CA2070478A1 - Methode de fabrication de reseaux a emission par champ electrique - Google Patents

Methode de fabrication de reseaux a emission par champ electrique

Info

Publication number
CA2070478A1
CA2070478A1 CA002070478A CA2070478A CA2070478A1 CA 2070478 A1 CA2070478 A1 CA 2070478A1 CA 002070478 A CA002070478 A CA 002070478A CA 2070478 A CA2070478 A CA 2070478A CA 2070478 A1 CA2070478 A1 CA 2070478A1
Authority
CA
Canada
Prior art keywords
stack
layer
conductive layer
field
recited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002070478A
Other languages
English (en)
Inventor
Wolfgang M. Feist
William F. Stacey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2070478A1 publication Critical patent/CA2070478A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
CA002070478A 1991-06-27 1992-06-04 Methode de fabrication de reseaux a emission par champ electrique Abandoned CA2070478A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US72206391A 1991-06-27 1991-06-27
US722,063 1991-06-27

Publications (1)

Publication Number Publication Date
CA2070478A1 true CA2070478A1 (fr) 1992-12-28

Family

ID=24900372

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002070478A Abandoned CA2070478A1 (fr) 1991-06-27 1992-06-04 Methode de fabrication de reseaux a emission par champ electrique

Country Status (4)

Country Link
EP (1) EP0520780A1 (fr)
JP (1) JPH05190080A (fr)
KR (1) KR930001289A (fr)
CA (1) CA2070478A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2656851B2 (ja) * 1990-09-27 1997-09-24 工業技術院長 画像表示装置
US5696028A (en) * 1992-02-14 1997-12-09 Micron Technology, Inc. Method to form an insulative barrier useful in field emission displays for reducing surface leakage
EP0614209A1 (fr) * 1993-03-01 1994-09-07 Hewlett-Packard Company Panneau d'affichage plat
US5534743A (en) * 1993-03-11 1996-07-09 Fed Corporation Field emission display devices, and field emission electron beam source and isolation structure components therefor
FR2705830B1 (fr) * 1993-05-27 1995-06-30 Commissariat Energie Atomique Procédé de fabrication de dispositifs d'affichage à micropointes, utilisant la lithographie par ions lourds.
DE4421256C2 (de) * 1993-06-17 1998-10-01 Karlheinz Dipl Ing Bock Feldeffekt-Mikrotriodenanordnung
US5378182A (en) * 1993-07-22 1995-01-03 Industrial Technology Research Institute Self-aligned process for gated field emitters
US5473218A (en) * 1994-05-31 1995-12-05 Motorola, Inc. Diamond cold cathode using patterned metal for electron emission control
US5644187A (en) * 1994-11-25 1997-07-01 Motorola Collimating extraction grid conductor and method
EP0779642B1 (fr) * 1995-12-14 2000-09-13 STMicroelectronics S.r.l. Procédé de fabrication d'une structure de cathode à micropointes pour un panneau d'affichage à effet de champ
DE19609234A1 (de) * 1996-03-09 1997-09-11 Deutsche Telekom Ag Röhrensysteme und Herstellungsverfahren hierzu
US6022256A (en) 1996-11-06 2000-02-08 Micron Display Technology, Inc. Field emission display and method of making same
US6498349B1 (en) * 1997-02-05 2002-12-24 Ut-Battelle Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy
JP3494583B2 (ja) 1999-01-13 2004-02-09 松下電器産業株式会社 電子放出素子の製造方法
JP2000268706A (ja) 1999-03-18 2000-09-29 Matsushita Electric Ind Co Ltd 電子放出素子及びそれを用いた画像描画装置
JP2001210225A (ja) * 1999-11-12 2001-08-03 Sony Corp ゲッター、平面型表示装置及び平面型表示装置の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3753022A (en) * 1971-04-26 1973-08-14 Us Army Miniature, directed, electron-beam source
FR2593953B1 (fr) * 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
US5007873A (en) * 1990-02-09 1991-04-16 Motorola, Inc. Non-planar field emission device having an emitter formed with a substantially normal vapor deposition process
US5332627A (en) * 1990-10-30 1994-07-26 Sony Corporation Field emission type emitter and a method of manufacturing thereof

Also Published As

Publication number Publication date
JPH05190080A (ja) 1993-07-30
KR930001289A (ko) 1993-01-16
EP0520780A1 (fr) 1992-12-30

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Legal Events

Date Code Title Description
FZDE Dead