CA926035A - Dicing of crystalline bodies - Google Patents
Dicing of crystalline bodiesInfo
- Publication number
- CA926035A CA926035A CA118269A CA118269A CA926035A CA 926035 A CA926035 A CA 926035A CA 118269 A CA118269 A CA 118269A CA 118269 A CA118269 A CA 118269A CA 926035 A CA926035 A CA 926035A
- Authority
- CA
- Canada
- Prior art keywords
- dicing
- crystalline bodies
- crystalline
- bodies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/64—Wet etching of semiconductor materials
- H10P50/642—Chemical etching
- H10P50/644—Anisotropic liquid etching
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US7677770A | 1970-09-30 | 1970-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA926035A true CA926035A (en) | 1973-05-08 |
Family
ID=22134121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA118269A Expired CA926035A (en) | 1970-09-30 | 1971-07-14 | Dicing of crystalline bodies |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS5010095B1 (2) |
| BE (1) | BE773286A (2) |
| CA (1) | CA926035A (2) |
| DE (1) | DE2147703A1 (2) |
| ES (2) | ES395341A1 (2) |
| FR (1) | FR2108602A5 (2) |
| GB (1) | GB1297235A (2) |
| NL (1) | NL7113366A (2) |
| SE (1) | SE382772B (2) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5284894A (en) * | 1975-12-30 | 1977-07-14 | Matsushita Electric Works Ltd | Shoulder patting device circuit configuration |
| JPS5284893A (en) * | 1975-12-30 | 1977-07-14 | Matsushita Electric Works Ltd | Shoulder patting device circuit configuration |
| JP4515790B2 (ja) * | 2004-03-08 | 2010-08-04 | 株式会社東芝 | 半導体装置の製造方法及びその製造装置 |
-
1971
- 1971-07-14 CA CA118269A patent/CA926035A/en not_active Expired
- 1971-09-23 ES ES395341A patent/ES395341A1/es not_active Expired
- 1971-09-23 GB GB1297235D patent/GB1297235A/en not_active Expired
- 1971-09-24 DE DE19712147703 patent/DE2147703A1/de active Pending
- 1971-09-27 FR FR7134682A patent/FR2108602A5/fr not_active Expired
- 1971-09-29 NL NL7113366A patent/NL7113366A/xx unknown
- 1971-09-29 SE SE7112328A patent/SE382772B/xx unknown
- 1971-09-29 BE BE773286A patent/BE773286A/xx unknown
- 1971-09-29 JP JP46076230A patent/JPS5010095B1/ja active Pending
-
1973
- 1973-10-15 ES ES419651A patent/ES419651A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| ES395341A1 (es) | 1974-12-16 |
| GB1297235A (2) | 1972-11-22 |
| FR2108602A5 (2) | 1972-05-19 |
| JPS5010095B1 (2) | 1975-04-18 |
| NL7113366A (2) | 1972-04-05 |
| BE773286A (fr) | 1972-01-17 |
| DE2147703A1 (de) | 1972-04-06 |
| ES419651A1 (es) | 1976-05-16 |
| AU3334071A (en) | 1973-03-15 |
| SE382772B (sv) | 1976-02-16 |
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