CA1315111C - Pompe cryostatique a etagement optimal - Google Patents
Pompe cryostatique a etagement optimalInfo
- Publication number
- CA1315111C CA1315111C CA000557461A CA557461A CA1315111C CA 1315111 C CA1315111 C CA 1315111C CA 000557461 A CA000557461 A CA 000557461A CA 557461 A CA557461 A CA 557461A CA 1315111 C CA1315111 C CA 1315111C
- Authority
- CA
- Canada
- Prior art keywords
- temperature
- stage
- cryopump
- gases
- adsorbent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007789 gas Substances 0.000 claims abstract description 66
- 238000005086 pumping Methods 0.000 claims abstract description 44
- 239000003463 adsorbent Substances 0.000 claims abstract description 43
- 239000001257 hydrogen Substances 0.000 claims description 11
- 229910052739 hydrogen Inorganic materials 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 6
- 238000011069 regeneration method Methods 0.000 claims description 5
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 230000008929 regeneration Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 8
- 238000009833 condensation Methods 0.000 claims 3
- 230000005494 condensation Effects 0.000 claims 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 abstract description 9
- 238000009835 boiling Methods 0.000 description 10
- 230000005855 radiation Effects 0.000 description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 8
- 239000003610 charcoal Substances 0.000 description 7
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 229910052754 neon Inorganic materials 0.000 description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000010457 zeolite Substances 0.000 description 2
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US737087A | 1987-01-27 | 1987-01-27 | |
| US007,370 | 1987-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1315111C true CA1315111C (fr) | 1993-03-30 |
Family
ID=21725773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000557461A Expired - Fee Related CA1315111C (fr) | 1987-01-27 | 1988-01-27 | Pompe cryostatique a etagement optimal |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0349577B1 (fr) |
| JP (1) | JP2597696B2 (fr) |
| CA (1) | CA1315111C (fr) |
| DE (1) | DE3852303T2 (fr) |
| WO (1) | WO1988005500A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102033142B1 (ko) * | 2011-02-09 | 2019-10-16 | 브룩스 오토메이션, 인크. | 극저온 펌프 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3218815A (en) * | 1964-06-17 | 1965-11-23 | Little Inc A | Cryogenic refrigeration apparatus operating on an expansible fluid and embodying a regenerator |
| DE3046458A1 (de) * | 1980-12-10 | 1982-07-15 | Leybold-Heraeus GmbH, 5000 Köln | Refrigerator-kryostat |
| US4438632A (en) * | 1982-07-06 | 1984-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
| DE3330146A1 (de) * | 1982-09-17 | 1984-03-22 | Balzers Hochvakuum Gmbh, 6200 Wiesbaden | Vorrichtung und verfahren zur schnellen regeneration von autonomen kryopumpen |
| US4593530A (en) * | 1984-04-10 | 1986-06-10 | Air Products And Chemicals, Inc. | Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump |
| DE3512614A1 (de) * | 1985-04-06 | 1986-10-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe |
-
1988
- 1988-01-27 CA CA000557461A patent/CA1315111C/fr not_active Expired - Fee Related
- 1988-01-27 WO PCT/US1988/000225 patent/WO1988005500A1/fr not_active Ceased
- 1988-01-27 DE DE3852303T patent/DE3852303T2/de not_active Expired - Fee Related
- 1988-01-27 EP EP88902995A patent/EP0349577B1/fr not_active Expired - Lifetime
- 1988-01-27 JP JP63502773A patent/JP2597696B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2597696B2 (ja) | 1997-04-09 |
| DE3852303D1 (de) | 1995-01-12 |
| EP0349577A1 (fr) | 1990-01-10 |
| WO1988005500A1 (fr) | 1988-07-28 |
| EP0349577B1 (fr) | 1994-11-30 |
| JPH02502034A (ja) | 1990-07-05 |
| DE3852303T2 (de) | 1995-05-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4763483A (en) | Cryopump and method of starting the cryopump | |
| US5001903A (en) | Optimally staged cryopump | |
| EP0397251B1 (fr) | Méthode de production des dispositifs à vide et des détecteurs infrarouges avec un getter | |
| JP4356250B2 (ja) | 無線受信機 | |
| US4356701A (en) | Cryopump | |
| US5517823A (en) | Pressure controlled cryopump regeneration method and system | |
| EP0332107B1 (fr) | Pompe turbomoléculaire et son procédé d'opération | |
| KR100239605B1 (ko) | 저온 펌프 | |
| EP0464893A1 (fr) | Détecteurs aux infrarouges et leur préparation | |
| US7320224B2 (en) | Method and apparatus for detecting and measuring state of fullness in cryopumps | |
| WO1992014057A1 (fr) | Cryopompe a passage de second etage ameliore | |
| US5345787A (en) | Miniature cryosorption vacuum pump | |
| CA1221553A (fr) | Cryopompe a capacite d'adsorption accrue | |
| EP3710699B1 (fr) | Cryopompe à réseau frontal amélioré | |
| US4966016A (en) | Cryopump with multiple refrigerators | |
| JP3192143B2 (ja) | 差動ポンピング能力を備えたクライオポンプ | |
| CA1315111C (fr) | Pompe cryostatique a etagement optimal | |
| US4454722A (en) | Cryopump | |
| EP0506133B1 (fr) | Cryopompe | |
| KR100706818B1 (ko) | 크라이오 펌프 | |
| US4896511A (en) | Optimally staged cryopump | |
| EP0126909B1 (fr) | Pompe cryostatique avec réfrigération rapide et stabilité de pression améliorée | |
| JP2943489B2 (ja) | 真空排気装置のコールドトラップ | |
| Piltingsrud | Miniature cryosorption vacuum pump for portable instruments | |
| JPH11141460A (ja) | クライオポンプの再生装置およびクライオポンプの再生方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |