CA1238295A - Methode de depot sur des substrats de ceramique et des creusets de quartz d'un materiau electriquement transforme en vapeur - Google Patents

Methode de depot sur des substrats de ceramique et des creusets de quartz d'un materiau electriquement transforme en vapeur

Info

Publication number: CA1238295A
Authority: CA; Canada
Prior art keywords: electrode; metal; electrodes; substrate; method defined
Prior art date: 1984-05-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA000476016A

Other languages

English (en)

Inventor

Eduard Pinkhasov

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Wedtech Corp

Original Assignee

Wedtech Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-05-25

Filing date

1985-03-07

Publication date

1988-06-21

1984-05-25 Priority claimed from US06/614,434 external-priority patent/US4505948A/en

1984-06-29 Priority claimed from US06/626,056 external-priority patent/US4537794A/en

1984-11-02 Priority claimed from US06/667,641 external-priority patent/US4596719A/en

1985-03-07 Application filed by Wedtech Corp filed Critical Wedtech Corp

1988-06-21 Application granted granted Critical

1988-06-21 Publication of CA1238295A publication Critical patent/CA1238295A/fr

Status Expired legal-status Critical Current

Links

239000000463 material Substances 0.000 title claims abstract description 29
239000000919 ceramic Substances 0.000 title claims abstract description 25
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 19
239000010453 quartz Substances 0.000 title claims abstract description 10
238000000576 coating method Methods 0.000 title claims description 52
238000000034 method Methods 0.000 title claims description 50
239000011248 coating agent Substances 0.000 title claims description 42
239000012808 vapor phase Substances 0.000 title description 4
239000000758 substrate Substances 0.000 claims abstract description 88
229910052751 metal Inorganic materials 0.000 claims abstract description 82
239000002184 metal Substances 0.000 claims abstract description 82
229910052710 silicon Inorganic materials 0.000 claims abstract description 30
239000010703 silicon Substances 0.000 claims abstract description 30
150000002739 metals Chemical class 0.000 claims abstract description 16
230000008018 melting Effects 0.000 claims abstract description 7
238000002844 melting Methods 0.000 claims abstract description 7
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 36
229910052721 tungsten Inorganic materials 0.000 claims description 36
239000010937 tungsten Substances 0.000 claims description 36
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 34
229910052802 copper Inorganic materials 0.000 claims description 34
239000010949 copper Substances 0.000 claims description 34
239000003870 refractory metal Substances 0.000 claims description 21
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 15
229910052719 titanium Inorganic materials 0.000 claims description 14
239000010936 titanium Substances 0.000 claims description 14
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
229910045601 alloy Inorganic materials 0.000 claims description 10
239000000956 alloy Substances 0.000 claims description 10
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 10
229910052737 gold Inorganic materials 0.000 claims description 10
239000010931 gold Substances 0.000 claims description 10
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 6
229910052750 molybdenum Inorganic materials 0.000 claims description 6
239000011733 molybdenum Substances 0.000 claims description 6
229910052759 nickel Inorganic materials 0.000 claims description 6
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 5
229910052709 silver Inorganic materials 0.000 claims description 5
239000004332 silver Substances 0.000 claims description 5
229910052726 zirconium Inorganic materials 0.000 claims description 5
229910052715 tantalum Inorganic materials 0.000 claims description 4
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
238000007788 roughening Methods 0.000 claims description 3
230000007704 transition Effects 0.000 claims description 3
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 3
238000005422 blasting Methods 0.000 claims 1
239000002245 particle Substances 0.000 claims 1
239000011819 refractory material Substances 0.000 claims 1
239000011364 vaporized material Substances 0.000 claims 1
230000001681 protective effect Effects 0.000 abstract description 3
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 28
230000000694 effects Effects 0.000 description 13
238000000151 deposition Methods 0.000 description 11
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
239000004065 semiconductor Substances 0.000 description 9
235000012239 silicon dioxide Nutrition 0.000 description 9
229910052799 carbon Inorganic materials 0.000 description 8
238000001704 evaporation Methods 0.000 description 8
230000008020 evaporation Effects 0.000 description 7
230000008021 deposition Effects 0.000 description 6
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 6
229910010271 silicon carbide Inorganic materials 0.000 description 6
241000282320 Panthera leo Species 0.000 description 5
229910052782 aluminium Inorganic materials 0.000 description 5
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
238000010438 heat treatment Methods 0.000 description 5
239000003381 stabilizer Substances 0.000 description 5
238000007740 vapor deposition Methods 0.000 description 5
230000001976 improved effect Effects 0.000 description 4
