CA2468451C - Laser avec enceintes cloisonnees - Google Patents

Laser avec enceintes cloisonnees Download PDF

Info

Publication number: CA2468451C
Authority: CA; Canada
Prior art keywords: laser; enclosure; air; gas; temperature
Prior art date: 1996-01-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

CA002468451A

Other languages

English (en)

Other versions

CA2468451A1 (fr

Inventor

Tom A. Watson

William N. Partlo

Donald G. Larson

Igor V. Fomenkov

Anthony J. Deruyter

Palash P. Das

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Cymer Inc

Original Assignee

Cymer Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-01-05

Filing date

1997-01-03

Publication date

2005-04-26

1996-01-05 Priority claimed from US08/583,302 external-priority patent/US5748656A/en

1997-01-03 Application filed by Cymer Inc filed Critical Cymer Inc

1997-07-05 Publication of CA2468451A1 publication Critical patent/CA2468451A1/fr

2005-04-26 Application granted granted Critical

2005-04-26 Publication of CA2468451C publication Critical patent/CA2468451C/fr

2017-01-03 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

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Landscapes

Lasers (AREA)
Laser Surgery Devices (AREA)

CA002468451A 1996-01-05 1997-01-03 Laser avec enceintes cloisonnees Expired - Fee Related CA2468451C (fr)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US08/583,302 US5748656A (en)	1996-01-05	1996-01-05	Laser having improved beam quality and reduced operating cost
US08/583,302		1996-01-05
CA002194321A CA2194321C (fr)	1996-01-05	1997-01-03	Laser a qualite de faisceau amelioree et a cout d`utilisation reduit

Related Parent Applications (1)

Application Number	Title	Priority Date	Filing Date
CA002194321A Division CA2194321C (fr)	1996-01-05	1997-01-03	Laser a qualite de faisceau amelioree et a cout d`utilisation reduit

Publications (2)

Publication Number	Publication Date
CA2468451A1 CA2468451A1 (fr)	1997-07-05
CA2468451C true CA2468451C (fr)	2005-04-26

Family

ID=32851572

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA002468451A Expired - Fee Related CA2468451C (fr)	1996-01-05	1997-01-03	Laser avec enceintes cloisonnees

Country Status (1)

Country	Link
CA (1)	CA2468451C (fr)

1997
- 1997-01-03 CA CA002468451A patent/CA2468451C/fr not_active Expired - Fee Related

Also Published As

Publication number	Publication date
CA2468451A1 (fr)	1997-07-05

Legal Events

Date	Code	Title	Description
2004-06-04	EEER	Examination request
2011-01-04	MKLA	Lapsed

Publication	Publication Date	Title
CA2194321C (fr)	2004-10-05	Laser a qualite de faisceau amelioree et a cout d`utilisation reduit
JP3868188B2 (ja)	2007-01-17	ガス温度制御を備えたガス放電レーザ
JP6166310B2 (ja)	2017-07-19	レーザ発振部、空気冷却機、および除湿器を共通の冷却水にて冷却するレーザ装置
JP6687663B2 (ja)	2020-04-28	筐体の内部の熱を外部に放出する熱移動装置を備えるレーザ装置
US10516247B2 (en)	2019-12-24	Laser oscillator
US7164703B2 (en)	2007-01-16	Temperature control systems for excimer lasers
US9583909B2 (en)	2017-02-28	Temperature controllable gas laser oscillator
EP0509844B1 (fr)	1994-11-09	Appareillage pour le refroidissement d'un dispositif électronique
CA2468451C (fr)	2005-04-26	Laser avec enceintes cloisonnees
JP4081280B2 (ja)	2008-04-23	レーザ装置
JP4184015B2 (ja)	2008-11-19	狭帯域化レーザ装置
JPH04356981A (ja)	1992-12-10	レーザ発振器
US20050002427A1 (en)	2005-01-06	Cooled electrodes for high repetition excimer or molecular fluorine lasers
JPH09147586A (ja)	1997-06-06	紫外線消去装置
JP2002335029A (ja)	2002-11-22	狭帯域化レーザ装置
CN121274556A (zh)	2026-01-06	基于温度调控的冰箱紫外臭氧杀菌系统及方法
JP2741439B2 (ja)	1998-04-15	レーザ発振器
CN121619830A (zh)	2026-03-06	激光维持等离子体光源及其温度调节方法、气流调节装置
JPH02103974A (ja)	1990-04-17	レーザ発振装置
JPS61229383A (ja)	1986-10-13	ガス流動形レ−ザ発振器
JPH05160470A (ja)	1993-06-25	ガスレーザ装置
JPH022187A (ja)	1990-01-08	ガスレーザ装置
JP2001272052A (ja)	2001-10-05	ペルチェ素子による精密温度制御装置
JPH04104431A (ja)	1992-04-06	サイラトロン制御装置