CA1322107C - Accelerometre integre - Google Patents

Accelerometre integre

Info

Publication number: CA1322107C
Authority: CA; Canada
Prior art keywords: assembly; pendulous member; diode; integrated assembly; support base
Prior art date: 1989-06-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

CA000601962A

Other languages

English (en)

Inventor

Henry C. Abbink

Nicholas F. Pier

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Northrop Grumman Guidance and Electronics Co Inc

Original Assignee

Litton Systems Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-06-07

Filing date

1989-06-07

Publication date

1993-09-14

1989-06-07 Application filed by Litton Systems Inc filed Critical Litton Systems Inc

1989-06-07 Priority to CA000601962A priority Critical patent/CA1322107C/fr

1989-07-13 Priority to GB8916067A priority patent/GB2234817B/en

1989-08-21 Priority to DE3927546A priority patent/DE3927546A1/de

1989-09-15 Priority to FR8912089A priority patent/FR2657169B1/fr

1993-09-14 Application granted granted Critical

1993-09-14 Publication of CA1322107C publication Critical patent/CA1322107C/fr

2010-09-14 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

229910052751 metal Inorganic materials 0.000 claims abstract description 13
239000002184 metal Substances 0.000 claims abstract description 13
239000004020 conductor Substances 0.000 claims description 29
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
229910052802 copper Inorganic materials 0.000 claims description 14
239000010949 copper Substances 0.000 claims description 14
238000004873 anchoring Methods 0.000 claims description 4
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
239000000919 ceramic Substances 0.000 abstract description 2
238000010923 batch production Methods 0.000 abstract 1
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230000001133 acceleration Effects 0.000 description 7
239000000853 adhesive Substances 0.000 description 6
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XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
230000000712 assembly Effects 0.000 description 4
238000000429 assembly Methods 0.000 description 4
230000004907 flux Effects 0.000 description 4
239000000463 material Substances 0.000 description 4
229910000639 Spring steel Inorganic materials 0.000 description 3
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239000006088 Fotoceram Substances 0.000 description 1
229910000831 Steel Inorganic materials 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
238000005452 bending Methods 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
229910010293 ceramic material Inorganic materials 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
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238000011109 contamination Methods 0.000 description 1
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238000005530 etching Methods 0.000 description 1
238000010304 firing Methods 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
239000010931 gold Substances 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
229940090044 injection Drugs 0.000 description 1
238000002347 injection Methods 0.000 description 1
239000007924 injection Substances 0.000 description 1
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Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Electromagnetism (AREA)
Air Bags (AREA)
Micromachines (AREA)

CA000601962A 1989-06-07 1989-06-07 Accelerometre integre Expired - Fee Related CA1322107C (fr)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
CA000601962A CA1322107C (fr)	1989-06-07	1989-06-07	Accelerometre integre
GB8916067A GB2234817B (en)	1989-06-07	1989-07-13	Integrated accelerometer assembly
DE3927546A DE3927546A1 (de)	1989-06-07	1989-08-21	Beschleunigungsmesser
FR8912089A FR2657169B1 (fr)	1989-06-07	1989-09-15	Ensemble integre pour accelerometre sec.

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
CA000601962A CA1322107C (fr)	1989-06-07	1989-06-07	Accelerometre integre
GB8916067A GB2234817B (en)	1989-06-07	1989-07-13	Integrated accelerometer assembly

Publications (1)

Publication Number	Publication Date
CA1322107C true CA1322107C (fr)	1993-09-14

Family

ID=25672788

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000601962A Expired - Fee Related CA1322107C (fr)	1989-06-07	1989-06-07	Accelerometre integre

Country Status (4)

Country	Link
CA (1)	CA1322107C (fr)
DE (1)	DE3927546A1 (fr)
FR (1)	FR2657169B1 (fr)
GB (1)	GB2234817B (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2682766B1 (fr) *	1991-10-21	1995-07-13	Asulab Sa	Capteur de mesure d'une grandeur physique.

