-14 2012-06-14 Endress + Hauser Gmbh + Co. Kg Drucksensor und Verfahren zu dessen Herstellung+
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DE102014106704A1 (de) * 2014-05-13 2015-11-19 Endress + Hauser Gmbh + Co. Kg Drucksensor
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CN107845560A (zh) * 2016-09-19 2018-03-27 中国科学院微电子研究所 一种高精度真空规管
CN107843772A (zh) * 2016-09-19 2018-03-27 中国科学院微电子研究所 一种灵敏度倍增真空规管组
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RU2652403C1 (ru) * 2017-02-28 2018-04-26 Государственное бюджетное образовательное учреждение высшего образования "Альметьевский государственный нефтяной институт" Устройство для одновременного измерения давления вне и внутри насосно-компрессорных труб
US10714795B2 (en) * 2017-05-01 2020-07-14 Infineon Technologies Ag Monitoring battery cell internal pressure
CN107907263B (zh) * 2017-12-13 2023-06-16 沈阳市传感技术研究所 电极单端悬浮的电容压力传感器
ES1217769Y (es) * 2018-07-26 2018-12-13 Cebi Electromechanical Components Spain S A Medidor de presion para circuitos de fluidos
CN110702301B (zh) * 2019-11-19 2024-11-01 川北真空科技(北京)有限公司 一种薄膜真空计
JP7444628B2 (ja) * 2020-02-19 2024-03-06 アズビル株式会社 圧力センサ
DE102020118313B4 (de) * 2020-07-10 2023-10-05 Vega Grieshaber Kg Kanalstrukturen zur Optimierung der Membranfunktion von ölgefüllten Drucksensoren
CN112284574B (zh) * 2020-09-30 2022-01-14 深圳信息职业技术学院 一种可一次封装成型的压力传感器封装结构
RU206545U1 (ru) * 2020-11-02 2021-09-15 Общество с ограниченной ответственностью "Пифагор-М" Устройство для измерения давления на поверхность
CN114754916B (zh) * 2022-05-11 2024-01-09 北京七星华创流量计有限公司 压力传感器及其制造方法
CN116818181A (zh) * 2023-07-06 2023-09-29 山东大学 一种电容薄膜真空计及其制备方法

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Also Published As

Publication number Publication date
JP2011506980A (ja) 2011-03-03
DE112008003344A5 (de) 2010-12-09
CA2709495C (en) 2016-07-12
CH700454B1 (de) 2012-10-15
CA2709495A1 (en) 2009-07-02
RU2010130092A (ru) 2012-01-27
US7614308B2 (en) 2009-11-10
WO2009079803A1 (de) 2009-07-02
US20090158853A1 (en) 2009-06-25
RU2491524C2 (ru) 2013-08-27
JP5546460B2 (ja) 2014-07-09

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Legal Events

Date Code Title Description
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]

Free format text: REFERENTE A 8A ANUIDADE.

B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]