BRPI0821137A2 - Disposição de célula de medição de pressão de diafragma - Google Patents

Disposição de célula de medição de pressão de diafragma

Info

Publication number
BRPI0821137A2
BRPI0821137A2 BRPI0821137-0A BRPI0821137A BRPI0821137A2 BR PI0821137 A2 BRPI0821137 A2 BR PI0821137A2 BR PI0821137 A BRPI0821137 A BR PI0821137A BR PI0821137 A2 BRPI0821137 A2 BR PI0821137A2
Authority
BR
Brazil
Prior art keywords
pressure measuring
measuring cell
cell arrangement
diaphragm pressure
diaphragm
Prior art date
Application number
BRPI0821137-0A
Other languages
English (en)
Inventor
Walter Christian Berner
Jarkko Antila
Gaétan Duplain
Per Björkman
Tove Manselin
Oskar Untermarzoner
Original Assignee
Inficon Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Gmbh filed Critical Inficon Gmbh
Publication of BRPI0821137A2 publication Critical patent/BRPI0821137A2/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
BRPI0821137-0A 2007-12-20 2008-12-03 Disposição de célula de medição de pressão de diafragma BRPI0821137A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US1524107P 2007-12-20 2007-12-20
PCT/CH2008/000511 WO2009079803A1 (de) 2007-12-20 2008-12-03 Anordnung für eine membrandruckmesszelle

Publications (1)

Publication Number Publication Date
BRPI0821137A2 true BRPI0821137A2 (pt) 2015-06-16

Family

ID=40404160

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0821137-0A BRPI0821137A2 (pt) 2007-12-20 2008-12-03 Disposição de célula de medição de pressão de diafragma

Country Status (8)

Country Link
US (1) US7614308B2 (pt)
JP (1) JP5546460B2 (pt)
BR (1) BRPI0821137A2 (pt)
CA (1) CA2709495C (pt)
CH (1) CH700454B1 (pt)
DE (1) DE112008003344A5 (pt)
RU (1) RU2491524C2 (pt)
WO (1) WO2009079803A1 (pt)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004031582A1 (de) * 2004-06-29 2006-02-09 Endress + Hauser Gmbh + Co. Kg Duckaufnehmer
DE102006050451A1 (de) * 2006-10-20 2008-04-24 Endress + Hauser Gmbh + Co. Kg Druckmessgerät
US7946178B2 (en) * 2007-06-19 2011-05-24 Inficon Gmbh Vacuum measuring cell device having a heater
US7806002B2 (en) * 2008-03-25 2010-10-05 Lear Corporation Capacitive sensing in an automotive mirror
US7707891B2 (en) * 2008-06-27 2010-05-04 Inficon Gmbh Optical interferometric pressure sensor
US20100233353A1 (en) * 2009-03-16 2010-09-16 Applied Materials, Inc. Evaporator, coating installation, and method for use thereof
DE102009027592A1 (de) * 2009-07-09 2011-05-12 Endress + Hauser Gmbh + Co. Kg Drucksensor mit interferometrischem Wandler und Druckmessgerät mit einem solchen Drucksensor
CH701500A1 (de) * 2009-07-24 2011-01-31 Inficon Gmbh Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle.
JP2011185758A (ja) * 2010-03-09 2011-09-22 Yokogawa Electric Corp 圧力測定器
US9737657B2 (en) 2010-06-03 2017-08-22 Medtronic, Inc. Implantable medical pump with pressure sensor
US8397578B2 (en) * 2010-06-03 2013-03-19 Medtronic, Inc. Capacitive pressure sensor assembly
US8141429B2 (en) * 2010-07-30 2012-03-27 Rosemount Aerospace Inc. High temperature capacitive static/dynamic pressure sensors and methods of making the same
US8639328B2 (en) 2010-10-29 2014-01-28 Medtronic, Inc. Cardiac therapy based upon impedance signals
DE102010063065A1 (de) * 2010-12-14 2012-06-14 Endress + Hauser Gmbh + Co. Kg Drucksensor und Verfahren zu dessen Herstellung+
DE102011005274B4 (de) * 2011-03-09 2020-09-10 Endress+Hauser SE+Co. KG Keramische Druckmesszelle
DE102011017824A1 (de) 2011-04-29 2012-10-31 Endress + Hauser Gmbh + Co. Kg Hochtemperaturdruckmessaufnehmer
DE102011081651A1 (de) * 2011-08-26 2013-02-28 Endress + Hauser Gmbh + Co. Kg Interferometrischer Drucksensor
US9131858B2 (en) * 2012-01-31 2015-09-15 Medtronic, Inc. Sensor over-mold shape
US9517032B2 (en) 2012-01-31 2016-12-13 Medtronic, Inc. Sensor over-mold shape
DE102013220735A1 (de) * 2013-10-14 2015-04-16 Vega Grieshaber Kg Messanordnung mit einer keramischen Messzelle
WO2015088474A1 (en) * 2013-12-09 2015-06-18 Halliburton Energy Services, Inc. Polycrystalline transparent ceramics for use with a logging sensor or tool
DE102013114608A1 (de) * 2013-12-20 2015-07-09 Endress + Hauser Gmbh + Co. Kg Relativdrucksensor
US9387330B2 (en) 2014-01-17 2016-07-12 Medtronic, Inc. Cardiac resynchronization therapy optimization based on intracardiac impedance and heart sounds
DE102014106704A1 (de) * 2014-05-13 2015-11-19 Endress + Hauser Gmbh + Co. Kg Drucksensor
EP4303552A3 (en) * 2014-12-04 2024-03-20 Becton, Dickinson and Company Fluid delivery device with sensor and pump control
PT3353517T (pt) * 2015-09-21 2020-05-20 Opsens Solutions Inc Sensor de pressão óptico com tensões mecânicas reduzidas
CN107843772A (zh) * 2016-09-19 2018-03-27 中国科学院微电子研究所 一种灵敏度倍增真空规管组
CN107845560A (zh) * 2016-09-19 2018-03-27 中国科学院微电子研究所 一种高精度真空规管
CN107845459A (zh) * 2016-09-19 2018-03-27 中国科学院微电子研究所 一种蓝宝石薄膜片真空规管
CN107843384A (zh) * 2016-09-19 2018-03-27 中国科学院微电子研究所 一种石英薄膜片真空规管
EP3330580A1 (en) * 2016-12-05 2018-06-06 ABB Schweiz AG Use of a coated o-ring for a gas-insulated electric equipment
RU2652403C1 (ru) * 2017-02-28 2018-04-26 Государственное бюджетное образовательное учреждение высшего образования "Альметьевский государственный нефтяной институт" Устройство для одновременного измерения давления вне и внутри насосно-компрессорных труб
US10714795B2 (en) * 2017-05-01 2020-07-14 Infineon Technologies Ag Monitoring battery cell internal pressure
CN107907263B (zh) * 2017-12-13 2023-06-16 沈阳市传感技术研究所 电极单端悬浮的电容压力传感器
ES1217769Y (es) * 2018-07-26 2018-12-13 Cebi Electromechanical Components Spain S A Medidor de presion para circuitos de fluidos
CN110702301B (zh) * 2019-11-19 2024-11-01 川北真空科技(北京)有限公司 一种薄膜真空计
JP7444628B2 (ja) * 2020-02-19 2024-03-06 アズビル株式会社 圧力センサ
DE102020118313B4 (de) * 2020-07-10 2023-10-05 Vega Grieshaber Kg Kanalstrukturen zur Optimierung der Membranfunktion von ölgefüllten Drucksensoren
CN112284574B (zh) * 2020-09-30 2022-01-14 深圳信息职业技术学院 一种可一次封装成型的压力传感器封装结构
RU206545U1 (ru) * 2020-11-02 2021-09-15 Общество с ограниченной ответственностью "Пифагор-М" Устройство для измерения давления на поверхность
CN114754916B (zh) * 2022-05-11 2024-01-09 北京七星华创流量计有限公司 压力传感器及其制造方法
CN116818181A (zh) * 2023-07-06 2023-09-29 山东大学 一种电容薄膜真空计及其制备方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4127840A (en) * 1977-02-22 1978-11-28 Conrac Corporation Solid state force transducer
US4380041A (en) * 1978-09-25 1983-04-12 Motorola Inc. Capacitor pressure transducer with housing
EP0009313A1 (en) * 1978-09-25 1980-04-02 Motorola, Inc. Improved pressure transducer and assembly
SU883681A1 (ru) * 1980-03-26 1981-11-23 Опытное Конструкторско-Технологическое Бюро "Кристалл" С Опытным Производством Ленинградского Технологического Института Им. Ленсовета Датчик давлени с частотным выходом
JPH01188764A (ja) * 1988-01-20 1989-07-28 Mitsubishi Electric Corp 高真空用ガスケツト
JP2600863B2 (ja) * 1988-11-22 1997-04-16 株式会社デンソー 高圧用半導体式圧力センサの取付け構造
US4888662A (en) * 1988-12-08 1989-12-19 Texas Instruments Incorporated High pressure package for pressure transducers
DE4018638A1 (de) 1990-06-11 1991-12-12 Schoppe & Faeser Gmbh Druckmessumformer mit einem rotationssymmetrischen drucksensor aus keramik
JP2582494B2 (ja) * 1991-11-12 1997-02-19 日本碍子株式会社 セラミック接合体とその接合方法
CZ2562U1 (cs) * 1994-05-04 1994-10-27 Akord Lipová, Spol. S R.O. Tlaková sonda
DE59804701D1 (de) * 1997-12-23 2002-08-08 Unaxis Balzers Ag Membrane für eine kapazitive vakuummesszelle
WO1999034184A1 (de) * 1997-12-23 1999-07-08 Unaxis Trading Ag Kapazitive vakuummesszelle
RU2152601C1 (ru) * 1998-06-16 2000-07-10 Научный центр волоконной оптики при Институте общей физики РАН Волоконно-оптический датчик давления (его варианты) и способ его изготовления
EP1065488B1 (de) * 1999-07-01 2007-02-28 Endress + Hauser GmbH + Co. KG Relativdrucksensor
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
JP4414746B2 (ja) * 2002-12-19 2010-02-10 キヤノンアネルバ株式会社 静電容量型圧力センサ
DE10308820B4 (de) * 2003-02-27 2006-10-12 Ifm Electronic Gmbh Sensor, Meßzelle zur Verwendung in einem Sensor und Verfahren zur Herstellung einer Meßzelle
US20050195402A1 (en) * 2004-03-04 2005-09-08 Russell May Crystalline optical fiber sensors for harsh environments
US7427776B2 (en) * 2004-10-07 2008-09-23 Hewlett-Packard Development Company, L.P. Thin-film transistor and methods
WO2007019714A1 (de) * 2005-08-12 2007-02-22 Inficon Gmbh Optischer interferometrische drucksensor
CA2679648C (en) 2007-04-07 2015-02-03 Inficon Gmbh Method for the production of a diaphragm vacuum measuring cell

