CA2084551C - Connexion de trajets de courant faits d'oxydes supraconducteurs - Google Patents
Connexion de trajets de courant faits d'oxydes supraconducteursInfo
- Publication number
- CA2084551C CA2084551C CA002084551A CA2084551A CA2084551C CA 2084551 C CA2084551 C CA 2084551C CA 002084551 A CA002084551 A CA 002084551A CA 2084551 A CA2084551 A CA 2084551A CA 2084551 C CA2084551 C CA 2084551C
- Authority
- CA
- Canada
- Prior art keywords
- superconducting
- oxide superconductor
- thin film
- substrate
- superconductor thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002887 superconductor Substances 0.000 title claims abstract description 149
- 239000000463 material Substances 0.000 title claims description 19
- 239000010409 thin film Substances 0.000 claims abstract description 74
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 150000001875 compounds Chemical class 0.000 claims description 6
- 229910015901 Bi-Sr-Ca-Cu-O Inorganic materials 0.000 claims description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical class [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 3
- 229910009203 Y-Ba-Cu-O Inorganic materials 0.000 claims description 3
- 230000005669 field effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 11
- 239000010408 film Substances 0.000 description 7
- 239000013078 crystal Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 101150090997 DLAT gene Proteins 0.000 description 1
- 230000005668 Josephson effect Effects 0.000 description 1
- 229910002370 SrTiO3 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Applications Claiming Priority (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34875791 | 1991-12-05 | ||
| JP348757/1991 | 1991-12-05 | ||
| JP348965/1991 | 1991-12-06 | ||
| JP34896591 | 1991-12-06 | ||
| JP350302/1991 | 1991-12-09 | ||
| JP35030291 | 1991-12-09 | ||
| JP352195/1991 | 1991-12-13 | ||
| JP35219591 | 1991-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2084551A1 CA2084551A1 (fr) | 1993-06-06 |
| CA2084551C true CA2084551C (fr) | 1998-04-21 |
Family
ID=27480693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002084551A Expired - Fee Related CA2084551C (fr) | 1991-12-05 | 1992-12-04 | Connexion de trajets de courant faits d'oxydes supraconducteurs |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH05251769A (fr) |
| CA (1) | CA2084551C (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2740460B2 (ja) * | 1994-12-07 | 1998-04-15 | 株式会社日立製作所 | 超電導回路 |
-
1992
- 1992-12-03 JP JP4350407A patent/JPH05251769A/ja not_active Withdrawn
- 1992-12-04 CA CA002084551A patent/CA2084551C/fr not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CA2084551A1 (fr) | 1993-06-06 |
| JPH05251769A (ja) | 1993-09-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |