CA2086401A1 - Procede de fabrication de membranes inorganiques ultra-minces - Google Patents

Procede de fabrication de membranes inorganiques ultra-minces

Info

Publication number
CA2086401A1
CA2086401A1 CA2086401A CA2086401A CA2086401A1 CA 2086401 A1 CA2086401 A1 CA 2086401A1 CA 2086401 A CA2086401 A CA 2086401A CA 2086401 A CA2086401 A CA 2086401A CA 2086401 A1 CA2086401 A1 CA 2086401A1
Authority
CA
Canada
Prior art keywords
inorganic membranes
oxygen
manufacturing ultrathin
processes
ultrathin inorganic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2086401A
Other languages
English (en)
Other versions
CA2086401C (fr
Inventor
Yue-Sheng Lin
Anthonie Jan Burggraaf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2086401A1 publication Critical patent/CA2086401A1/fr
Application granted granted Critical
Publication of CA2086401C publication Critical patent/CA2086401C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02Inorganic material
    • B01D71/024Oxides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039Inorganic membrane manufacture
    • B01D67/0072Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • B01J35/50Catalysts, in general, characterised by their form or physical properties characterised by their shape or configuration
    • B01J35/58Fabrics or filaments
    • B01J35/59Membranes
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02Preparation of oxygen
    • C01B13/0229Purification or separation processes
    • C01B13/0248Physical processing only
    • C01B13/0251Physical processing only by making use of membranes
    • C01B13/0255Physical processing only by making use of membranes characterised by the type of membrane
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C04B41/455Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application the coating or impregnating process including a chemical conversion or reaction
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/89Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/405Oxides of refractory metals or yttrium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/10Fuel cells with solid electrolytes
    • H01M8/12Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/124Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
    • H01M8/1246Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides
    • H01M8/1253Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides the electrolyte containing zirconium oxide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2323/00Details relating to membrane preparation
    • B01D2323/10Specific pressure applied
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00Purification or separation of specific gases
    • C01B2210/0043Impurity removed
    • C01B2210/0046Nitrogen
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00793Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
    • C04B2111/00801Membranes; Diaphragms
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Electrochemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
CA002086401A 1992-01-02 1992-12-29 Procede de fabrication de membranes inorganiques ultra-minces Expired - Fee Related CA2086401C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/816,206 US5160618A (en) 1992-01-02 1992-01-02 Method for manufacturing ultrathin inorganic membranes
US07/816206 1992-01-02

Publications (2)

Publication Number Publication Date
CA2086401A1 true CA2086401A1 (fr) 1993-07-03
CA2086401C CA2086401C (fr) 1997-01-28

Family

ID=25219966

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002086401A Expired - Fee Related CA2086401C (fr) 1992-01-02 1992-12-29 Procede de fabrication de membranes inorganiques ultra-minces

Country Status (7)

Country Link
US (1) US5160618A (fr)
EP (1) EP0550049B1 (fr)
JP (1) JP2554434B2 (fr)
CA (1) CA2086401C (fr)
DE (1) DE69217890T2 (fr)
ES (1) ES2101021T3 (fr)
NO (1) NO180151C (fr)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4117284A1 (de) * 1991-05-27 1992-12-03 Studiengesellschaft Kohle Mbh Verfahren zur herstellung von mikroporoesen keramikmembranen fuer die trennung von gas- und fluessigkeitsgemischen
US6165431A (en) * 1993-12-08 2000-12-26 Eltron Research, Inc. Methods for separating oxygen from oxygen-containing gases
US6033632A (en) * 1993-12-08 2000-03-07 Eltron Research, Inc. Solid state oxygen anion and electron mediating membrane and catalytic membrane reactors containing them
US6592782B2 (en) 1993-12-08 2003-07-15 Eltron Research, Inc. Materials and methods for the separation of oxygen from air
US5516359A (en) * 1993-12-17 1996-05-14 Air Products And Chemicals, Inc. Integrated high temperature method for oxygen production
US5565017A (en) * 1993-12-17 1996-10-15 Air Products And Chemicals, Inc. High temperature oxygen production with steam and power generation
US5447555A (en) * 1994-01-12 1995-09-05 Air Products And Chemicals, Inc. Oxygen production by staged mixed conductor membranes
US5534471A (en) * 1994-01-12 1996-07-09 Air Products And Chemicals, Inc. Ion transport membranes with catalyzed mixed conducting porous layer
US5599383A (en) * 1995-03-13 1997-02-04 Air Products And Chemicals, Inc. Tubular solid-state membrane module
US5766317A (en) * 1995-06-01 1998-06-16 Technology Management, Inc. Microspheres for combined oxygen separation, storage and delivery
US5910238A (en) * 1995-06-01 1999-06-08 Technology Management, Inc. Microspheres for combined oxygen separation, storage and delivery
US5562754A (en) * 1995-06-07 1996-10-08 Air Products And Chemicals, Inc. Production of oxygen by ion transport membranes with steam utilization
EP0747108B1 (fr) * 1995-06-07 2002-02-20 Air Products And Chemicals, Inc. Production d'oxygène avec des membanes de transport d'ions et récupération d'énergie
US6128822A (en) * 1997-02-07 2000-10-10 Nkk Corporation Method for repair and/or reinforcement of partition-type heat exchanger
EP1135328A1 (fr) 1998-12-02 2001-09-26 Massachusetts Institute Of Technology Micromembranes integrees a base de palladium pour la separation de l'hydrogene et reactions d'hydrogenation/de deshydrogenation
US6471921B1 (en) 1999-05-19 2002-10-29 Eltron Research, Inc. Mixed ionic and electronic conducting ceramic membranes for hydrocarbon processing
US7163713B2 (en) * 1999-07-31 2007-01-16 The Regents Of The University Of California Method for making dense crack free thin films
US6146549A (en) * 1999-08-04 2000-11-14 Eltron Research, Inc. Ceramic membranes for catalytic membrane reactors with high ionic conductivities and low expansion properties
JP2005513721A (ja) 2001-12-18 2005-05-12 ザ、リージェンツ、オブ、ザ、ユニバーシティ、オブ、カリフォルニア 酸化膜で保護された金属集電部
ATE508488T1 (de) * 2001-12-18 2011-05-15 Univ California Verfahren zur herstellung dichter dünnfilme
AU2003256251A1 (en) * 2002-04-24 2003-11-10 The Regents Of The University Of California Planar electrochemical device assembly
JP4960593B2 (ja) * 2002-05-07 2012-06-27 ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・カリフォルニア 電気化学的電池スタック組立体
JP2006501626A (ja) * 2002-05-29 2006-01-12 ザ・ボード・オブ・トラスティーズ・オブ・ザ・レランド・スタンフォード・ジュニア・ユニバーシティ 転位によりイオン伝導度が高められた固体酸化物電解質
US7338624B2 (en) * 2002-07-31 2008-03-04 Praxair Technology Inc. Ceramic manufacture for a composite ion transport membrane
CN1720633A (zh) * 2002-10-04 2006-01-11 加利福尼亚大学董事会 氟分离和生成装置
RU2236068C1 (ru) * 2003-06-10 2004-09-10 Мятиев Ата Атаевич Электрод-электролитная пара на основе двуокиси циркония (варианты), способ ее изготовления (варианты) и органогель
RU2240280C1 (ru) 2003-10-10 2004-11-20 Ворлд Бизнес Ассошиэйтс Лимитед Способ формирования упорядоченных волнообразных наноструктур (варианты)
US7547334B2 (en) * 2004-01-30 2009-06-16 General Motors Corporation Continuous reactor
US7641997B2 (en) * 2004-09-23 2010-01-05 Ut-Battelle Llc Design and synthesis of guest-host nanostructures to enhance ionic conductivity across nanocomposite membranes
US7604690B2 (en) * 2005-04-05 2009-10-20 Wostec, Inc. Composite material for ultra thin membranes
US20090139497A1 (en) * 2007-11-30 2009-06-04 Bo Shi Engine having thin film oxygen separation system
EP2237357B1 (fr) * 2009-03-23 2013-10-23 Sumitomo Metal Mining Co., Ltd. Structure de membrane électrolyte ionique, procédé pour sa fabrication et pile à combustible d'oxyde solide utilisant la structure de membrane électrolyte ionique
WO2013006077A1 (fr) 2011-07-06 2013-01-10 Wostec, Inc. Cellule solaire dotée d'une couche nanostructurée et procédés de fabrication et d'utilisation de celle-ci
EP2740162B1 (fr) 2011-08-05 2019-07-03 Wostec, Inc. Diode électroluminescente comportant une couche nanostructurée, procédé de fabrication de la diode électroluminescente et nano-masque utilisé dans le procédé.
US9057704B2 (en) 2011-12-12 2015-06-16 Wostec, Inc. SERS-sensor with nanostructured surface and methods of making and using
WO2013109157A1 (fr) 2012-01-18 2013-07-25 Wostec, Inc. Agencements à caractéristiques pyramidales ayant au moins une surface nanostructurée et leurs procédés de fabrication et d'utilisation
US9134250B2 (en) 2012-03-23 2015-09-15 Wostec, Inc. SERS-sensor with nanostructured layer and methods of making and using
WO2014142700A1 (fr) 2013-03-13 2014-09-18 Wostec Inc. Polariseur basé sur grille nanofilaire
EP3161857B1 (fr) 2014-06-26 2021-09-08 Wostec, Inc. Procédé de fabrication d'un nanomasque dur de type onde aligné sur une caractéristique topographique
JP2017024961A (ja) * 2015-07-27 2017-02-02 ニッポン高度紙工業株式会社 無機酸化物成形体の製造方法
US10672427B2 (en) 2016-11-18 2020-06-02 Wostec, Inc. Optical memory devices using a silicon wire grid polarizer and methods of making and using
WO2018156042A1 (fr) 2017-02-27 2018-08-30 Wostec, Inc. Polariseur à grille de nanofils sur une surface incurvée et procédés de fabrication et d'utilisation
US11819806B1 (en) 2018-10-15 2023-11-21 Ampcera Inc. Methods for manufacturing a solid state ionic conductive membrane on a macro porous support scaffold
US12154702B1 (en) 2018-10-15 2024-11-26 Ampcera Inc. Methods for manufacturing a freestanding solid state ionic conductive membrane
US11177498B1 (en) 2018-10-15 2021-11-16 Ampcera Inc. Redox flow batteries, components for redox flow batteries and methods for manufacture thereof
US11600853B1 (en) 2019-05-14 2023-03-07 Ampcera Inc. Systems and methods for storing, transporting, and handling of solid-state electrolytes

Family Cites Families (2)

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Publication number Priority date Publication date Assignee Title
US4902307A (en) * 1988-11-18 1990-02-20 California Institute Of Technology Synthesis of SiO2 membrane on porous support and method of use of same
US5106654A (en) * 1990-07-20 1992-04-21 Westinghouse Electric Corp. Method of forming a dense, high temperature electronically conductive composite layer on a porous ceramic substrate

Also Published As

Publication number Publication date
ES2101021T3 (es) 1997-07-01
EP0550049B1 (fr) 1997-03-05
NO925026D0 (no) 1992-12-28
DE69217890T2 (de) 1997-06-12
NO180151C (no) 1997-02-26
NO925026L (no) 1993-07-05
EP0550049A1 (fr) 1993-07-07
NO180151B (no) 1996-11-18
JP2554434B2 (ja) 1996-11-13
CA2086401C (fr) 1997-01-28
JPH05254805A (ja) 1993-10-05
US5160618A (en) 1992-11-03
DE69217890D1 (de) 1997-04-10

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Effective date: 20001229