CA2350076C - Reseau de pompage a activation electrostatique - Google Patents
Reseau de pompage a activation electrostatique Download PDFInfo
- Publication number
- CA2350076C CA2350076C CA002350076A CA2350076A CA2350076C CA 2350076 C CA2350076 C CA 2350076C CA 002350076 A CA002350076 A CA 002350076A CA 2350076 A CA2350076 A CA 2350076A CA 2350076 C CA2350076 C CA 2350076C
- Authority
- CA
- Canada
- Prior art keywords
- cell
- conduit means
- diaphragm
- mesopump
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005086 pumping Methods 0.000 title claims abstract description 27
- 239000012530 fluid Substances 0.000 claims abstract description 82
- 238000000034 method Methods 0.000 claims abstract description 25
- 230000008569 process Effects 0.000 claims abstract description 15
- 230000004913 activation Effects 0.000 claims abstract description 13
- 238000004891 communication Methods 0.000 claims abstract 2
- 239000000463 material Substances 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 6
- 238000005096 rolling process Methods 0.000 claims description 6
- 238000003491 array Methods 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 5
- 238000012546 transfer Methods 0.000 claims description 3
- 230000009849 deactivation Effects 0.000 claims 2
- 238000005516 engineering process Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 238000001514 detection method Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000013043 chemical agent Substances 0.000 description 3
- 239000002360 explosive Substances 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
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- 238000005459 micromachining Methods 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 239000012807 PCR reagent Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229920004738 ULTEM® Polymers 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- -1 biological Substances 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 238000005251 capillar electrophoresis Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
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- 229910003460 diamond Inorganic materials 0.000 description 1
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- 238000009826 distribution Methods 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002572 peristaltic effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
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- 238000005057 refrigeration Methods 0.000 description 1
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- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000012855 volatile organic compound Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Steroid Compounds (AREA)
- Saccharide Compounds (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Seal Device For Vehicle (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
Abstract
L'invention concerne un réseau de pompage présentant une pluralité de cellules élémentaires, un procédé de fabrication du réseau et un procédé de pompage de fluides utilisant ce réseau de pompage. Les cellules ont chacune un corps formant une cavité contenant des électrodes supérieure et inférieure, alimentées sélectivement par les connexions électriques et présentant des surfaces courbées faisant face à l'autre électrode. Une membrane bistable est montée de sorte que sa partie principale se trouve logée dans la cavité entre les électrodes de manière que cette membrane soit déviée vers les surfaces supérieure et inférieure afin de s'y adapter. Une conduite latérale est placée au niveau d'au moins une extrémité du corps en vue d'une communication fluidique avec la cavité. Les conduites latérales sont reliées de manière opérationnelle à une partie de la membrane montée dans le corps et sont ouvertes et fermées par un mouvement de la membrane. La membrane régule l'écoulement de fluide en entrant en contact avec ou en s'éloignant d'une conduite verticale reposant sur au moins une surface courbée. Les cellules sont interconnectées pour former un réseau de pompage dans lequel l'activation des électrodes fait bouger la membrane entre les électrodes et fait entrer ou sortir le fluide du corps. Le réseau de pompe préféré comprend des ensembles de trois groupes de cellules de sorte que le fluide s'écoule dans une première cellule à partir d'une source de fluide, qu'il soit expulsé vers une seconde cellule à travers une conduite verticale, puis expulsé via une conduite latérale vers une troisième cellule pour en être ensuite expulsé. L'écoulement du fluide s'effectue par l'activation des électrodes.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US1998/023658 WO2000028215A1 (fr) | 1998-11-06 | 1998-11-06 | Reseau de pompage a activation electrostatique |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2350076A1 CA2350076A1 (fr) | 2000-05-18 |