Also Published As

Publication number Publication date
JP2011506980A (ja) 2011-03-03
RU2010130092A (ru) 2012-01-27
CA2709495A1 (en) 2009-07-02
JP5546460B2 (ja) 2014-07-09
RU2491524C2 (ru) 2013-08-27
CH700454B1 (de) 2012-10-15
CA2709495C (en) 2016-07-12
US20090158853A1 (en) 2009-06-25
DE112008003344A5 (de) 2010-12-09
WO2009079803A1 (de) 2009-07-02
US7614308B2 (en) 2009-11-10

Similar Documents

Publication Publication Date Title
ZA200908653B (en) Measuring pressure
DK3121225T3 (da) Permeabelt trykfølsomt klæbemiddel
EP3696526C0 (en) PRESSURE SENSOR DEVICE
DK2272123T3 (da) Membran til elektrokemisk indretning
BRPI0813467A2 (pt) Regulador de pressão
BRPI0914258A2 (pt) dispostivo sensor de pressão
BRPI1011105A2 (pt) sensor de pressão
BRPI0917558A2 (pt) detecção de células com cancelamento de interferência
NO20075913A (no) Trykksensorenhet
BRPI0919305A2 (pt) compensador de pressão
DK2196143T3 (da) Højfølsom trykmålesonde
EP2304409A4 (en) CONVERTER MODULE
EP2182841A4 (en) INTRAOCULAR PRESSURE SENSOR
DE112008003344A5 (de) Anordnung für eine Membrandruckmesszelle
EP2164280A4 (en) ACOUSTIC SENSOR
DK2340322T3 (da) Højtrykselektrolyseapparat
EP2258464A4 (en) humidifying membrane module
EP2164281A4 (en) ACOUSTIC SENSOR
DK2323553T3 (da) System til måling af lydtryksniveau
BRPI0912025A2 (pt) dispositivo de medida de diferencial de pressão
DE102007042439B8 (de) Drucksensor
DE112010003636A5 (de) Drucksensor-Einheit
EP2427740A4 (en) VOLUME KNIFE
BRPI0921169A2 (pt) dispositivo de medição de pressão sanguínea com mostrador aperfeiçoado
DE112009001312A5 (de) Druckmessglühkerze

Legal Events

Date Code Title Description
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]

Free format text: REFERENTE A 8A ANUIDADE.

B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]