Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W46/00—Marks applied to devices, e.g. for alignment or identification
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
  • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
  • H01J37/3045—Object or beam position registration
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W46/00—Marks applied to devices, e.g. for alignment or identification
  • H10W46/501—Marks applied to devices, e.g. for alignment or identification for use before dicing

Landscapes

• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Electron Beam Exposure (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=10479987

Family Applications (1)

Country Status (7)

Families Citing this family (1)

• 1971
  • 1971-12-13 GB GB5776971A patent/GB1336626A/en not_active Expired
• 1972
  • 1972-11-27 DE DE2258057A patent/DE2258057A1/de active Pending
  • 1972-12-08 NL NL7216663A patent/NL7216663A/xx unknown
  • 1972-12-09 JP JP47123063A patent/JPS4873079A/ja active Pending
  • 1972-12-11 IT IT70879/72A patent/IT976005B/it active
  • 1972-12-12 CA CA158,640A patent/CA970080A/en not_active Expired
  • 1972-12-13 FR FR7244330A patent/FR2163559A1/fr not_active Withdrawn

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