JPS546874A - Thin film forming apparatus - Google Patents

Thin film forming apparatus

Info

Publication number
JPS546874A
JPS546874A JP7215377A JP7215377A JPS546874A JP S546874 A JPS546874 A JP S546874A JP 7215377 A JP7215377 A JP 7215377A JP 7215377 A JP7215377 A JP 7215377A JP S546874 A JPS546874 A JP S546874A
Authority
JP
Japan
Prior art keywords
thin film
forming apparatus
film forming
filament
nearly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7215377A
Other languages
Japanese (ja)
Other versions
JPS5523907B2 (en
Inventor
Hidefumi Mori
Hideo Yoshihara
Mikiho Kiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP7215377A priority Critical patent/JPS546874A/en
Publication of JPS546874A publication Critical patent/JPS546874A/en
Publication of JPS5523907B2 publication Critical patent/JPS5523907B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:The above mentioned apparatus utilizing plasma forming uniform thin film having a strong adhesive power, by applying bias voltage having nearly the same potential to that of applied on the substrate support arranged the filament for thermion emission in vicinity to the above filament and neutralizing accumulated electric charge on the surface of insulating thin film.
JP7215377A 1977-06-20 1977-06-20 Thin film forming apparatus Granted JPS546874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7215377A JPS546874A (en) 1977-06-20 1977-06-20 Thin film forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7215377A JPS546874A (en) 1977-06-20 1977-06-20 Thin film forming apparatus

Publications (2)

Publication Number Publication Date
JPS546874A true JPS546874A (en) 1979-01-19
JPS5523907B2 JPS5523907B2 (en) 1980-06-25

Family

ID=13481018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7215377A Granted JPS546874A (en) 1977-06-20 1977-06-20 Thin film forming apparatus

Country Status (1)

Country Link
JP (1) JPS546874A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724112A (en) * 1980-07-21 1982-02-08 Murata Mfg Co Ltd Package construction for piezoelectric oscillating element and its forming method
JPS5731218A (en) * 1980-07-31 1982-02-19 Tohoku Metal Ind Ltd Packing method of edge mode ceramic filter
JPS605876A (en) * 1983-06-23 1985-01-12 Jeol Ltd Film forming device
JPS63227770A (en) * 1987-03-16 1988-09-22 Shinko Seiki Kk Ion plating device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5137084A (en) * 1974-09-25 1976-03-29 Suwa Seikosha Kk KOSHUHAION PUREETEINGU

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5137084A (en) * 1974-09-25 1976-03-29 Suwa Seikosha Kk KOSHUHAION PUREETEINGU

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724112A (en) * 1980-07-21 1982-02-08 Murata Mfg Co Ltd Package construction for piezoelectric oscillating element and its forming method
JPS5731218A (en) * 1980-07-31 1982-02-19 Tohoku Metal Ind Ltd Packing method of edge mode ceramic filter
JPS605876A (en) * 1983-06-23 1985-01-12 Jeol Ltd Film forming device
JPS63227770A (en) * 1987-03-16 1988-09-22 Shinko Seiki Kk Ion plating device

Also Published As

Publication number Publication date
JPS5523907B2 (en) 1980-06-25

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