CA1129374A - Methode de deposition d'une couche de metal ou d'alliage metallique sur une piece conductrice d'electricite et dispositif de mise en oeuvre de ladite methode - Google Patents

Methode de deposition d'une couche de metal ou d'alliage metallique sur une piece conductrice d'electricite et dispositif de mise en oeuvre de ladite methode

Info

Publication number
CA1129374A
CA1129374A CA337,911A CA337911A CA1129374A CA 1129374 A CA1129374 A CA 1129374A CA 337911 A CA337911 A CA 337911A CA 1129374 A CA1129374 A CA 1129374A
Authority
CA
Canada
Prior art keywords
chamber
low
workpiece
donor medium
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA337,911A
Other languages
English (en)
Inventor
Wolfgang Kieferle
Franz Waschle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CA337,911A priority Critical patent/CA1129374A/fr
Application granted granted Critical
Publication of CA1129374A publication Critical patent/CA1129374A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
CA337,911A 1979-10-18 1979-10-18 Methode de deposition d'une couche de metal ou d'alliage metallique sur une piece conductrice d'electricite et dispositif de mise en oeuvre de ladite methode Expired CA1129374A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA337,911A CA1129374A (fr) 1979-10-18 1979-10-18 Methode de deposition d'une couche de metal ou d'alliage metallique sur une piece conductrice d'electricite et dispositif de mise en oeuvre de ladite methode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA337,911A CA1129374A (fr) 1979-10-18 1979-10-18 Methode de deposition d'une couche de metal ou d'alliage metallique sur une piece conductrice d'electricite et dispositif de mise en oeuvre de ladite methode

Publications (1)

Publication Number Publication Date
CA1129374A true CA1129374A (fr) 1982-08-10

Family

ID=4115375

Family Applications (1)

Application Number Title Priority Date Filing Date
CA337,911A Expired CA1129374A (fr) 1979-10-18 1979-10-18 Methode de deposition d'une couche de metal ou d'alliage metallique sur une piece conductrice d'electricite et dispositif de mise en oeuvre de ladite methode

Country Status (1)

Country Link
CA (1) CA1129374A (fr)

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