CA942893A - Electrically isolated semiconductor devices on common crystalline substrate and method of making same - Google Patents

Electrically isolated semiconductor devices on common crystalline substrate and method of making same

Info

Publication number
CA942893A
CA942893A CA914,813A CA914813A CA942893A CA 942893 A CA942893 A CA 942893A CA 914813 A CA914813 A CA 914813A CA 942893 A CA942893 A CA 942893A
Authority
CA
Canada
Prior art keywords
semiconductor devices
electrically isolated
making same
crystalline substrate
isolated semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA914,813A
Other languages
English (en)
Inventor
George A. Larchian
Charles H. Fa
Donald A. Mcwilliams
Oral F. Maxwell (Jr.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
North American Aviation Corp
Original Assignee
North American Aviation Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by North American Aviation Corp filed Critical North American Aviation Corp
Application granted granted Critical
Publication of CA942893A publication Critical patent/CA942893A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/40Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/60Wet etching
    • H10P50/64Wet etching of semiconductor materials
    • H10P50/642Chemical etching
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01Manufacture or treatment
    • H10W10/011Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/019Manufacture or treatment of isolation regions comprising dielectric materials using epitaxial passivated integrated circuit [EPIC] processes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10Isolation regions comprising dielectric materials
CA914,813A 1963-12-04 1964-10-24 Electrically isolated semiconductor devices on common crystalline substrate and method of making same Expired CA942893A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32799063A 1963-12-04 1963-12-04
US33971764A 1964-01-23 1964-01-23

Publications (1)

Publication Number Publication Date
CA942893A true CA942893A (en) 1974-02-26

Family

ID=26986163

Family Applications (1)

Application Number Title Priority Date Filing Date
CA914,813A Expired CA942893A (en) 1963-12-04 1964-10-24 Electrically isolated semiconductor devices on common crystalline substrate and method of making same

Country Status (3)

Country Link
CA (1) CA942893A (da)
DK (1) DK116524B (da)
GB (1) GB1096019A (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6173345A (ja) * 1984-09-19 1986-04-15 Toshiba Corp 半導体装置

Also Published As

Publication number Publication date
GB1096019A (en) 1967-12-20
DK116524B (da) 1970-01-19

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