CA1117193A - Ligne a retard electrique microminiature utilisant un reseau d'inductances en couches minces avec couplage magnetique perfectionne - Google Patents

Ligne a retard electrique microminiature utilisant un reseau d'inductances en couches minces avec couplage magnetique perfectionne

Info

Publication number: CA1117193A
Authority: CA; Canada
Prior art keywords: film; coils; delay line; coil; dielectric material
Prior art date: 1979-03-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA000323445A

Other languages

English (en)

Inventor

Stephen T.C. Chen

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hull Corp

Original Assignee

Hull Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1979-03-14

Filing date

1979-03-14

Publication date

1982-01-26

1979-03-14 Application filed by Hull Corp filed Critical Hull Corp

1979-03-14 Priority to CA000323445A priority Critical patent/CA1117193A/fr

1982-01-26 Application granted granted Critical

1982-01-26 Publication of CA1117193A publication Critical patent/CA1117193A/fr

Status Expired legal-status Critical Current

Links

239000010409 thin film Substances 0.000 title abstract 2
230000005291 magnetic effect Effects 0.000 title description 7
230000008878 coupling Effects 0.000 title description 3
238000010168 coupling process Methods 0.000 title description 3
238000005859 coupling reaction Methods 0.000 title description 3
229910052751 metal Inorganic materials 0.000 claims abstract description 27
239000002184 metal Substances 0.000 claims abstract description 27
230000035699 permeability Effects 0.000 claims abstract description 17
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 14
229910000889 permalloy Inorganic materials 0.000 claims abstract description 10
239000000758 substrate Substances 0.000 claims abstract description 10
239000010453 quartz Substances 0.000 claims abstract description 7
239000003989 dielectric material Substances 0.000 claims description 19
229910052814 silicon oxide Inorganic materials 0.000 claims description 7
239000007787 solid Substances 0.000 claims description 2
239000010408 film Substances 0.000 abstract description 37
238000000151 deposition Methods 0.000 abstract description 10
230000008021 deposition Effects 0.000 description 8
238000004519 manufacturing process Methods 0.000 description 5
238000000034 method Methods 0.000 description 4
150000002500 ions Chemical class 0.000 description 2
238000000427 thin-film deposition Methods 0.000 description 2
238000007740 vapor deposition Methods 0.000 description 2
NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
101001034843 Mus musculus Interferon-induced transmembrane protein 1 Proteins 0.000 description 1
NHWNVPNZGGXQQV-UHFFFAOYSA-J [Si+4].[O-]N=O.[O-]N=O.[O-]N=O.[O-]N=O Chemical compound [Si+4].[O-]N=O.[O-]N=O.[O-]N=O.[O-]N=O NHWNVPNZGGXQQV-UHFFFAOYSA-J 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
239000011521 glass Substances 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
239000010931 gold Substances 0.000 description 1
230000000873 masking effect Effects 0.000 description 1
229910000595 mu-metal Inorganic materials 0.000 description 1
229920000136 polysorbate Polymers 0.000 description 1
230000002226 simultaneous effect Effects 0.000 description 1

Landscapes

Semiconductor Integrated Circuits (AREA)
Coils Or Transformers For Communication (AREA)

CA000323445A 1979-03-14 1979-03-14 Ligne a retard electrique microminiature utilisant un reseau d'inductances en couches minces avec couplage magnetique perfectionne Expired CA1117193A (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CA000323445A CA1117193A (fr)	1979-03-14	1979-03-14	Ligne a retard electrique microminiature utilisant un reseau d'inductances en couches minces avec couplage magnetique perfectionne

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CA000323445A CA1117193A (fr)	1979-03-14	1979-03-14	Ligne a retard electrique microminiature utilisant un reseau d'inductances en couches minces avec couplage magnetique perfectionne

Publications (1)

Publication Number	Publication Date
CA1117193A true CA1117193A (fr)	1982-01-26

Family

ID=4113749

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000323445A Expired CA1117193A (fr)	1979-03-14	1979-03-14	Ligne a retard electrique microminiature utilisant un reseau d'inductances en couches minces avec couplage magnetique perfectionne

Country Status (1)

Country	Link
CA (1)	CA1117193A (fr)

1979
- 1979-03-14 CA CA000323445A patent/CA1117193A/fr not_active Expired

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Legal Events

Date	Code	Title	Description
1999-01-26	MKEX	Expiry