238000004519 manufacturing process Methods 0.000 description 4
239000000203 mixture Substances 0.000 description 4
239000000377 silicon dioxide Substances 0.000 description 4
235000012431 wafers Nutrition 0.000 description 4
238000010586 diagram Methods 0.000 description 3
150000001247 metal acetylides Chemical class 0.000 description 3
238000013021 overheating Methods 0.000 description 3
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
239000012071 phase Substances 0.000 description 3
230000008569 process Effects 0.000 description 3
229910021332 silicide Inorganic materials 0.000 description 3
229920003002 synthetic resin Polymers 0.000 description 3
239000000057 synthetic resin Substances 0.000 description 3
230000009466 transformation Effects 0.000 description 3
UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
229910052581 Si3N4 Inorganic materials 0.000 description 2
230000008033 biological extinction Effects 0.000 description 2
238000005524 ceramic coating Methods 0.000 description 2
239000007789 gas Substances 0.000 description 2
230000006698 induction Effects 0.000 description 2
230000001939 inductive effect Effects 0.000 description 2
239000007791 liquid phase Substances 0.000 description 2
239000000155 melt Substances 0.000 description 2
230000004048 modification Effects 0.000 description 2
238000012986 modification Methods 0.000 description 2
150000004767 nitrides Chemical class 0.000 description 2
239000011253 protective coating Substances 0.000 description 2
238000005488 sandblasting Methods 0.000 description 2
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
239000007787 solid Substances 0.000 description 2
MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
238000009834 vaporization Methods 0.000 description 2
230000008016 vaporization Effects 0.000 description 2
ODPOAESBSUKMHD-UHFFFAOYSA-L 6,7-dihydrodipyrido[1,2-b:1',2'-e]pyrazine-5,8-diium;dibromide Chemical compound [Br-].[Br-].C1=CC=[N+]2CC[N+]3=CC=CC=C3C2=C1 ODPOAESBSUKMHD-UHFFFAOYSA-L 0.000 description 1
241001388118 Anisotremus taeniatus Species 0.000 description 1
229910052582 BN Inorganic materials 0.000 description 1
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
229910000881 Cu alloy Inorganic materials 0.000 description 1
239000005630 Diquat Substances 0.000 description 1
240000002989 Euphorbia neriifolia Species 0.000 description 1
241001461123 Matrona Species 0.000 description 1
230000001464 adherent effect Effects 0.000 description 1
239000012298 atmosphere Substances 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
238000009835 boiling Methods 0.000 description 1
-1 brides Inorganic materials 0.000 description 1
238000009833 condensation Methods 0.000 description 1
230000005494 condensation Effects 0.000 description 1
238000001816 cooling Methods 0.000 description 1
229910003460 diamond Inorganic materials 0.000 description 1
239000010432 diamond Substances 0.000 description 1
230000003292 diminished effect Effects 0.000 description 1
239000000428 dust Substances 0.000 description 1
239000000975 dye Substances 0.000 description 1
239000007772 electrode material Substances 0.000 description 1
230000003628 erosive effect Effects 0.000 description 1
PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 description 1
229910002804 graphite Inorganic materials 0.000 description 1
239000010439 graphite Substances 0.000 description 1
239000012535 impurity Substances 0.000 description 1
238000011065 in-situ storage Methods 0.000 description 1
238000011835 investigation Methods 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
239000007788 liquid Substances 0.000 description 1
230000000873 masking effect Effects 0.000 description 1
235000015255 meat loaf Nutrition 0.000 description 1
230000007246 mechanism Effects 0.000 description 1
229910001092 metal group alloy Inorganic materials 0.000 description 1
239000002923 metal particle Substances 0.000 description 1
230000005012 migration Effects 0.000 description 1
238000013508 migration Methods 0.000 description 1
239000012299 nitrogen atmosphere Substances 0.000 description 1
230000001590 oxidative effect Effects 0.000 description 1
230000000737 periodic effect Effects 0.000 description 1
239000003380 propellant Substances 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
230000004044 response Effects 0.000 description 1
230000000630 rising effect Effects 0.000 description 1
239000004576 sand Substances 0.000 description 1
230000035945 sensitivity Effects 0.000 description 1
FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
229910000679 solder Inorganic materials 0.000 description 1
238000005476 soldering Methods 0.000 description 1
239000007790 solid phase Substances 0.000 description 1
230000000087 stabilizing effect Effects 0.000 description 1
230000008093 supporting effect Effects 0.000 description 1
239000010409 thin film Substances 0.000 description 1
238000000844 transformation Methods 0.000 description 1
239000002699 waste material Substances 0.000 description 1
238000003466 welding Methods 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/126—Detonation spraying
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Materials Engineering (AREA)
Organic Chemistry (AREA)
Chemical Kinetics & Catalysis (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Structural Engineering (AREA)
Plasma & Fusion (AREA)
Physics & Mathematics (AREA)
Physical Vapour Deposition (AREA)
Other Surface Treatments For Metallic Materials (AREA)
Laminated Bodies (AREA)

