CA1085585A - Preparation de trichlorosilane et de tetrachlorure de silicium - Google Patents

Preparation de trichlorosilane et de tetrachlorure de silicium

Info

Publication number: CA1085585A
Authority: CA; Canada
Prior art keywords: silicon; reaction; reactor; hydrogen chloride; gaseous
Prior art date: 1976-07-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA282,169A

Other languages

English (en)

Inventor

Hans Leuck

Fritz-Robert Kappler

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Dynamit Nobel AG

Original Assignee

Dynamit Nobel AG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-07-07

Filing date

1977-07-06

Publication date

1980-09-16

1977-07-06 Application filed by Dynamit Nobel AG filed Critical Dynamit Nobel AG

1980-09-16 Application granted granted Critical

1980-09-16 Publication of CA1085585A publication Critical patent/CA1085585A/fr

Status Expired legal-status Critical Current

Links

VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 title claims abstract description 17
239000005049 silicon tetrachloride Substances 0.000 title claims abstract description 17
238000000034 method Methods 0.000 title claims abstract description 14
ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 title claims abstract description 7
239000005052 trichlorosilane Substances 0.000 title claims abstract description 7
238000002360 preparation method Methods 0.000 title claims abstract description 5
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 22
239000010703 silicon Substances 0.000 claims abstract description 22
229910052710 silicon Inorganic materials 0.000 claims abstract description 22
238000006243 chemical reaction Methods 0.000 claims abstract description 21
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 19
IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims abstract description 17
229910000041 hydrogen chloride Inorganic materials 0.000 claims abstract description 17
239000007795 chemical reaction product Substances 0.000 claims abstract description 10
239000011343 solid material Substances 0.000 claims abstract description 6
239000000203 mixture Substances 0.000 claims abstract description 4
229910003910 SiCl4 Inorganic materials 0.000 claims 1
238000004821 distillation Methods 0.000 claims 1
239000011541 reaction mixture Substances 0.000 claims 1
FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 claims 1
239000007787 solid Substances 0.000 description 6
ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
239000012320 chlorinating reagent Substances 0.000 description 3
239000000460 chlorine Substances 0.000 description 3
229910052801 chlorine Inorganic materials 0.000 description 3
238000013021 overheating Methods 0.000 description 3
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
229910000519 Ferrosilicon Inorganic materials 0.000 description 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
238000005660 chlorination reaction Methods 0.000 description 2
239000007789 gas Substances 0.000 description 2
239000000463 material Substances 0.000 description 2
239000002245 particle Substances 0.000 description 2
239000000047 product Substances 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
239000005046 Chlorosilane Substances 0.000 description 1
OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
229910052581 Si3N4 Inorganic materials 0.000 description 1
229910045601 alloy Inorganic materials 0.000 description 1
239000000956 alloy Substances 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
230000006835 compression Effects 0.000 description 1
238000007906 compression Methods 0.000 description 1
238000001816 cooling Methods 0.000 description 1
230000007423 decrease Effects 0.000 description 1
230000003247 decreasing effect Effects 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
238000009826 distribution Methods 0.000 description 1
238000005243 fluidization Methods 0.000 description 1
229910000765 intermetallic Inorganic materials 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
238000002844 melting Methods 0.000 description 1
230000008018 melting Effects 0.000 description 1
238000002156 mixing Methods 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
229910052698 phosphorus Inorganic materials 0.000 description 1
239000011574 phosphorus Substances 0.000 description 1
230000036647 reaction Effects 0.000 description 1
238000012958 reprocessing Methods 0.000 description 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
229910010271 silicon carbide Inorganic materials 0.000 description 1
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
230000006641 stabilisation Effects 0.000 description 1
238000011105 stabilization Methods 0.000 description 1
239000007858 starting material Substances 0.000 description 1
239000000126 substance Substances 0.000 description 1
239000012749 thinning agent Substances 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Inorganic Chemistry (AREA)
Silicon Compounds (AREA)

CA282,169A 1976-07-07 1977-07-06 Preparation de trichlorosilane et de tetrachlorure de silicium Expired CA1085585A (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE19762630542 DE2630542C3 (de)	1976-07-07	1976-07-07	Verfahren zur Herstellung von Trichlorsilan und Siliciumtetrahlorid
DEP2630542.0		1976-07-07

Publications (1)

Publication Number	Publication Date
CA1085585A true CA1085585A (fr)	1980-09-16

Family

ID=5982438

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA282,169A Expired CA1085585A (fr)	1976-07-07	1977-07-06	Preparation de trichlorosilane et de tetrachlorure de silicium

Country Status (9)

Country	Link
JP (1)	JPS536297A (fr)
BE (1)	BE856480A (fr)
CA (1)	CA1085585A (fr)
DE (1)	DE2630542C3 (fr)
ES (1)	ES460451A1 (fr)
FR (1)	FR2357481A1 (fr)
GB (1)	GB1530986A (fr)
IT (1)	IT1112065B (fr)
NL (1)	NL7707499A (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2704975C2 (de) *	1977-02-07	1982-12-23	Wacker-Chemie GmbH, 8000 München	Wärmeaustauschvorrichtung für Wirbelbettreaktoren zur Durchführung von Gas/Feststoff-Reaktionen, insbesondere zur Herstellung von Siliciumhalogenverbindungen mittels Silicium-enthaltender Kontaktmassen
JPS5832011A (ja) *	1981-08-17	1983-02-24	Nippon Aerojiru Kk	珪素と塩化水素からトリクロルシランと四塩化珪素を製造する方法
DE3303903A1 (de) *	1982-02-16	1983-08-25	General Electric Co., Schenectady, N.Y.	Verfahren zum herstellen von trichlorsilan aus silizium
DE3828344C1 (fr) *	1988-08-20	1989-07-06	Huels Ag, 4370 Marl, De
US5051248A (en) *	1990-08-15	1991-09-24	Dow Corning Corporation	Silane products from reaction of silicon monoxide with hydrogen halides
DE4033611A1 (de) *	1990-10-23	1992-04-30	Huels Chemische Werke Ag	Verfahren zur gewinnung von chloridarmer ofenasche bei der umsetzung von rohsilicium zu chlorsilanen
US5160720A (en) *	1990-12-12	1992-11-03	Dow Corning Corporation	Metal catalyzed production of tetrachlorosilane
US5176892A (en) *	1990-12-06	1993-01-05	Dow Corning Corporation	Supported metal catalyzed production of tetrachlorosilane
DE102006009954A1 (de)	2006-03-03	2007-09-06	Wacker Chemie Ag	Wiederverwertung von hochsiedenden Verbindungen innerhalb eines Chlorsilanverbundes
US8178051B2 (en) *	2008-11-05	2012-05-15	Stephen Michael Lord	Apparatus and process for hydrogenation of a silicon tetrahalide and silicon to the trihalosilane
EP2688839B1 (fr) *	2011-03-25	2016-09-14	Evonik Degussa GmbH	Utilisation de tubes de carbure de silicium présentant une extrémité à collerette ou à bord rabattu
DE102012216356A1 (de) *	2012-09-14	2014-03-20	Evonik Industries Ag	Verfahren zur Herstellung von Chlorsilanen mittels hochsiedender Chlorsilane oder chlorsilanhaltiger Gemische
KR102507061B1 (ko)	2014-12-19	2023-03-07	다우 실리콘즈 코포레이션	모노하이드로겐트라이할로실란의 제조 공정
CN110002449A (zh) *	2019-04-12	2019-07-12	四川永祥多晶硅有限公司	一种氯硅烷精制系统及精制方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SU120510A1 (ru) *	1958-05-06	1958-11-30	К.А. Андрианов	Способ одновременного получени трихлорсилана и четыреххлористого кремни
GB963745A (en) *	1961-01-05	1964-07-15	British Titan Products	Halogenation of silicon-containing materials
US3704104A (en) *	1970-06-01	1972-11-28	Texas Instruments Inc	Process for the production of trichlorosilane

