JPS4873079A - - Google Patents
Info
- Publication number
- JPS4873079A JPS4873079A JP47123063A JP12306372A JPS4873079A JP S4873079 A JPS4873079 A JP S4873079A JP 47123063 A JP47123063 A JP 47123063A JP 12306372 A JP12306372 A JP 12306372A JP S4873079 A JPS4873079 A JP S4873079A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W46/00—Marks applied to devices, e.g. for alignment or identification
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W46/00—Marks applied to devices, e.g. for alignment or identification
- H10W46/501—Marks applied to devices, e.g. for alignment or identification for use before dicing
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5776971 | 1971-12-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4873079A true JPS4873079A (it) | 1973-10-02 |
Family
ID=10479987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47123063A Pending JPS4873079A (it) | 1971-12-13 | 1972-12-09 |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS4873079A (it) |
| CA (1) | CA970080A (it) |
| DE (1) | DE2258057A1 (it) |
| FR (1) | FR2163559A1 (it) |
| GB (1) | GB1336626A (it) |
| IT (1) | IT976005B (it) |
| NL (1) | NL7216663A (it) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4460831A (en) * | 1981-11-30 | 1984-07-17 | Thermo Electron Corporation | Laser stimulated high current density photoelectron generator and method of manufacture |
-
1971
- 1971-12-13 GB GB5776971A patent/GB1336626A/en not_active Expired
-
1972
- 1972-11-27 DE DE2258057A patent/DE2258057A1/de active Pending
- 1972-12-08 NL NL7216663A patent/NL7216663A/xx unknown
- 1972-12-09 JP JP47123063A patent/JPS4873079A/ja active Pending
- 1972-12-11 IT IT70879/72A patent/IT976005B/it active
- 1972-12-12 CA CA158,640A patent/CA970080A/en not_active Expired
- 1972-12-13 FR FR7244330A patent/FR2163559A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| GB1336626A (en) | 1973-11-07 |
| FR2163559A1 (it) | 1973-07-27 |
| IT976005B (it) | 1974-08-20 |
| CA970080A (en) | 1975-06-24 |
| DE2258057A1 (de) | 1973-06-20 |
| NL7216663A (it) | 1973-06-15 |