CA2370044A1 - Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines - Google Patents
Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines Download PDFInfo
- Publication number
- CA2370044A1 CA2370044A1 CA002370044A CA2370044A CA2370044A1 CA 2370044 A1 CA2370044 A1 CA 2370044A1 CA 002370044 A CA002370044 A CA 002370044A CA 2370044 A CA2370044 A CA 2370044A CA 2370044 A1 CA2370044 A1 CA 2370044A1
- Authority
- CA
- Canada
- Prior art keywords
- comb drive
- fingers
- comb
- microactuator
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 230000000712 assembly Effects 0.000 claims description 32
- 238000000429 assembly Methods 0.000 claims description 32
- 239000000725 suspension Substances 0.000 description 42
- 230000003287 optical effect Effects 0.000 description 22
- 239000000835 fiber Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000013307 optical fiber Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000000708 deep reactive-ion etching Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 241000534431 Hygrocybe pratensis Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Cette invention concerne un micro-actionneur électrostatique (23) composé d'un substrat (27) sur lequel est monté un premier ensemble peigne de commande (61), lequel substrat est surmonté par un second peigne de commande (62). On trouve au moins un élément à ressort (83) avec une première partie d'extrémité (83a) fixée au substrat et une seconde partie d'extrémité (83b) fixée au second peigne de commande. Le second peigne de commande une pluralité de secondes dents espacées (72) partant de l'un des côtés d'un second élément allongé (71). Ce second élément allongé peut se déplacer entre une première position, dans laquelle ses diverses dents ne s'encastrent pas complètement dans des paires adjacentes de dents du premier élément allongé, et une seconde position dans laquelle chacune de ses dents vient s'encastrer pratiquement complètement dans une paire de dents du premier élément allongé.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12876499P | 1999-04-12 | 1999-04-12 | |
| US60/128,764 | 1999-04-12 | ||
| US09/464,361 US6329737B1 (en) | 1998-12-15 | 1999-12-15 | Rotary electrostatic microactuator |
| US09/464,361 | 1999-12-15 | ||
| PCT/US2000/009919 WO2000062410A1 (fr) | 1999-04-12 | 2000-04-12 | Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2370044A1 true CA2370044A1 (fr) | 2000-10-19 |
Family
ID=26826924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002370044A Abandoned CA2370044A1 (fr) | 1999-04-12 | 2000-04-12 | Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1188225A4 (fr) |
| AU (1) | AU4346000A (fr) |
| CA (1) | CA2370044A1 (fr) |
| WO (1) | WO2000062410A1 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6847661B2 (en) | 1999-09-20 | 2005-01-25 | Iolon, Inc. | Tunable laser with microactuator |
| US6903486B2 (en) | 1999-11-29 | 2005-06-07 | Iolon, Inc. | Balanced microdevice |
| US6469415B2 (en) | 1999-11-29 | 2002-10-22 | Iolon, Inc. | Balanced microdevice and rotary electrostatic microactuator use therewith |
| WO2001050585A1 (fr) | 2000-01-05 | 2001-07-12 | Iolon, Inc. | Organe de commande electrostatique miniaturise inclinable et son procede d'utilisation |
| US6671078B2 (en) | 2001-05-23 | 2003-12-30 | Axsun Technologies, Inc. | Electrostatic zipper actuator optical beam switching system and method of operation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5998906A (en) * | 1998-01-13 | 1999-12-07 | Seagate Technology, Inc. | Electrostatic microactuator and method for use thereof |
-
2000
- 2000-04-12 EP EP00923312A patent/EP1188225A4/fr not_active Withdrawn
- 2000-04-12 AU AU43460/00A patent/AU4346000A/en not_active Abandoned
- 2000-04-12 CA CA002370044A patent/CA2370044A1/fr not_active Abandoned
- 2000-04-12 WO PCT/US2000/009919 patent/WO2000062410A1/fr not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP1188225A1 (fr) | 2002-03-20 |
| EP1188225A4 (fr) | 2005-11-02 |
| AU4346000A (en) | 2000-11-14 |
| WO2000062410A1 (fr) | 2000-10-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Discontinued |