CA1070855A - Photomasque en electronique - Google Patents

Photomasque en electronique

Info

Publication number
CA1070855A
CA1070855A CA287,526A CA287526A CA1070855A CA 1070855 A CA1070855 A CA 1070855A CA 287526 A CA287526 A CA 287526A CA 1070855 A CA1070855 A CA 1070855A
Authority
CA
Canada
Prior art keywords
mask
gas
supporting plate
transparent
optical exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA287,526A
Other languages
English (en)
Inventor
Tadayoshi Mifune
Yasuaki Nakane
Iwao Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP12060876A external-priority patent/JPS5345975A/ja
Priority claimed from JP12984876A external-priority patent/JPS5355203A/ja
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of CA1070855A publication Critical patent/CA1070855A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
CA287,526A 1976-10-07 1977-09-26 Photomasque en electronique Expired CA1070855A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12060876A JPS5345975A (en) 1976-10-07 1976-10-07 Mask for exposure
JP12984876A JPS5355203A (en) 1976-10-28 1976-10-28 Mask for exposure

Publications (1)

Publication Number Publication Date
CA1070855A true CA1070855A (fr) 1980-01-29

Family

ID=26458153

Family Applications (1)

Application Number Title Priority Date Filing Date
CA287,526A Expired CA1070855A (fr) 1976-10-07 1977-09-26 Photomasque en electronique

Country Status (4)

Country Link
CA (1) CA1070855A (fr)
DE (1) DE2744837A1 (fr)
GB (1) GB1577479A (fr)
NL (1) NL7710996A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4131363A (en) * 1977-12-05 1978-12-26 International Business Machines Corporation Pellicle cover for projection printing system
JPS5676531A (en) * 1979-11-28 1981-06-24 Fujitsu Ltd Manufacture of semiconductor device
AT382040B (de) * 1983-03-01 1986-12-29 Guenther Stangl Verfahren zur herstellung von optisch strukturierten filtern fuer elektromagnetische strahlung und optisch strukturierter filter
DE3401856C2 (de) * 1984-01-20 1986-04-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Kontaktkopiereinrichtung
JPH04225360A (ja) * 1990-12-26 1992-08-14 Adotetsuku Eng:Kk プリント配線基板の製造におけるフィルムマスクの密着方法及びその装置
CN119292011B (zh) * 2024-12-16 2025-04-11 上海图双精密装备有限公司 用于提高曝光效果的方法和装置

Also Published As

Publication number Publication date
GB1577479A (en) 1980-10-22
DE2744837A1 (de) 1978-04-13
NL7710996A (nl) 1978-04-11

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Legal Events

Date Code Title Description
MKEX Expiry