| CA2350076C true CA2350076C (fr) | 2008-12-30 |
Family
ID=22268244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002350076A Expired - Fee Related CA2350076C (fr) | 1998-11-06 | 1998-11-06 | Reseau de pompage a activation electrostatique |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1163446B1 (fr) |
| CN (1) | CN1327132C (fr) |
| AT (1) | ATE350580T1 (fr) |
| CA (1) | CA2350076C (fr) |
| DE (1) | DE69836836T2 (fr) |
| HK (1) | HK1046945B (fr) |
| WO (1) | WO2000028215A1 (fr) |
Families Citing this family (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6568286B1 (en) | 2000-06-02 | 2003-05-27 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| US7420659B1 (en) | 2000-06-02 | 2008-09-02 | Honeywell Interantional Inc. | Flow control system of a cartridge |
| US6729856B2 (en) * | 2001-10-09 | 2004-05-04 | Honeywell International Inc. | Electrostatically actuated pump with elastic restoring forces |
| US6637476B2 (en) | 2002-04-01 | 2003-10-28 | Protedyne Corporation | Robotically manipulable sample handling tool |
| DE10302304B3 (de) | 2003-01-22 | 2004-01-29 | Festo Ag & Co. | Elektronisches Mikroventil und Verfahren zu seinem Betreiben |
| US7249529B2 (en) | 2003-03-28 | 2007-07-31 | Protedyne Corporation | Robotically manipulable sample handling tool |
| US6991213B2 (en) * | 2003-12-30 | 2006-01-31 | Honeywell International Inc. | Dual diaphragm valve |
| US7100453B2 (en) | 2003-12-30 | 2006-09-05 | Honeywell International Inc. | Modified dual diaphragm pressure sensor |
| AU2005317188B2 (en) * | 2004-12-14 | 2011-06-09 | Mark Banister | Actuator pump system |
| US7222639B2 (en) | 2004-12-29 | 2007-05-29 | Honeywell International Inc. | Electrostatically actuated gas valve |
| US7328882B2 (en) | 2005-01-06 | 2008-02-12 | Honeywell International Inc. | Microfluidic modulating valve |
| US7445017B2 (en) | 2005-01-28 | 2008-11-04 | Honeywell International Inc. | Mesovalve modulator |
| US7517201B2 (en) | 2005-07-14 | 2009-04-14 | Honeywell International Inc. | Asymmetric dual diaphragm pump |
| US7353747B2 (en) * | 2005-07-28 | 2008-04-08 | Ethicon Endo-Surgery, Inc. | Electroactive polymer-based pump |
| US7624755B2 (en) | 2005-12-09 | 2009-12-01 | Honeywell International Inc. | Gas valve with overtravel |
| US7523762B2 (en) | 2006-03-22 | 2009-04-28 | Honeywell International Inc. | Modulating gas valves and systems |
| EP2041214A4 (fr) | 2006-07-10 | 2009-07-08 | Medipacs Inc | Hydrogel époxy super-élastique |
| DE602006009405D1 (de) | 2006-10-28 | 2009-11-05 | Sensirion Holding Ag | Mehrzellenpumpe |
| NL2000466C2 (nl) * | 2007-02-02 | 2008-08-05 | Grood Johannes Petrus Wilhelmu | Werkwijze en inrichting voor het dispenseren van een vloeistof. |
| EP2227635A2 (fr) | 2007-12-03 | 2010-09-15 | Medipacs, Inc. | Dispositif de mesure de fluide |
| US9062670B2 (en) * | 2009-08-11 | 2015-06-23 | Prominent Gmbh | Diaphragm machine with a plurality of pump chambers |
| WO2011032011A1 (fr) | 2009-09-10 | 2011-03-17 | Medipacs, Inc. | Actionneur à faible encombrement et méthode améliorée d'administration d'agents thérapeutiques commandée par le soignant |
| US8556392B2 (en) | 2009-11-24 | 2013-10-15 | De Grood Innovations B.V. | Method and device for dispensing a liquid |
| US9500186B2 (en) | 2010-02-01 | 2016-11-22 | Medipacs, Inc. | High surface area polymer actuator with gas mitigating components |
| US9995486B2 (en) | 2011-12-15 | 2018-06-12 | Honeywell International Inc. | Gas valve with high/low gas pressure detection |
| US9846440B2 (en) | 2011-12-15 | 2017-12-19 | Honeywell International Inc. | Valve controller configured to estimate fuel comsumption |
| US9557059B2 (en) | 2011-12-15 | 2017-01-31 | Honeywell International Inc | Gas valve with communication link |
| US8899264B2 (en) | 2011-12-15 | 2014-12-02 | Honeywell International Inc. | Gas valve with electronic proof of closure system |
| US8947242B2 (en) | 2011-12-15 | 2015-02-03 | Honeywell International Inc. | Gas valve with valve leakage test |
| US9074770B2 (en) | 2011-12-15 | 2015-07-07 | Honeywell International Inc. | Gas valve with electronic valve proving system |
| US9851103B2 (en) | 2011-12-15 | 2017-12-26 | Honeywell International Inc. | Gas valve with overpressure diagnostics |