CA000476016A 1984-05-25 1985-03-07 Methode de depot sur des substrats de ceramique et des creusets de quartz d'un materiau electriquement transforme en vapeur Expired CA1238295A (fr)

Applications Claiming Priority (6)

Application Number	Priority Date	Filing Date	Title
US06/614,434 US4505948A (en)	1983-05-13	1984-05-25	Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase
US626,056		1984-06-29
US06/626,056 US4537794A (en)	1981-02-24	1984-06-29	Method of coating ceramics
US06/667,641 US4596719A (en)	1981-02-24	1984-11-02	Multilayer coating method and apparatus
US667,641		1984-11-02
US614,434		1990-11-16

Publications (1)

Publication Number	Publication Date
CA1238295A true CA1238295A (fr)	1988-06-21

Family

ID=27417126

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000476016A Expired CA1238295A (fr)	1984-05-25	1985-03-07	Methode de depot sur des substrats de ceramique et des creusets de quartz d'un materiau electriquement transforme en vapeur

Country Status (8)

Country	Link
JP (1)	JPH03158478A (fr)
CA (1)	CA1238295A (fr)
DE (1)	DE3508690A1 (fr)
FR (1)	FR2564865B1 (fr)
GB (2)	GB2167774B (fr)
IL (1)	IL74360A (fr)
IT (1)	IT1200418B (fr)
SE (1)	SE8501281L (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3930832A1 (de) *	1989-09-15	1991-03-28	Nishibori Mineo	Vorrichtung und verfahren zum beschichten von werkstuecken mittels bogenentladung
DE69128715D1 (de) *	1991-03-27	1998-02-19	Inst Elektroswarki Patona	Verfahren und vorrichtung zum herstellen von metallprodukten durch plasma-detonation
RU2121522C1 (ru) *	1997-02-05	1998-11-10	Научно-исследовательский институт измерительных систем	Испаритель
DE19845804C2 (de)	1998-09-30	2000-11-30	Tacr Turbine Airfoil Coating A	Verfahren und Anordnung zum Erwärmen von Metallbauteilen mit Elektronenbestrahlung in einer Vakuumkammer
US20070026205A1 (en)	2005-08-01	2007-02-01	Vapor Technologies Inc.	Article having patterned decorative coating
CN105506561B (zh) *	2015-12-25	2018-05-18	中国航空工业集团公司北京航空制造工程研究所	抑制叶片耐冲蚀涂层制备过程中边缘效应的方法

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BE419531A (fr) *	1936-02-01
DE676733C (de) *	1937-02-07	1939-06-10	Siemens & Halske Akt Ges	Verdampfen von Legierungen im Hochvakuum
NL142824C (fr) *	1963-04-19
GB1257015A (fr) *	1967-11-03	1971-12-15
LU58252A1 (fr) *	1968-03-22	1969-07-11
BE769262A (fr) *	1971-06-29	1971-12-29	Centre Rech Metallurgique	Procede de depot d'un revetement inoxydable au nickel-chrome.
US3793179A (en) *	1971-07-19	1974-02-19	L Sablev	Apparatus for metal evaporation coating
GB1368010A (en) *	1971-12-27	1974-09-25	Airco Inc	Vapour deposition process
US3889632A (en) *	1974-05-31	1975-06-17	Ibm	Variable incidence drive for deposition tooling
DE2450834C3 (de) *	1974-10-25	1984-06-28	Standard Elektrik Lorenz Ag, 7000 Stuttgart	Verfahren zum Aluminisieren der Innenseite der Schirmwanne einer Fernsehbildröhre
CH619344B (de) *	1977-12-23		Balzers Hochvakuum	Verfahren zur herstellung goldfarbener ueberzuege.
CH640886A5 (de) *	1979-08-02	1984-01-31	Balzers Hochvakuum	Verfahren zum aufbringen harter verschleissfester ueberzuege auf unterlagen.
JPS5635767A (en) *	1979-08-30	1981-04-08	Fuji Kinzoku Kako:Kk	Basket type electrostatic plating apparatus and plating method
JPS5635768A (en) *	1979-08-30	1981-04-08	Inoue Japax Res Inc	Vapor depositing apparatus
CH624817B (de) *	1979-09-04		Balzers Hochvakuum	Verfahren zur herstellung goldfarbener ueberzuege.
GB2106545B (en) *	1981-02-23	1985-06-26	Rimma Ivanovna Stupak	Consumable cathode for electric-arc evaporator of metal
US4351855A (en) *	1981-02-24	1982-09-28	Eduard Pinkhasov	Noncrucible method of and apparatus for the vapor deposition of material upon a substrate using voltaic arc in vacuum
US4438153A (en) *	1981-02-24	1984-03-20	Welbilt Electronics Die Corporation	Method of and apparatus for the vapor deposition of material upon a substrate
US4609564C2 (en) *	1981-02-24	2001-10-09	Masco Vt Inc	Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase
JPS5881976A (ja) *	1981-11-06	1983-05-17	Toru Mashida	装飾体の製造法
JPS58136775A (ja) *	1982-02-08	1983-08-13	Hitachi Ltd	蒸着方法及び装置
JPS5950177A (ja) *	1982-09-16	1984-03-23	Kobe Steel Ltd	密着性に優れた金属表面処理法
AT376460B (de) *	1982-09-17	1984-11-26	Kljuchko Gennady V	Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen

1985
- 1985-02-17 IL IL74360A patent/IL74360A/xx unknown
- 1985-03-05 GB GB08521329A patent/GB2167774B/en not_active Expired
- 1985-03-07 CA CA000476016A patent/CA1238295A/fr not_active Expired
- 1985-03-08 GB GB08506046A patent/GB2159540B/en not_active Expired
- 1985-03-12 DE DE19853508690 patent/DE3508690A1/de not_active Withdrawn
- 1985-03-12 FR FR8504056A patent/FR2564865B1/fr not_active Expired
- 1985-03-15 SE SE8501281A patent/SE8501281L/ not_active Application Discontinuation
- 1985-03-15 IT IT19918/85A patent/IT1200418B/it active
1990
- 1990-10-19 JP JP2279519A patent/JPH03158478A/ja active Pending

Also Published As

Publication number	Publication date
SE8501281D0 (sv)	1985-03-15
IL74360A0 (en)	1985-05-31
IT1200418B (it)	1989-01-18
GB2167774B (en)	1988-10-05
GB8521329D0 (en)	1985-10-02
FR2564865A1 (fr)	1985-11-29
GB2159540B (en)	1988-10-05
GB2159540A (en)	1985-12-04
IL74360A (en)	1989-01-31
JPH03158478A (ja)	1991-07-08
FR2564865B1 (fr)	1988-01-15
GB8506046D0 (en)	1985-04-11
IT8519918A0 (it)	1985-03-15
DE3508690A1 (de)	1985-11-28
GB2167774A (en)	1986-06-04
SE8501281L (sv)	1985-11-26

Legal Events

Date	Code	Title	Description
2005-06-21	MKEX	Expiry

Publication	Publication Date	Title
US4505948A (en)	1985-03-19	Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase
CA1193494A (fr)	1985-09-17	Methode et dispositif de deposition par vaporisation d'un materiau sur un substrat
JPH0633451B2 (ja)	1994-05-02	被加工物の表面処理方法
CA1238295A (fr)	1988-06-21	Methode de depot sur des substrats de ceramique et des creusets de quartz d'un materiau electriquement transforme en vapeur
US3860444A (en)	1975-01-14	Coating of workpieces by vapor deposition
US4438153A (en)	1984-03-20	Method of and apparatus for the vapor deposition of material upon a substrate
US4548670A (en)	1985-10-22	Silicon melting and evaporation method for high purity applications
CA1247946A (fr)	1989-01-03	Methode et dispositif de deposition de couches protectrices pour creusets de quartz
US4048348A (en)	1977-09-13	Method of applying a fused silica coating to a substrate
US5380415A (en)	1995-01-10	Vacuum vapor deposition
US4978556A (en)	1990-12-18	Electrode for vapor deposition and vapor-deposition method using same
US4596719A (en)	1986-06-24	Multilayer coating method and apparatus
US4924135A (en)	1990-05-08	Electrode for vapor deposition and vapor-deposition method using same
JPS60251184A (ja)	1985-12-11	基体をコ−テイングする方法
SU1227280A1 (ru)	1986-04-30	Способ очистки поверхности металлических изделий
JP2004211122A (ja)	2004-07-29	高耐電圧性部材
CA2271933C (fr)	2003-07-15	Bains d'evaporation en ceramique ayant une performance initiale amelioree contre l'humidite et ses proprietes
RU2597447C2 (ru)	2016-09-10	Лазерный способ получения функциональных покрытий
US4569307A (en)	1986-02-11	Silicon melting and evaporation apparatus for high purity applications
SU1637977A1 (ru)	1991-03-30	Способ нанесени металлических покрытий
RU2171859C1 (ru)	2001-08-10	Способ получения алмазоподобных пленок из углеводородных соединений
RU2198239C2 (ru)	2003-02-10	Способ плазменного нанесения покрытия
JPH0788359A (ja)	1995-04-04	化合物膜の成膜方法及び成膜装置
Demchyshyn et al.	2002	Linear Vacuum ARC Evaporators for Deposition of Functional Multi-Purpose Coatings
Poorman et al.	1995	Vacuum vapor deposition