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3209601A (en) *	1962-08-16	1965-10-05	Gen Precision Inc	Quartz accelerometer
GB1149491A (en) *	1965-10-12	1969-04-23	Elliott Brothers London Ltd	Improvements in and relating to transducers
US4104920A (en) *	1977-04-01	1978-08-08	The Singer Company	Piezoelectric damping mechanism
FR2454103A1 (fr) *	1979-04-11	1980-11-07	Sagem	Perfectionnements aux accelerometres pendulaires asservis
US4495814A (en) *	1982-06-28	1985-01-29	Sundstrand Data Control, Inc.	Accelerometer pendulum support assembly
US4488445A (en) *	1983-10-28	1984-12-18	Honeywell Inc.	Integrated silicon accelerometer with cross-axis compensation
US4649748A (en) *	1984-03-30	1987-03-17	Kabushikikaisha Tokyo Keiki	Accelerometer
US4598586A (en) *	1984-08-31	1986-07-08	Northrop Corporation	Compensation of gain temperature coefficient in an optical pick-off for an accelerometer
US4748848A (en) *	1987-01-16	1988-06-07	Valentine Research, Inc.	Accelerometer
US4788864A (en) *	1987-05-26	1988-12-06	Litton Systems, Inc.	Bleed path for electric charge
US4987780A (en) *	1987-11-16	1991-01-29	Litton Systems, Inc.	Integrated accelerometer assembly

1989
- 1989-06-07 CA CA000601962A patent/CA1322107C/fr not_active Expired - Fee Related
- 1989-07-13 GB GB8916067A patent/GB2234817B/en not_active Expired - Fee Related
- 1989-08-21 DE DE3927546A patent/DE3927546A1/de not_active Ceased
- 1989-09-15 FR FR8912089A patent/FR2657169B1/fr not_active Expired - Fee Related

Also Published As

Publication number	Publication date
GB2234817A (en)	1991-02-13
FR2657169B1 (fr)	1994-01-21
FR2657169A1 (fr)	1991-07-19
GB8916067D0 (en)	1990-06-20
GB2234817B (en)	1993-08-04
DE3927546A1 (de)	1991-02-28

Legal Events

Date	Code	Title	Description
2009-09-14	MKLA	Lapsed

Publication	Publication Date	Title
EP0486657B1 (fr)	1994-12-28	Accelerometre a flexions isoles
EP0036935B1 (fr)	1985-05-29	Appareil à effet Hall et assemblage pour concentrer le flux magnétique
US5092174A (en)	1992-03-03	Capacitance accelerometer
US6918297B2 (en)	2005-07-19	Miniature 3-dimensional package for MEMS sensors
US6003380A (en)	1999-12-21	Strain gage pressure sensor wherein a gap is maintained between the diaphragm and the substrate
US5433110A (en)	1995-07-18	Detector having selectable multiple axes of sensitivity
US4691575A (en)	1987-09-08	Transducer inserts; methods of making them and sensors for measuring mechanical variables
EP0239386A2 (fr)	1987-09-30	Boîte dynamométrique et correction de sa température
US5440077A (en)	1995-08-08	Combined weighting and displacement sensor and weighing apparatus using the same
EP0542436A1 (fr)	1993-05-19	Accéléromètre
US6158283A (en)	2000-12-12	Semiconductor acceleration sensor
US4987780A (en)	1991-01-29	Integrated accelerometer assembly
CN113433345B (zh)	2022-12-20	一种集成摆式石英谐振加速度计结构及其装配方法
WO1991019987A1 (fr)	1991-12-26	Accelerometre muni d'une structure de montage/couplage pour un ensemble electronique
EP0652440B1 (fr)	1998-06-03	Dispositif capteur d'accélération et procédé pour sa fabrication
CA1322107C (fr)	1993-09-14	Accelerometre integre
US5693883A (en)	1997-12-02	Electromagnetic accelerometer
US4788864A (en)	1988-12-06	Bleed path for electric charge
EP0721108A2 (fr)	1996-07-10	Dispositif capteur pour condition d'accélération
EP0802417A2 (fr)	1997-10-22	Capteur d'accélération à semi-conducteur
JP2002090384A (ja)	2002-03-27	運動センサの構造および内部接続方法
Coppoolse et al.	2003	Dual-axis single-mirror mechanism for beam steering and stabilisation in optical inter satellite links
US5821595A (en)	1998-10-13	Carrier structure for transducers
JPS6148928A (ja)	1986-03-10	ハイブリッド集積回路
JP3614043B2 (ja)	2005-01-26	ロードセル