CA1271049A - Transducteur a semiconducteur - Google Patents
Transducteur a semiconducteurInfo
- Publication number
- CA1271049A CA1271049A CA000508500A CA508500A CA1271049A CA 1271049 A CA1271049 A CA 1271049A CA 000508500 A CA000508500 A CA 000508500A CA 508500 A CA508500 A CA 508500A CA 1271049 A CA1271049 A CA 1271049A
- Authority
- CA
- Canada
- Prior art keywords
- well
- diaphragm
- transducer
- set forth
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 86
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 230000002093 peripheral effect Effects 0.000 claims description 20
- 230000004044 response Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000002463 transducing effect Effects 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000026683 transduction Effects 0.000 description 1
- 238000010361 transduction Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000508500A CA1271049A (fr) | 1986-05-06 | 1986-05-06 | Transducteur a semiconducteur |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000508500A CA1271049A (fr) | 1986-05-06 | 1986-05-06 | Transducteur a semiconducteur |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1271049A true CA1271049A (fr) | 1990-07-03 |
Family
ID=4133072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000508500A Expired CA1271049A (fr) | 1986-05-06 | 1986-05-06 | Transducteur a semiconducteur |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1271049A (fr) |
-
1986
- 1986-05-06 CA CA000508500A patent/CA1271049A/fr not_active Expired
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |