CA2543396A1 - Procede de manipulation de particules microscopiques et d'analyse de la composition de celles-ci - Google Patents
Procede de manipulation de particules microscopiques et d'analyse de la composition de celles-ci Download PDFInfo
- Publication number
- CA2543396A1 CA2543396A1 CA002543396A CA2543396A CA2543396A1 CA 2543396 A1 CA2543396 A1 CA 2543396A1 CA 002543396 A CA002543396 A CA 002543396A CA 2543396 A CA2543396 A CA 2543396A CA 2543396 A1 CA2543396 A1 CA 2543396A1
- Authority
- CA
- Canada
- Prior art keywords
- particle
- sample surface
- probe
- energetic
- analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000002245 particle Substances 0.000 title claims abstract description 220
- 238000000034 method Methods 0.000 title claims abstract description 116
- 239000000203 mixture Substances 0.000 title claims abstract description 17
- 239000000523 sample Substances 0.000 claims abstract description 227
- 238000004458 analytical method Methods 0.000 claims abstract description 51
- 230000000284 resting effect Effects 0.000 claims abstract description 5
- 238000010894 electron beam technology Methods 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 30
- 238000010884 ion-beam technique Methods 0.000 claims description 20
- 239000004020 conductor Substances 0.000 claims description 9
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- 238000004519 manufacturing process Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 6
- 238000011109 contamination Methods 0.000 description 5
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- 230000005540 biological transmission Effects 0.000 description 3
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- 238000007689 inspection Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
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- 108010038083 amyloid fibril protein AS-SAM Proteins 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910001423 beryllium ion Inorganic materials 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
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- 239000011888 foil Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
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- 239000010439 graphite Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
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- 238000000992 sputter etching Methods 0.000 description 1
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- 230000001052 transient effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/32—Micromanipulators structurally combined with microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
- H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2004/018206 WO2005123227A2 (fr) | 2004-06-08 | 2004-06-08 | Procede de manipulation de particules microscopiques et d’analyse de la composition de celles-ci |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2543396A1 true CA2543396A1 (fr) | 2005-12-29 |
Family
ID=35510284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002543396A Abandoned CA2543396A1 (fr) | 2004-06-08 | 2004-06-08 | Procede de manipulation de particules microscopiques et d'analyse de la composition de celles-ci |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1754049A2 (fr) |
| CN (1) | CN1977159A (fr) |
| CA (1) | CA2543396A1 (fr) |
| WO (1) | WO2005123227A2 (fr) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006045620B4 (de) | 2006-09-25 | 2009-10-29 | Roland Dr. Kilper | Vorrichtung und Verfahren für Aufnahme, Transport und Ablage mikroskopischer Proben |
| EP1953789A1 (fr) * | 2007-02-05 | 2008-08-06 | FEI Company | Procédé pour amincir un échantillon et support de l'échantillon pour effectuer ce procédé |
| US8283631B2 (en) * | 2008-05-08 | 2012-10-09 | Kla-Tencor Corporation | In-situ differential spectroscopy |
| JP5849331B2 (ja) * | 2011-08-31 | 2016-01-27 | 国立大学法人静岡大学 | 微小付着物剥離システムおよび微小付着物剥離方法 |
| CN104236978B (zh) * | 2014-09-30 | 2017-03-22 | 中国原子能科学研究院 | 一种测量单微粒中铀同位素比的方法 |
| CN105797867B (zh) * | 2016-05-09 | 2018-05-04 | 长安大学 | 一种静电式矿物微粒选取器 |
| CN110595848B (zh) * | 2018-06-12 | 2022-04-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 微米级颗粒透射电子显微镜样品的制备方法 |
| CN111521623B (zh) * | 2020-04-28 | 2023-04-07 | 广西大学 | 一种提高粉末样品透射电镜原位加热芯片制样成功率的方法 |
| CN113804607A (zh) * | 2020-06-17 | 2021-12-17 | 阅美测量系统（上海）有限公司 | 一种在扫描电镜与能谱仪（sem-edx）检测中固定颗粒的方法 |
| CN111693555B (zh) * | 2020-06-18 | 2021-08-10 | 中国科学院地球化学研究所 | 一种原位制备复杂结构样品中纳米级颗粒的tem样品的方法 |
| CN112180124A (zh) * | 2020-08-31 | 2021-01-05 | 上海交通大学 | 一种原子力显微镜用亚微米探针的制备方法 |
| WO2022178901A1 (fr) * | 2021-02-28 | 2022-09-01 | 浙江大学 | Brucelles électroniques |
| WO2022178903A1 (fr) * | 2021-02-28 | 2022-09-01 | 浙江大学 | Procédé et dispositif de fabrication de microdispositif |
| KR20230097245A (ko) * | 2021-12-23 | 2023-07-03 | 삼성전자주식회사 | 펠리클 세정 장치 및 이를 이용한 펠리클 세정 방법 |
| CN116477566B (zh) * | 2023-03-23 | 2024-04-09 | 清华大学 | 基于显微毛细管注射的单颗粒微电极制备方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4590792A (en) * | 1984-11-05 | 1986-05-27 | Chiang William W | Microanalysis particle sampler |
| US6188068B1 (en) * | 1997-06-16 | 2001-02-13 | Frederick F. Shaapur | Methods of examining a specimen and of preparing a specimen for transmission microscopic examination |
| US6777674B2 (en) * | 2002-09-23 | 2004-08-17 | Omniprobe, Inc. | Method for manipulating microscopic particles and analyzing |
-
2004
- 2004-06-08 CN CNA2004800379489A patent/CN1977159A/zh active Pending
- 2004-06-08 CA CA002543396A patent/CA2543396A1/fr not_active Abandoned
- 2004-06-08 WO PCT/US2004/018206 patent/WO2005123227A2/fr not_active Ceased
- 2004-06-08 EP EP04754729A patent/EP1754049A2/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP1754049A2 (fr) | 2007-02-21 |
| WO2005123227A2 (fr) | 2005-12-29 |
| WO2005123227A3 (fr) | 2006-12-14 |
| CN1977159A (zh) | 2007-06-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |