CA2479663A1 - Procede et dispositif de pulverisation cathodique - Google Patents

Procede et dispositif de pulverisation cathodique

Info

Publication number
CA2479663A1
CA2479663A1 CA002479663A CA2479663A CA2479663A1 CA 2479663 A1 CA2479663 A1 CA 2479663A1 CA 002479663 A CA002479663 A CA 002479663A CA 2479663 A CA2479663 A CA 2479663A CA 2479663 A1 CA2479663 A1 CA 2479663A1
Authority
CA
Canada
Prior art keywords
voltage
negative voltage
time
intermittently
time during
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002479663A
Other languages
English (en)
Other versions
CA2479663C (fr
Inventor
Junichi Shimizu
Shujiro Watanabe
Satoru Takaki
Hisashi Osaki
Takuji Oyama
Eiichi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority claimed from CA002128981A external-priority patent/CA2128981C/fr
Publication of CA2479663A1 publication Critical patent/CA2479663A1/fr
Application granted granted Critical
Publication of CA2479663C publication Critical patent/CA2479663C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
CA002479663A 1993-07-28 1994-07-27 Procede et dispositif de pulverisation cathodique Expired - Fee Related CA2479663C (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP20570493 1993-07-28
JP205704/1993 1993-07-28
CA002128981A CA2128981C (fr) 1993-07-28 1994-07-27 Procede et dispositif de pulverisation cathodique

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA002128981A Division CA2128981C (fr) 1993-07-28 1994-07-27 Procede et dispositif de pulverisation cathodique

Publications (2)

Publication Number Publication Date
CA2479663A1 true CA2479663A1 (fr) 1995-01-29
CA2479663C CA2479663C (fr) 2006-10-03

Family

ID=33419211

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002479663A Expired - Fee Related CA2479663C (fr) 1993-07-28 1994-07-27 Procede et dispositif de pulverisation cathodique

Country Status (1)

Country Link
CA (1) CA2479663C (fr)

Also Published As

Publication number Publication date
CA2479663C (fr) 2006-10-03

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