CA1092009A - Etchant and process of etching - Google Patents

Etchant and process of etching

Info

Publication number
CA1092009A
CA1092009A CA290,979A CA290979A CA1092009A CA 1092009 A CA1092009 A CA 1092009A CA 290979 A CA290979 A CA 290979A CA 1092009 A CA1092009 A CA 1092009A
Authority
CA
Canada
Prior art keywords
molybdenum
etchant
peroxide
concentration
per liter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA290,979A
Other languages
English (en)
French (fr)
Inventor
Charles A. Gaputis
Oleh B. Dutkewych
Michael Gulla
Leonard R. Levy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/822,002 external-priority patent/US4130454A/en
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Application granted granted Critical
Publication of CA1092009A publication Critical patent/CA1092009A/en
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
CA290,979A 1977-09-30 1977-11-16 Etchant and process of etching Expired CA1092009A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US822,002 1977-09-30
US05/822,002 US4130454A (en) 1976-01-05 1977-09-30 Etchant and process of etching with the same

Publications (1)

Publication Number Publication Date
CA1092009A true CA1092009A (en) 1980-12-23

Family

ID=25234839

Family Applications (1)

Application Number Title Priority Date Filing Date
CA290,979A Expired CA1092009A (en) 1977-09-30 1977-11-16 Etchant and process of etching

Country Status (2)

Country Link
CA (1) CA1092009A (it)
IT (1) IT1159135B (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102321908A (zh) * 2011-09-02 2012-01-18 广州市天承化工有限公司 酸性氯化物蚀刻液的循环再生工艺方法及金属铜回收系统

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102321908A (zh) * 2011-09-02 2012-01-18 广州市天承化工有限公司 酸性氯化物蚀刻液的循环再生工艺方法及金属铜回收系统

Also Published As

Publication number Publication date
IT1159135B (it) 1987-02-25
IT7828151A0 (it) 1978-09-27

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Legal Events

Date Code Title Description
MKEX Expiry