CA2190329C - Methode et micro-dispositif pour la modulation de la lumiere - Google Patents

Methode et micro-dispositif pour la modulation de la lumiere Download PDF

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Publication number
CA2190329C
CA2190329C CA002190329A CA2190329A CA2190329C CA 2190329 C CA2190329 C CA 2190329C CA 002190329 A CA002190329 A CA 002190329A CA 2190329 A CA2190329 A CA 2190329A CA 2190329 C CA2190329 C CA 2190329C
Authority
CA
Canada
Prior art keywords
mirror
hinge
sections
providing
sacrificial layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA002190329A
Other languages
English (en)
Other versions
CA2190329A1 (fr
Inventor
Nicholas R. Swart
Hubert Jerominek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NATIONAL OPTICS INSTITUTE
Original Assignee
NATIONAL OPTICS INSTITUTE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NATIONAL OPTICS INSTITUTE filed Critical NATIONAL OPTICS INSTITUTE
Priority to CA002190329A priority Critical patent/CA2190329C/fr
Publication of CA2190329A1 publication Critical patent/CA2190329A1/fr
Application granted granted Critical
Publication of CA2190329C publication Critical patent/CA2190329C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/20—Nature, e.g. e-beam addressed
    • G03H2225/24—Having movable pixels, e.g. microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/30—Modulation
    • G03H2225/33—Complex modulation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CA002190329A 1996-11-14 1996-11-14 Methode et micro-dispositif pour la modulation de la lumiere Expired - Lifetime CA2190329C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA002190329A CA2190329C (fr) 1996-11-14 1996-11-14 Methode et micro-dispositif pour la modulation de la lumiere

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA002190329A CA2190329C (fr) 1996-11-14 1996-11-14 Methode et micro-dispositif pour la modulation de la lumiere

Publications (2)

Publication Number Publication Date
CA2190329A1 CA2190329A1 (fr) 1998-05-14
CA2190329C true CA2190329C (fr) 2005-05-17

Family

ID=4159254

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002190329A Expired - Lifetime CA2190329C (fr) 1996-11-14 1996-11-14 Methode et micro-dispositif pour la modulation de la lumiere

Country Status (1)

Country Link
CA (1) CA2190329C (fr)

Also Published As

Publication number Publication date
CA2190329A1 (fr) 1998-05-14

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