| US9835265B2 (en) | 2011-12-15 | 2017-12-05 | Honeywell International Inc. | Valve with actuator diagnostics |
| US8905063B2 (en) | 2011-12-15 | 2014-12-09 | Honeywell International Inc. | Gas valve with fuel rate monitor |
| US8839815B2 (en) | 2011-12-15 | 2014-09-23 | Honeywell International Inc. | Gas valve with electronic cycle counter |
| EP2847249A4 (fr) | 2012-03-14 | 2016-12-28 | Medipacs Inc | Matériaux polymères intelligents contenant un excès de molécules réactives |
| US9234661B2 (en) | 2012-09-15 | 2016-01-12 | Honeywell International Inc. | Burner control system |
| US10422531B2 (en) | 2012-09-15 | 2019-09-24 | Honeywell International Inc. | System and approach for controlling a combustion chamber |
| DE102013209866B4 (de) | 2013-05-28 | 2021-11-04 | Robert Bosch Gmbh | Vorrichtung mit vorgegebener Fluidverdrängung |
| EP2868970B1 (fr) | 2013-10-29 | 2020-04-22 | Honeywell Technologies Sarl | Dispositif de régulation |
| US10024439B2 (en) | 2013-12-16 | 2018-07-17 | Honeywell International Inc. | Valve over-travel mechanism |
| US9841122B2 (en) | 2014-09-09 | 2017-12-12 | Honeywell International Inc. | Gas valve with electronic valve proving system |
| US9645584B2 (en) | 2014-09-17 | 2017-05-09 | Honeywell International Inc. | Gas valve with electronic health monitoring |
| CN104358674A (zh) * | 2014-10-24 | 2015-02-18 | 安徽理工大学 | 一种基于超磁致伸缩薄膜驱动器的双平面线圈驱动式微泵 |
| CN105201796A (zh) * | 2015-10-29 | 2015-12-30 | 宁波大学 | 一种压电蠕动微泵 |
| US10503181B2 (en) | 2016-01-13 | 2019-12-10 | Honeywell International Inc. | Pressure regulator |
| CN108496004B (zh) * | 2016-02-01 | 2020-03-31 | 株式会社村田制作所 | 气体控制装置 |
| US10564062B2 (en) | 2016-10-19 | 2020-02-18 | Honeywell International Inc. | Human-machine interface for gas valve |
| US11506194B2 (en) * | 2016-12-30 | 2022-11-22 | Koninklijke Philips N.V. | Electrostatic peristaltic pump and method of operation |
| US11092150B2 (en) | 2017-03-13 | 2021-08-17 | Encite Llc | Micro pump systems and processing techniques |
| TW201912248A (zh) | 2017-08-31 | 2019-04-01 | 研能科技股份有限公司 | 氣體輸送裝置 |
| US11073281B2 (en) | 2017-12-29 | 2021-07-27 | Honeywell International Inc. | Closed-loop programming and control of a combustion appliance |
| DE102018207858B4 (de) * | 2018-05-18 | 2021-06-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor |
| US10697815B2 (en) | 2018-06-09 | 2020-06-30 | Honeywell International Inc. | System and methods for mitigating condensation in a sensor module |
| US11767218B2 (en) | 2018-09-14 | 2023-09-26 | Teknologian Tutkimuskeskus Vtt Oy | Microelectromechanical capacitive pressure sensor having a valve portion being operable to close first output and open second output to equalize pressure |
| CN109771740B (zh) * | 2019-03-01 | 2020-11-27 | 浙江师范大学 | 一种气动输液装置 |
| DE102019004450B4 (de) * | 2019-06-26 | 2024-03-14 | Drägerwerk AG & Co. KGaA | Mikropumpensystem und Verfahren zur Führung eines kompressiblen Fluids |
| CN113482893B (zh) * | 2021-06-10 | 2022-04-01 | 浙江大学 | 一种基于介电弹性材料的柔性泵 |
| CN115387986A (zh) * | 2022-09-21 | 2022-11-25 | 北京京东方技术开发有限公司 | 气味释放装置、设备及其制备方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB514815A (en) * | 1938-06-08 | 1939-11-17 | Nils Nilsen Straatveit | Improvements connected with reciprocating compressors or pumps |
| DE3926066A1 (de) * | 1989-08-07 | 1991-02-14 | Ibm Deutschland | Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck |
| DE69213340T2 (de) * | 1991-05-30 | 1997-03-27 | Hitachi Ltd | Ventil und seine Verwendung in einer Vorrichtung hergestellt aus Halbleitermaterial |
-
1998
- 1998-11-06 DE DE69836836T patent/DE69836836T2/de not_active Expired - Lifetime
- 1998-11-06 WO PCT/US1998/023658 patent/WO2000028215A1/fr not_active Ceased
- 1998-11-06 CN CNB988143828A patent/CN1327132C/zh not_active Expired - Lifetime
- 1998-11-06 AT AT98965368T patent/ATE350580T1/de not_active IP Right Cessation
- 1998-11-06 HK HK02108446.1A patent/HK1046945B/zh not_active IP Right Cessation
- 1998-11-06 EP EP98965368A patent/EP1163446B1/fr not_active Expired - Lifetime
- 1998-11-06 CA CA002350076A patent/CA2350076C/fr not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1163446A1 (fr) | 2001-12-19 |
| DE69836836T2 (de) | 2007-06-28 |
| CN1354823A (zh) | 2002-06-19 |
| HK1046945B (zh) | 2008-05-23 |
| DE69836836D1 (de) | 2007-02-15 |
| EP1163446B1 (fr) | 2007-01-03 |
| CA2350076A1 (fr) | 2000-05-18 |
| CN1327132C (zh) | 2007-07-18 |
| WO2000028215A1 (fr) | 2000-05-18 |
| ATE350580T1 (de) | 2007-01-15 |
| HK1046945A1 (zh) | 2003-01-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |