NL7113366A - - Google Patents

Info

Publication number
NL7113366A
NL7113366A NL7113366A NL7113366A NL7113366A NL 7113366 A NL7113366 A NL 7113366A NL 7113366 A NL7113366 A NL 7113366A NL 7113366 A NL7113366 A NL 7113366A NL 7113366 A NL7113366 A NL 7113366A
Authority
NL
Netherlands
Application number
NL7113366A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7113366A publication Critical patent/NL7113366A/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00Grinding, lapping or polishing of wafers, substrates or parts of devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/60Wet etching
    • H10P50/64Wet etching of semiconductor materials
    • H10P50/642Chemical etching
    • H10P50/644Anisotropic liquid etching
NL7113366A 1970-09-30 1971-09-29 NL7113366A (2)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7677770A 1970-09-30 1970-09-30

Publications (1)

Publication Number Publication Date
NL7113366A true NL7113366A (2) 1972-04-05

Family

ID=22134121

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7113366A NL7113366A (2) 1970-09-30 1971-09-29

Country Status (9)

Country Link
JP (1) JPS5010095B1 (2)
BE (1) BE773286A (2)
CA (1) CA926035A (2)
DE (1) DE2147703A1 (2)
ES (2) ES395341A1 (2)
FR (1) FR2108602A5 (2)
GB (1) GB1297235A (2)
NL (1) NL7113366A (2)
SE (1) SE382772B (2)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5284894A (en) * 1975-12-30 1977-07-14 Matsushita Electric Works Ltd Shoulder patting device circuit configuration
JPS5284893A (en) * 1975-12-30 1977-07-14 Matsushita Electric Works Ltd Shoulder patting device circuit configuration
JP4515790B2 (ja) * 2004-03-08 2010-08-04 株式会社東芝 半導体装置の製造方法及びその製造装置

Also Published As

Publication number Publication date
ES395341A1 (es) 1974-12-16
GB1297235A (2) 1972-11-22
FR2108602A5 (2) 1972-05-19
JPS5010095B1 (2) 1975-04-18
BE773286A (fr) 1972-01-17
DE2147703A1 (de) 1972-04-06
ES419651A1 (es) 1976-05-16
AU3334071A (en) 1973-03-15
CA926035A (en) 1973-05-08
SE382772B (sv) 1976-02-16

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