CA1290656C - Diffusion du zinc dans le phosphure d'indium - Google Patents

Diffusion du zinc dans le phosphure d'indium

Info

Publication number
CA1290656C
CA1290656C CA000495084A CA495084A CA1290656C CA 1290656 C CA1290656 C CA 1290656C CA 000495084 A CA000495084 A CA 000495084A CA 495084 A CA495084 A CA 495084A CA 1290656 C CA1290656 C CA 1290656C
Authority
CA
Canada
Prior art keywords
zinc
cadmium
diffusion
indium
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA000495084A
Other languages
English (en)
Inventor
Anthony J. Springthorpe
Agnes Margittai
David Eger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumentum Technology UK Ltd
Original Assignee
Northern Telecom Ltd
Bookham Technology PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northern Telecom Ltd, Bookham Technology PLC filed Critical Northern Telecom Ltd
Priority to CA000495084A priority Critical patent/CA1290656C/fr
Priority to NL8602385A priority patent/NL8602385A/nl
Priority to JP61258701A priority patent/JPS62114216A/ja
Application granted granted Critical
Publication of CA1290656C publication Critical patent/CA1290656C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/12—Diffusion of dopants within, into or out of semiconductor bodies or layers between a solid phase and a gaseous phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C23C10/08—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases only one element being diffused
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/174—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being Group III-V material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
CA000495084A 1985-11-12 1985-11-12 Diffusion du zinc dans le phosphure d'indium Expired - Lifetime CA1290656C (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA000495084A CA1290656C (fr) 1985-11-12 1985-11-12 Diffusion du zinc dans le phosphure d'indium
NL8602385A NL8602385A (nl) 1985-11-12 1986-09-22 Diffusie van zink in indiumfosfide.
JP61258701A JPS62114216A (ja) 1985-11-12 1986-10-31 インジウム燐化物中への亜鉛拡散

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000495084A CA1290656C (fr) 1985-11-12 1985-11-12 Diffusion du zinc dans le phosphure d'indium

Publications (1)

Publication Number Publication Date
CA1290656C true CA1290656C (fr) 1991-10-15

Family

ID=4131863

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000495084A Expired - Lifetime CA1290656C (fr) 1985-11-12 1985-11-12 Diffusion du zinc dans le phosphure d'indium

Country Status (3)

Country Link
JP (1) JPS62114216A (fr)
CA (1) CA1290656C (fr)
NL (1) NL8602385A (fr)

Also Published As

Publication number Publication date
NL8602385A (nl) 1987-06-01
JPS62114216A (ja) 1987-05-26

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