CA2305070A1 - Dispositif et methode d'enregistrement de motifs d'interference dans un milieu photosensible - Google Patents

Dispositif et methode d'enregistrement de motifs d'interference dans un milieu photosensible Download PDF

Info

Publication number
CA2305070A1
CA2305070A1 CA 2305070 CA2305070A CA2305070A1 CA 2305070 A1 CA2305070 A1 CA 2305070A1 CA 2305070 CA2305070 CA 2305070 CA 2305070 A CA2305070 A CA 2305070A CA 2305070 A1 CA2305070 A1 CA 2305070A1
Authority
CA
Canada
Prior art keywords
recording
slits
diffraction
gratings
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2305070
Other languages
English (en)
Other versions
CA2305070C (fr
Inventor
Francois Trepanier
Pierre Langlois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut National dOptique
Original Assignee
Institut National dOptique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CA002272008A external-priority patent/CA2272008A1/fr
Application filed by Institut National dOptique filed Critical Institut National dOptique
Priority to CA 2305070 priority Critical patent/CA2305070C/fr
Publication of CA2305070A1 publication Critical patent/CA2305070A1/fr
Application granted granted Critical
Publication of CA2305070C publication Critical patent/CA2305070C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1847Manufacturing methods
    • G02B5/1857Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Holo Graphy (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
CA 2305070 1999-05-11 2000-04-13 Dispositif et methode d'enregistrement de motifs d'interference dans un milieu photosensible Expired - Lifetime CA2305070C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA 2305070 CA2305070C (fr) 1999-05-11 2000-04-13 Dispositif et methode d'enregistrement de motifs d'interference dans un milieu photosensible

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CA002272008A CA2272008A1 (fr) 1999-05-11 1999-05-11 Dispositif et methode d'enregistrement de franges d'interference dans un support photosensible
CA2,272,008 1999-05-11
CA 2305070 CA2305070C (fr) 1999-05-11 2000-04-13 Dispositif et methode d'enregistrement de motifs d'interference dans un milieu photosensible

Publications (2)

Publication Number Publication Date
CA2305070A1 true CA2305070A1 (fr) 2000-11-11
CA2305070C CA2305070C (fr) 2006-06-13

Family

ID=25680958

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2305070 Expired - Lifetime CA2305070C (fr) 1999-05-11 2000-04-13 Dispositif et methode d'enregistrement de motifs d'interference dans un milieu photosensible

Country Status (1)

Country Link
CA (1) CA2305070C (fr)

Also Published As

Publication number Publication date
CA2305070C (fr) 2006-06-13

Similar Documents

Publication Publication Date Title
IL141536A (en) Device for measuring translation, rotation or velocity via light beam interference
CA2191329A1 (fr) Detecteur de mouvement relatif
CA2227493A1 (fr) Production de reseaux de diffraction
KR900002128A (ko) 리소그래피 시스템 및 그의 해상도 증진 방법
CA2078731A1 (fr) Dispositif de mesure des ecarts de position et methode y afferente
EP1116980A3 (fr) Système de balayage opto-mecanique
DE58904369D1 (de) Positionsmesseinrichtung.
CA2118110A1 (fr) Detecteur de mouvement
WO1997026514A3 (fr) Ensemble analyseur spectral et indicateur de direction
DE3682675D1 (de) Interferometrische maskensubstratausrichtung.
CA2163061A1 (fr) Methode pour controler spatialement la periode et l'amplitude des filtres de bragg
KR900019162A (ko) 리니어 프레스넬 존 플레이트(Linear Fresnel Zone Plate)를 사용한 마스크와 반도체 웨이퍼의 위치맞춤 시스템 및 방법
GB1461084A (en) Detection of the intensity of light
ATE352049T1 (de) Optisch variable sicherheitsvorrichtung
EP0926663A3 (fr) Support d'enregistrement optique, et reproduction de données de celui-ci
EP0380320A3 (fr) Dispositif de tête optique
JPS57207805A (en) Displacement measuring device
CA2305070A1 (fr) Dispositif et methode d'enregistrement de motifs d'interference dans un milieu photosensible
DE59105415D1 (de) Winkelmesseinrichtung.
ATE225546T1 (de) Verfahren zur echtheitsprüfung eines hologramms und lesegerät zur durchführung des verfahrens
JPS6489323A (en) Alignment device
CA2292700A1 (fr) Methode et dispositif de realisation de grille de diffraction dans les fibres optiques
EP0329433A3 (fr) Méthode et appareil pour détection de position
JPS6482623A (en) Device for alignment
JPH1050579A5 (fr)

Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry

Effective date: 20200413