1976
- 1976-07-07 DE DE19762630542 patent/DE2630542C3/de not_active Expired
1977
- 1977-07-04 GB GB2798277A patent/GB1530986A/en not_active Expired
- 1977-07-05 BE BE179082A patent/BE856480A/fr unknown
- 1977-07-06 NL NL7707499A patent/NL7707499A/xx not_active Application Discontinuation
- 1977-07-06 IT IT5015877A patent/IT1112065B/it active
- 1977-07-06 JP JP8088977A patent/JPS536297A/ja active Pending
- 1977-07-06 FR FR7720871A patent/FR2357481A1/fr not_active Withdrawn
- 1977-07-06 ES ES460451A patent/ES460451A1/es not_active Expired
- 1977-07-06 CA CA282,169A patent/CA1085585A/fr not_active Expired

Also Published As

Publication number	Publication date
ES460451A1 (es)	1978-06-01
JPS536297A (en)	1978-01-20
NL7707499A (nl)	1978-01-10
DE2630542C3 (de)	1981-04-02
DE2630542B2 (de)	1980-05-08
FR2357481A1 (fr)	1978-02-03
IT1112065B (it)	1986-01-13
GB1530986A (en)	1978-11-01
DE2630542A1 (de)	1978-01-12
BE856480A (fr)	1977-10-31

Legal Events

Date	Code	Title	Description
1997-09-16	MKEX	Expiry

Publication	Publication Date	Title
US4044109A (en)	1977-08-23	Process for the hydrochlorination of elemental silicon
US4986971A (en)	1991-01-22	Method for production of trichloromonosilane
US5063040A (en)	1991-11-05	Method for increasing the yield of trichlorosilane in the fluidized-bed hydrochlorination of silicon
US20040047793A1 (en)	2004-03-11	Method for producing trichlorosilane
DE2630542C3 (de)	1981-04-02	Verfahren zur Herstellung von Trichlorsilan und Siliciumtetrahlorid
JPH0264006A (ja)	1990-03-05	太陽のシリコンの製造方法
US2843458A (en)	1958-07-15	Process for producing silicon tetrachloride
CN111971253B (zh)	2023-02-21	制备氯硅烷的方法
EP0620803A1 (fr)	1994-10-26	Procede de preparation de poudre de nitrure d'aluminium ultrafine
JPS61286211A (ja)	1986-12-16	クロロシランの製造法
US2762798A (en)	1956-09-11	Cyanuric chlorike
JPS58161915A (ja)	1983-09-26	トリクロロシランの製造方法
US3197283A (en)	1965-07-27	Process for the production of silicon tetrachloride
US5808128A (en)	1998-09-15	Method of manufacturing vinyltrichlorosilane
US3188178A (en)	1965-06-08	Process of producing silicon tetrahalide
US2942950A (en)	1960-06-28	Process for the production of silicon tetrachloride
JP2001226382A (ja)	2001-08-21	オルガノハロシランの製造方法
JP7381605B2 (ja)	2023-11-15	構造が最適化されたシリコン粒子を有するトリクロロシランの製造方法
JPH0297415A (ja)	1990-04-10	塩化水素又は塩化水素と塩素との混合物と金属珪素含有物質との反応の際に四塩化珪素の量を上昇させるための方法
US2399361A (en)	1946-04-30	Manufacture of cyanogen
US2621111A (en)	1952-12-09	Production of silicon chlorides
US5051248A (en)	1991-09-24	Silane products from reaction of silicon monoxide with hydrogen halides
US3560151A (en)	1971-02-02	Process for the production of finely divided silicon dioxide
US3681036A (en)	1972-08-01	Method of making silicon halides
JPS60145908A (ja)	1985-08-01	六塩化硅素の製造方法